JPS55180761U - - Google Patents
Info
- Publication number
- JPS55180761U JPS55180761U JP8059079U JP8059079U JPS55180761U JP S55180761 U JPS55180761 U JP S55180761U JP 8059079 U JP8059079 U JP 8059079U JP 8059079 U JP8059079 U JP 8059079U JP S55180761 U JPS55180761 U JP S55180761U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8059079U JPS592109Y2 (ja) | 1979-06-12 | 1979-06-12 | スパッタ用回転ドラム式シャッタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8059079U JPS592109Y2 (ja) | 1979-06-12 | 1979-06-12 | スパッタ用回転ドラム式シャッタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55180761U true JPS55180761U (enExample) | 1980-12-25 |
| JPS592109Y2 JPS592109Y2 (ja) | 1984-01-20 |
Family
ID=29313923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8059079U Expired JPS592109Y2 (ja) | 1979-06-12 | 1979-06-12 | スパッタ用回転ドラム式シャッタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS592109Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178367U (ja) * | 1983-05-10 | 1984-11-29 | 株式会社富士通ゼネラル | スパツタリング装置 |
-
1979
- 1979-06-12 JP JP8059079U patent/JPS592109Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178367U (ja) * | 1983-05-10 | 1984-11-29 | 株式会社富士通ゼネラル | スパツタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS592109Y2 (ja) | 1984-01-20 |