JPS5921091B2 - Method for manufacturing magnetic recording media - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improved method for forming a film in vacuum, and relates to a method for obtaining a film made of a magnetic material on a substrate such as a film made of a polymer molded product.

Conventionally, an obstacle to utilizing the uniaxial anisotropy observed in the evaporation of magnetic materials on an industrial scale is that oblique evaporation is necessary to obtain shape anisotropy. It is necessary to limit the vapor flow radiated to radians and form a film with only a small portion of the components.

Therefore, the production rate is low, and it has not yet been put into practical use. The present invention aims to eliminate such drawbacks and provide a method for achieving an oblique evaporation effect at high speed. This objective is achieved by arranging at least one vapor reflection plate between the vapor source and the evaporation source.

An example of the configuration of the apparatus used to carry out the present invention is shown in the drawings below, and will be explained. First, an evaporation source 2 made of a magnetic material and a film 3 made of a polymer molded product as a substrate are placed facing each other in a vacuum container 1. and arrange it.

The substrate film 3 does not necessarily have to be a polymer molded product, but in many cases, the effects of the present invention are effective when the substrate film 3 is continuously transported using a transport system based on a delivery roll 4 and a take-up roll 5. more noticeable. 6 is an anti-adhesion plate,
Usually, it is often cooled by a water cooling pipe T or a refrigerant.

Although not necessarily a necessary condition, in the present invention, it is necessary to take some measures in the geometrical arrangement in order to reduce the thermal influence particularly on low melting point materials such as polymer molded articles. The feature of the present invention is the reflecting plates 8 and 9 shown in the figure, and the basic function of these reflecting plates 8 and 9 is to reflect a part of the vapor flow from the evaporation source 2 toward the substrate film 3. The virtual image of the evaporation source 2 has a large oblique component with respect to the substrate film 3 due to the number and arrangement of the evaporation sources, thereby exerting an effect equivalent to so-called oblique evaporation.
In order to perform this basic function, for example, the reflecting plates 8 and 9 are made of high melting point metal plates such as tantalum or tungsten, and are maintained at a high temperature. To maintain the high temperature, any known method such as radiant heat or electron impact heating may be used, but the figure shows the most common resistance heating method. 10 and 11 are respective heating power sources, and 12 is a heating power source for the evaporation source.

13 is a vacuum evacuation system for evacuating the inside of the vacuum container 1, and 14 is an insulation introduction terminal.

Further, 15 is a shutter of the evaporation source 2. Next, specific examples of the present invention will be described.

. Vacuum degree: 5 x 10-5nH9〇 Evaporation source: Resistance heating method o Evaporation material: Cobalt O Substrate film Polyimide film (thickness 200μ
)o Film speed: 15m/- oDistance between substrate film and evaporation source: 20CfL0 reflector: 0.17n thick tungsten plate, average temperature 1500℃
o Distance between the evaporation source and the reflection plate 8: 15crrL0 Distance between the evaporation source and the reflection plate 9: 18CTIL0 Angle of intersection between the substrate film surface and the surface of the reflection plate 8 θ: 000 Angle of intersection between the substrate film surface and the surface of the reflection plate 9 θ: 40i0 Horizontal distance from the center line of the evaporation source to the reflection plate 8: d1=10c1n0Horizontal distance from the center line of the evaporation source to the reflection plate 9: D2=8C! n When a film was formed on the substrate film under each of the above conditions,
It was as shown in the table below.

As is clear from this table, it can be seen that according to the present invention, the coercive force is improved.

Although the above numerical example is just one example, it is estimated that the most significant increase in coercive force is probably due to the oblique vapor deposition effect.

Although the shape, structure, number, arrangement, etc. of the reflectors can be modified as appropriate, as is clear from the above example, the effect of improving coercive force, which is essential for high-density recording, is remarkable. The industrial potential is extremely large. In addition, in the present invention, as can be easily inferred from the difference in film thickness, in order to obtain the same film thickness, the moving speed of the substrate can be increased, and the effect of increasing productivity cannot be overlooked. This can be effective. Furthermore, in any of the so-called vapor deposition methods, in other words, not only resistance heating vapor deposition, but also electron beam heating vapor deposition, laser beam heating vapor deposition, ion plating, or variations thereof, in other words, various vapor deposition methods using reactive gases, etc. It is also effective in As described above, the manufacturing method of the present invention has the advantage that magnetic recording media with good characteristics can be manufactured at high speed.

[Brief explanation of the drawing]

The drawing is a sectional front view of an embodiment of an apparatus used to carry out the manufacturing method according to the present invention. 1... Vacuum container, 2... Evaporation source, 3.
...Substrate, 8,9...Reflector.

Claims (1)

[Claims] 1. An evaporation source made of a magnetic material and a substrate are disposed facing each other in a vacuum container, and at least one reflector plate maintained at a high temperature is disposed in a space between the evaporation source and the substrate. A method of manufacturing a magnetic recording medium, characterized in that a part of the vapor flow from the evaporation source is made to impinge on the reflection plate, and a film is continuously formed by the vapor flow on the substrate. 2. The method for manufacturing a magnetic recording medium according to claim 1, characterized in that a film made of a polymer molded product is used as the substrate.