JPS5920803A - 変位測定装置 - Google Patents

変位測定装置

Info

Publication number
JPS5920803A
JPS5920803A JP13152982A JP13152982A JPS5920803A JP S5920803 A JPS5920803 A JP S5920803A JP 13152982 A JP13152982 A JP 13152982A JP 13152982 A JP13152982 A JP 13152982A JP S5920803 A JPS5920803 A JP S5920803A
Authority
JP
Japan
Prior art keywords
sensing
slider
measuring device
displacement measuring
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13152982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325284B2 (enrdf_load_stackoverflow
Inventor
Soji Ichikawa
宗次 市川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP13152982A priority Critical patent/JPS5920803A/ja
Priority to US06/516,801 priority patent/US4549353A/en
Priority to GB08320146A priority patent/GB2124381B/en
Priority to DE19833327266 priority patent/DE3327266A1/de
Publication of JPS5920803A publication Critical patent/JPS5920803A/ja
Publication of JPS6325284B2 publication Critical patent/JPS6325284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders
    • G01D5/34753Carriages; Driving or coupling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)
JP13152982A 1982-07-28 1982-07-28 変位測定装置 Granted JPS5920803A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13152982A JPS5920803A (ja) 1982-07-28 1982-07-28 変位測定装置
US06/516,801 US4549353A (en) 1982-07-28 1983-07-25 Displacement measuring instrument
GB08320146A GB2124381B (en) 1982-07-28 1983-07-26 Displacement measuring instrument
DE19833327266 DE3327266A1 (de) 1982-07-28 1983-07-28 Verschiebungsmessinstrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13152982A JPS5920803A (ja) 1982-07-28 1982-07-28 変位測定装置

Publications (2)

Publication Number Publication Date
JPS5920803A true JPS5920803A (ja) 1984-02-02
JPS6325284B2 JPS6325284B2 (enrdf_load_stackoverflow) 1988-05-25

Family

ID=15060196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13152982A Granted JPS5920803A (ja) 1982-07-28 1982-07-28 変位測定装置

Country Status (1)

Country Link
JP (1) JPS5920803A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017187491A (ja) * 2016-04-05 2017-10-12 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung 長さ測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017187491A (ja) * 2016-04-05 2017-10-12 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung 長さ測定装置

Also Published As

Publication number Publication date
JPS6325284B2 (enrdf_load_stackoverflow) 1988-05-25

Similar Documents

Publication Publication Date Title
JP4434452B2 (ja) 測尺装置
JP5288110B2 (ja) 角度測定器
US7627956B2 (en) Measurement probe for use in coordinate measuring machines
JP2997412B2 (ja) 多座標走査ヘッド
JPS586882B2 (ja) 伸び計
JP2000161940A (ja) 長さ測定装置
US5224274A (en) Contact gage
US4444504A (en) Displacement measuring instrument
GB2039673A (en) Precision length measuring arrangement
US4549353A (en) Displacement measuring instrument
JPH0212564Y2 (enrdf_load_stackoverflow)
JPS5920803A (ja) 変位測定装置
JP2010145118A (ja) 形状測定プローブ
JP3609271B2 (ja) 変位測定装置
JPS5948601A (ja) 測長器
JPH10253310A (ja) 接触型変位測定器
JPS5920807A (ja) 変位測定装置
JPH05141426A (ja) 真直度測定器用エアスライド
JP3497126B2 (ja) 測定器のスピンドル支持構造
JPS5836725B2 (ja) 光学式変位測定装置
JPS5950311A (ja) 変位測定装置
JPH06185950A (ja) 変位測定装置
JPS61129501A (ja) カメラレンズの移動量測定装置
JP2504778Y2 (ja) プランジャ型測長器
JPS6023821Y2 (ja) テ−プカ−トリツジ等のパツド圧着力測定装置