JPS59205733A - ペレットピックアップ装置 - Google Patents

ペレットピックアップ装置

Info

Publication number
JPS59205733A
JPS59205733A JP8138983A JP8138983A JPS59205733A JP S59205733 A JPS59205733 A JP S59205733A JP 8138983 A JP8138983 A JP 8138983A JP 8138983 A JP8138983 A JP 8138983A JP S59205733 A JPS59205733 A JP S59205733A
Authority
JP
Japan
Prior art keywords
tape
pellet
sheet
pellets
adsorption collet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8138983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639374B2 (enrdf_load_stackoverflow
Inventor
Takeshi Sato
武 佐藤
Masahiro Muraoka
村岡　正裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP8138983A priority Critical patent/JPS59205733A/ja
Publication of JPS59205733A publication Critical patent/JPS59205733A/ja
Publication of JPS639374B2 publication Critical patent/JPS639374B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)
JP8138983A 1983-05-09 1983-05-09 ペレットピックアップ装置 Granted JPS59205733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8138983A JPS59205733A (ja) 1983-05-09 1983-05-09 ペレットピックアップ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8138983A JPS59205733A (ja) 1983-05-09 1983-05-09 ペレットピックアップ装置

Publications (2)

Publication Number Publication Date
JPS59205733A true JPS59205733A (ja) 1984-11-21
JPS639374B2 JPS639374B2 (enrdf_load_stackoverflow) 1988-02-29

Family

ID=13744943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8138983A Granted JPS59205733A (ja) 1983-05-09 1983-05-09 ペレットピックアップ装置

Country Status (1)

Country Link
JP (1) JPS59205733A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7192843B2 (en) 2001-10-02 2007-03-20 Rohm Co., Ltd. Method of fabricating semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366159A (en) * 1976-11-26 1978-06-13 Toshiba Corp Production unit of semiconductor element
JPS576242U (enrdf_load_stackoverflow) * 1980-06-12 1982-01-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366159A (en) * 1976-11-26 1978-06-13 Toshiba Corp Production unit of semiconductor element
JPS576242U (enrdf_load_stackoverflow) * 1980-06-12 1982-01-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7192843B2 (en) 2001-10-02 2007-03-20 Rohm Co., Ltd. Method of fabricating semiconductor device

Also Published As

Publication number Publication date
JPS639374B2 (enrdf_load_stackoverflow) 1988-02-29

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