JPS59202053A - 感湿素子の製造方法 - Google Patents
感湿素子の製造方法Info
- Publication number
- JPS59202053A JPS59202053A JP58077807A JP7780783A JPS59202053A JP S59202053 A JPS59202053 A JP S59202053A JP 58077807 A JP58077807 A JP 58077807A JP 7780783 A JP7780783 A JP 7780783A JP S59202053 A JPS59202053 A JP S59202053A
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- moisture
- film
- sensitive film
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 claims abstract description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 11
- 239000001301 oxygen Substances 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000001020 plasma etching Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 13
- 239000011521 glass Substances 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 239000004372 Polyvinyl alcohol Substances 0.000 abstract description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000001913 cellulose Substances 0.000 abstract description 2
- 229920002678 cellulose Polymers 0.000 abstract description 2
- 229920000058 polyacrylate Polymers 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 abstract 1
- 239000010408 film Substances 0.000 description 25
- 239000010409 thin film Substances 0.000 description 11
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 229920001477 hydrophilic polymer Polymers 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 244000005894 Albizia lebbeck Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 210000003734 kidney Anatomy 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000005518 polymer electrolyte Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229960002796 polystyrene sulfonate Drugs 0.000 description 1
- 239000011970 polystyrene sulfonate Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Non-Adjustable Resistors (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58077807A JPS59202053A (ja) | 1983-04-30 | 1983-04-30 | 感湿素子の製造方法 |
| GB08410880A GB2138952B (en) | 1983-04-30 | 1984-04-27 | Producing electrical moisture sensors |
| US06/604,386 US4515653A (en) | 1983-04-30 | 1984-04-27 | Method for production of a moisture sensor |
| DE3416124A DE3416124C2 (de) | 1983-04-30 | 1984-04-30 | Verfahren zur Herstellung eines Feuchtigkeitssensors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58077807A JPS59202053A (ja) | 1983-04-30 | 1983-04-30 | 感湿素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59202053A true JPS59202053A (ja) | 1984-11-15 |
| JPH0242430B2 JPH0242430B2 (enrdf_load_stackoverflow) | 1990-09-21 |
Family
ID=13644284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58077807A Granted JPS59202053A (ja) | 1983-04-30 | 1983-04-30 | 感湿素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59202053A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100965835B1 (ko) | 2007-09-18 | 2010-06-28 | 전자부품연구원 | 용량형 고분자 습도센서 및 그 제조방법 |
-
1983
- 1983-04-30 JP JP58077807A patent/JPS59202053A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100965835B1 (ko) | 2007-09-18 | 2010-06-28 | 전자부품연구원 | 용량형 고분자 습도센서 및 그 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0242430B2 (enrdf_load_stackoverflow) | 1990-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4765864A (en) | Etching method for producing an electrochemical cell in a crystalline substrate | |
| US4651121A (en) | Moisture sensor and a method for the production of the same | |
| US4515653A (en) | Method for production of a moisture sensor | |
| WO1993016377A1 (en) | Humidity sensor and its manufacture | |
| CN1016896B (zh) | 一种温湿双功能敏感薄膜元件及其制造方法 | |
| JP2021067690A (ja) | 無機湿度センサデバイス | |
| CN110568025A (zh) | 基于烛灰纳米颗粒层的湿度传感器及其制备方法 | |
| JPS5837907A (ja) | 陽極酸化アルミ感湿膜の製法 | |
| JPS59202053A (ja) | 感湿素子の製造方法 | |
| JP2001004579A (ja) | 容量式感湿素子 | |
| JPS61181104A (ja) | 白金測温抵抗体 | |
| JPH0242431B2 (enrdf_load_stackoverflow) | ||
| JPH06148122A (ja) | 湿度検知素子 | |
| JP2622589B2 (ja) | 電気化学測定用微小電極セルおよびその製造方法 | |
| JP2577045B2 (ja) | 電気化学測定用微小電極セルおよびその製造方法 | |
| JPH10232213A (ja) | 湿度センサの製造法 | |
| JPH0419553A (ja) | 静電容量式湿度センサ | |
| JPH04318450A (ja) | 静電容量式湿度センサ | |
| CN110207737A (zh) | 线阵列结构的微带天线传感器系统、传感器、检测及制备方法 | |
| JP2590002B2 (ja) | 電気化学測定用微小電極セル及びその製造方法 | |
| TWI431268B (zh) | 揮發性有機化合物氣體之多孔性感測晶片及其製造方法 | |
| JP2002071613A (ja) | 抵抗検出型感湿素子及びその製造方法 | |
| JPS5837908A (ja) | 陽極酸化アルミ感湿膜の製法 | |
| JPS61290351A (ja) | 高分子薄膜感湿素子 | |
| JPS639721B2 (enrdf_load_stackoverflow) |