JPS59202026A - 摺動式ブレ−ド流量計 - Google Patents

摺動式ブレ−ド流量計

Info

Publication number
JPS59202026A
JPS59202026A JP7694783A JP7694783A JPS59202026A JP S59202026 A JPS59202026 A JP S59202026A JP 7694783 A JP7694783 A JP 7694783A JP 7694783 A JP7694783 A JP 7694783A JP S59202026 A JPS59202026 A JP S59202026A
Authority
JP
Japan
Prior art keywords
cam
plate
rotor
small
flowmeter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7694783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6343690B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Shimozono
下園　俊昭
Hiroaki Katayama
片山　博明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nittoseiko Co Ltd
Original Assignee
Nittoseiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nittoseiko Co Ltd filed Critical Nittoseiko Co Ltd
Priority to JP7694783A priority Critical patent/JPS59202026A/ja
Publication of JPS59202026A publication Critical patent/JPS59202026A/ja
Publication of JPS6343690B2 publication Critical patent/JPS6343690B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F3/00—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow
    • G01F3/02—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement
    • G01F3/04—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having rigid movable walls
    • G01F3/06—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having rigid movable walls comprising members rotating in a fluid-tight or substantially fluid-tight manner in a housing

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP7694783A 1983-04-30 1983-04-30 摺動式ブレ−ド流量計 Granted JPS59202026A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7694783A JPS59202026A (ja) 1983-04-30 1983-04-30 摺動式ブレ−ド流量計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7694783A JPS59202026A (ja) 1983-04-30 1983-04-30 摺動式ブレ−ド流量計

Publications (2)

Publication Number Publication Date
JPS59202026A true JPS59202026A (ja) 1984-11-15
JPS6343690B2 JPS6343690B2 (enrdf_load_stackoverflow) 1988-09-01

Family

ID=13619950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7694783A Granted JPS59202026A (ja) 1983-04-30 1983-04-30 摺動式ブレ−ド流量計

Country Status (1)

Country Link
JP (1) JPS59202026A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220006543A (ko) 2019-05-21 2022-01-17 에이지씨 가부시키가이샤 Euv 리소그래피용 반사형 마스크 블랭크

Also Published As

Publication number Publication date
JPS6343690B2 (enrdf_load_stackoverflow) 1988-09-01

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