JPS5919913A - 焦点制御装置 - Google Patents
焦点制御装置Info
- Publication number
- JPS5919913A JPS5919913A JP12994082A JP12994082A JPS5919913A JP S5919913 A JPS5919913 A JP S5919913A JP 12994082 A JP12994082 A JP 12994082A JP 12994082 A JP12994082 A JP 12994082A JP S5919913 A JPS5919913 A JP S5919913A
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- focus
- lens
- luminous flux
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015572 biosynthetic process Effects 0.000 claims abstract 3
- 238000003384 imaging method Methods 0.000 claims description 19
- 238000003491 array Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 27
- 230000004907 flux Effects 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 description 17
- 238000009826 distribution Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000005457 optimization Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 101000857682 Homo sapiens Runt-related transcription factor 2 Proteins 0.000 description 1
- 102100030551 Protein MEMO1 Human genes 0.000 description 1
- 101710176845 Protein MEMO1 Proteins 0.000 description 1
- 102100025368 Runt-related transcription factor 2 Human genes 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 241000862969 Stella Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
- G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Focusing (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12994082A JPS5919913A (ja) | 1982-07-26 | 1982-07-26 | 焦点制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12994082A JPS5919913A (ja) | 1982-07-26 | 1982-07-26 | 焦点制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5919913A true JPS5919913A (ja) | 1984-02-01 |
| JPH0157885B2 JPH0157885B2 (enrdf_load_stackoverflow) | 1989-12-07 |
Family
ID=15022190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12994082A Granted JPS5919913A (ja) | 1982-07-26 | 1982-07-26 | 焦点制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5919913A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60238805A (ja) * | 1984-04-16 | 1985-11-27 | シャンドン・サイエンティフィック・リミテッド | 自動焦点装置 |
| JPS61235808A (ja) * | 1985-04-12 | 1986-10-21 | Hitachi Ltd | 自動焦点合せ方法及び装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023161699A (ja) | 2022-04-26 | 2023-11-08 | パナソニックＩｐマネジメント株式会社 | 副振動板、およびスピーカ |
-
1982
- 1982-07-26 JP JP12994082A patent/JPS5919913A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60238805A (ja) * | 1984-04-16 | 1985-11-27 | シャンドン・サイエンティフィック・リミテッド | 自動焦点装置 |
| JPS61235808A (ja) * | 1985-04-12 | 1986-10-21 | Hitachi Ltd | 自動焦点合せ方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0157885B2 (enrdf_load_stackoverflow) | 1989-12-07 |
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