JPS59196549A - 電子線装置等用試料装置 - Google Patents

電子線装置等用試料装置

Info

Publication number
JPS59196549A
JPS59196549A JP58071107A JP7110783A JPS59196549A JP S59196549 A JPS59196549 A JP S59196549A JP 58071107 A JP58071107 A JP 58071107A JP 7110783 A JP7110783 A JP 7110783A JP S59196549 A JPS59196549 A JP S59196549A
Authority
JP
Japan
Prior art keywords
axis
sample
stage
movement
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58071107A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136667B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Eisuke Kamimura
上村　英助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58071107A priority Critical patent/JPS59196549A/ja
Priority to US06/601,652 priority patent/US4587431A/en
Publication of JPS59196549A publication Critical patent/JPS59196549A/ja
Publication of JPH0136667B2 publication Critical patent/JPH0136667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/08—Holders for targets or for other objects to be irradiated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
JP58071107A 1983-04-22 1983-04-22 電子線装置等用試料装置 Granted JPS59196549A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58071107A JPS59196549A (ja) 1983-04-22 1983-04-22 電子線装置等用試料装置
US06/601,652 US4587431A (en) 1983-04-22 1984-04-18 Specimen manipulating mechanism for charged-particle beam instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58071107A JPS59196549A (ja) 1983-04-22 1983-04-22 電子線装置等用試料装置

Publications (2)

Publication Number Publication Date
JPS59196549A true JPS59196549A (ja) 1984-11-07
JPH0136667B2 JPH0136667B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-01

Family

ID=13450994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58071107A Granted JPS59196549A (ja) 1983-04-22 1983-04-22 電子線装置等用試料装置

Country Status (1)

Country Link
JP (1) JPS59196549A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64635A (en) * 1987-06-22 1989-01-05 Toshiba Mach Co Ltd Sample setting device
JP2012109115A (ja) * 2010-11-17 2012-06-07 Korea Basic Science Institute 透過電子顕微鏡の３次元分析のための３軸駆動が可能な試片ホルダー
CN115200970A (zh) * 2022-09-16 2022-10-18 常州隆斯克普电子科技有限公司 一种可旋转持续制冷样品台

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198861U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-08-29 1982-12-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198861U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-08-29 1982-12-17

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64635A (en) * 1987-06-22 1989-01-05 Toshiba Mach Co Ltd Sample setting device
JP2012109115A (ja) * 2010-11-17 2012-06-07 Korea Basic Science Institute 透過電子顕微鏡の３次元分析のための３軸駆動が可能な試片ホルダー
CN115200970A (zh) * 2022-09-16 2022-10-18 常州隆斯克普电子科技有限公司 一种可旋转持续制冷样品台
CN115200970B (zh) * 2022-09-16 2023-01-03 常州隆斯克普电子科技有限公司 一种可旋转持续制冷样品台

Also Published As

Publication number Publication date
JPH0136667B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-01

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