JPS59194386A - 高周波加熱装置 - Google Patents
高周波加熱装置Info
- Publication number
- JPS59194386A JPS59194386A JP6886983A JP6886983A JPS59194386A JP S59194386 A JPS59194386 A JP S59194386A JP 6886983 A JP6886983 A JP 6886983A JP 6886983 A JP6886983 A JP 6886983A JP S59194386 A JPS59194386 A JP S59194386A
- Authority
- JP
- Japan
- Prior art keywords
- high frequency
- waveguide
- heating
- heating chamber
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Constitution Of High-Frequency Heating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6886983A JPS59194386A (ja) | 1983-04-19 | 1983-04-19 | 高周波加熱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6886983A JPS59194386A (ja) | 1983-04-19 | 1983-04-19 | 高周波加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59194386A true JPS59194386A (ja) | 1984-11-05 |
JPH0129316B2 JPH0129316B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-09 |
Family
ID=13386090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6886983A Granted JPS59194386A (ja) | 1983-04-19 | 1983-04-19 | 高周波加熱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59194386A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013129037A1 (ja) * | 2012-02-27 | 2013-09-06 | 東京エレクトロン株式会社 | マイクロ波加熱処理装置および処理方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5863956A (ja) * | 1981-10-14 | 1983-04-16 | Canon Inc | 原稿自動送り装置 |
-
1983
- 1983-04-19 JP JP6886983A patent/JPS59194386A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5863956A (ja) * | 1981-10-14 | 1983-04-16 | Canon Inc | 原稿自動送り装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013129037A1 (ja) * | 2012-02-27 | 2013-09-06 | 東京エレクトロン株式会社 | マイクロ波加熱処理装置および処理方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0129316B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-09 |
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