JPS59190361A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPS59190361A
JPS59190361A JP58062291A JP6229183A JPS59190361A JP S59190361 A JPS59190361 A JP S59190361A JP 58062291 A JP58062291 A JP 58062291A JP 6229183 A JP6229183 A JP 6229183A JP S59190361 A JPS59190361 A JP S59190361A
Authority
JP
Japan
Prior art keywords
pot
plating material
vapor deposition
vessel
storage tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58062291A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0254427B2 (enrdf_load_stackoverflow
Inventor
Shigeo Itano
板野 重夫
Tetsuyoshi Wada
哲義 和田
Shinji Nakagawa
中川 新二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP58062291A priority Critical patent/JPS59190361A/ja
Publication of JPS59190361A publication Critical patent/JPS59190361A/ja
Publication of JPH0254427B2 publication Critical patent/JPH0254427B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP58062291A 1983-04-11 1983-04-11 真空蒸着装置 Granted JPS59190361A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58062291A JPS59190361A (ja) 1983-04-11 1983-04-11 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58062291A JPS59190361A (ja) 1983-04-11 1983-04-11 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS59190361A true JPS59190361A (ja) 1984-10-29
JPH0254427B2 JPH0254427B2 (enrdf_load_stackoverflow) 1990-11-21

Family

ID=13195863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58062291A Granted JPS59190361A (ja) 1983-04-11 1983-04-11 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS59190361A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0254427B2 (enrdf_load_stackoverflow) 1990-11-21

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