JPS59190361A - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPS59190361A JPS59190361A JP58062291A JP6229183A JPS59190361A JP S59190361 A JPS59190361 A JP S59190361A JP 58062291 A JP58062291 A JP 58062291A JP 6229183 A JP6229183 A JP 6229183A JP S59190361 A JPS59190361 A JP S59190361A
- Authority
- JP
- Japan
- Prior art keywords
- pot
- plating material
- vapor deposition
- vessel
- storage tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract description 4
- 239000000463 material Substances 0.000 claims abstract description 83
- 230000008018 melting Effects 0.000 claims abstract description 17
- 238000002844 melting Methods 0.000 claims abstract description 17
- 238000007747 plating Methods 0.000 claims description 66
- 238000001704 evaporation Methods 0.000 claims description 13
- 230000008020 evaporation Effects 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 abstract description 22
- 238000007667 floating Methods 0.000 abstract description 11
- 238000007598 dipping method Methods 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 description 27
- 239000000126 substance Substances 0.000 description 6
- 238000010025 steaming Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004821 distillation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000002893 slag Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58062291A JPS59190361A (ja) | 1983-04-11 | 1983-04-11 | 真空蒸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58062291A JPS59190361A (ja) | 1983-04-11 | 1983-04-11 | 真空蒸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59190361A true JPS59190361A (ja) | 1984-10-29 |
JPH0254427B2 JPH0254427B2 (enrdf_load_stackoverflow) | 1990-11-21 |
Family
ID=13195863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58062291A Granted JPS59190361A (ja) | 1983-04-11 | 1983-04-11 | 真空蒸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59190361A (enrdf_load_stackoverflow) |
-
1983
- 1983-04-11 JP JP58062291A patent/JPS59190361A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0254427B2 (enrdf_load_stackoverflow) | 1990-11-21 |
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