JPH0216382B2 - - Google Patents

Info

Publication number
JPH0216382B2
JPH0216382B2 JP57106218A JP10621882A JPH0216382B2 JP H0216382 B2 JPH0216382 B2 JP H0216382B2 JP 57106218 A JP57106218 A JP 57106218A JP 10621882 A JP10621882 A JP 10621882A JP H0216382 B2 JPH0216382 B2 JP H0216382B2
Authority
JP
Japan
Prior art keywords
evaporation
plating material
pot
scraping rod
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57106218A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58224166A (ja
Inventor
Shinji Seze
Toshio Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP10621882A priority Critical patent/JPS58224166A/ja
Publication of JPS58224166A publication Critical patent/JPS58224166A/ja
Publication of JPH0216382B2 publication Critical patent/JPH0216382B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP10621882A 1982-06-22 1982-06-22 連続真空蒸着装置 Granted JPS58224166A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10621882A JPS58224166A (ja) 1982-06-22 1982-06-22 連続真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10621882A JPS58224166A (ja) 1982-06-22 1982-06-22 連続真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS58224166A JPS58224166A (ja) 1983-12-26
JPH0216382B2 true JPH0216382B2 (enrdf_load_stackoverflow) 1990-04-17

Family

ID=14428006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10621882A Granted JPS58224166A (ja) 1982-06-22 1982-06-22 連続真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS58224166A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS58224166A (ja) 1983-12-26

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