JPS59190302A - 超微粒子製造方法および装置 - Google Patents

超微粒子製造方法および装置

Info

Publication number
JPS59190302A
JPS59190302A JP3919083A JP3919083A JPS59190302A JP S59190302 A JPS59190302 A JP S59190302A JP 3919083 A JP3919083 A JP 3919083A JP 3919083 A JP3919083 A JP 3919083A JP S59190302 A JPS59190302 A JP S59190302A
Authority
JP
Japan
Prior art keywords
raw material
arc
gas
cylinder
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3919083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214402B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Sasaki
佐々木　弘行
Hideaki Shibuya
渋谷　英昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
Tokyo Tekko Co Ltd
Original Assignee
Daido Steel Co Ltd
Tokyo Tekko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd, Tokyo Tekko Co Ltd filed Critical Daido Steel Co Ltd
Priority to JP3919083A priority Critical patent/JPS59190302A/ja
Publication of JPS59190302A publication Critical patent/JPS59190302A/ja
Publication of JPH0214402B2 publication Critical patent/JPH0214402B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Glanulating (AREA)
JP3919083A 1983-03-11 1983-03-11 超微粒子製造方法および装置 Granted JPS59190302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3919083A JPS59190302A (ja) 1983-03-11 1983-03-11 超微粒子製造方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3919083A JPS59190302A (ja) 1983-03-11 1983-03-11 超微粒子製造方法および装置

Publications (2)

Publication Number Publication Date
JPS59190302A true JPS59190302A (ja) 1984-10-29
JPH0214402B2 JPH0214402B2 (enrdf_load_stackoverflow) 1990-04-09

Family

ID=12546191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3919083A Granted JPS59190302A (ja) 1983-03-11 1983-03-11 超微粒子製造方法および装置

Country Status (1)

Country Link
JP (1) JPS59190302A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194003A (ja) * 1984-03-13 1985-10-02 Hosokawa Funtai Kogaku Kenkyusho:Kk 金属微粒子製造法，並びに，装置
JPS61223109A (ja) * 1985-03-28 1986-10-03 Dia Shinku Giken Kk 超微粒子製造方法及び装置
JPS61223108A (ja) * 1985-03-28 1986-10-03 Dia Shinku Giken Kk 超微粒子製造方法及び装置
JPH01275708A (ja) * 1988-04-28 1989-11-06 Natl Res Inst For Metals ニッケルと窒化チタン超微粒子の接合した複合超微粒子の製造法
JP2014205891A (ja) * 2013-04-15 2014-10-30 東芝三菱電機産業システム株式会社 微粒子生成装置
JP2015107472A (ja) * 2013-12-05 2015-06-11 株式会社リコー 液滴吐出装置及び粒子製造装置
CN112452278A (zh) * 2020-12-01 2021-03-09 深圳市博纯半导体材料有限公司 一种乙硼烷合成系统及方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528267A (en) * 1975-07-08 1977-01-21 Kubota Ltd Oil-pressure vehicle brake
JPS5639681A (en) * 1979-09-07 1981-04-15 Toshiba Corp Recording retrieval unit for picture information

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528267A (en) * 1975-07-08 1977-01-21 Kubota Ltd Oil-pressure vehicle brake
JPS5639681A (en) * 1979-09-07 1981-04-15 Toshiba Corp Recording retrieval unit for picture information

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194003A (ja) * 1984-03-13 1985-10-02 Hosokawa Funtai Kogaku Kenkyusho:Kk 金属微粒子製造法，並びに，装置
JPS61223109A (ja) * 1985-03-28 1986-10-03 Dia Shinku Giken Kk 超微粒子製造方法及び装置
JPS61223108A (ja) * 1985-03-28 1986-10-03 Dia Shinku Giken Kk 超微粒子製造方法及び装置
JPH01275708A (ja) * 1988-04-28 1989-11-06 Natl Res Inst For Metals ニッケルと窒化チタン超微粒子の接合した複合超微粒子の製造法
JP2014205891A (ja) * 2013-04-15 2014-10-30 東芝三菱電機産業システム株式会社 微粒子生成装置
JP2015107472A (ja) * 2013-12-05 2015-06-11 株式会社リコー 液滴吐出装置及び粒子製造装置
CN112452278A (zh) * 2020-12-01 2021-03-09 深圳市博纯半导体材料有限公司 一种乙硼烷合成系统及方法
CN112452278B (zh) * 2020-12-01 2021-07-16 深圳市博纯半导体材料有限公司 一种乙硼烷合成系统及方法

Also Published As

Publication number Publication date
JPH0214402B2 (enrdf_load_stackoverflow) 1990-04-09

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