JPS5918641B2 - 光反射による傾角検出あらさ測定方法 - Google Patents

光反射による傾角検出あらさ測定方法

Info

Publication number
JPS5918641B2
JPS5918641B2 JP5362874A JP5362874A JPS5918641B2 JP S5918641 B2 JPS5918641 B2 JP S5918641B2 JP 5362874 A JP5362874 A JP 5362874A JP 5362874 A JP5362874 A JP 5362874A JP S5918641 B2 JPS5918641 B2 JP S5918641B2
Authority
JP
Japan
Prior art keywords
measured
light
optical sensors
roughness
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5362874A
Other languages
English (en)
Japanese (ja)
Other versions
JPS50146365A (enrdf_load_stackoverflow
Inventor
良司 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5362874A priority Critical patent/JPS5918641B2/ja
Publication of JPS50146365A publication Critical patent/JPS50146365A/ja
Publication of JPS5918641B2 publication Critical patent/JPS5918641B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP5362874A 1974-05-14 1974-05-14 光反射による傾角検出あらさ測定方法 Expired JPS5918641B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5362874A JPS5918641B2 (ja) 1974-05-14 1974-05-14 光反射による傾角検出あらさ測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5362874A JPS5918641B2 (ja) 1974-05-14 1974-05-14 光反射による傾角検出あらさ測定方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6429679A Division JPS5948324B2 (ja) 1979-05-24 1979-05-24 光反射による傾角検出あらさ測定方法

Publications (2)

Publication Number Publication Date
JPS50146365A JPS50146365A (enrdf_load_stackoverflow) 1975-11-25
JPS5918641B2 true JPS5918641B2 (ja) 1984-04-28

Family

ID=12948163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5362874A Expired JPS5918641B2 (ja) 1974-05-14 1974-05-14 光反射による傾角検出あらさ測定方法

Country Status (1)

Country Link
JP (1) JPS5918641B2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910067A (enrdf_load_stackoverflow) * 1972-05-25 1974-01-29

Also Published As

Publication number Publication date
JPS50146365A (enrdf_load_stackoverflow) 1975-11-25

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