JPS59184745A - 透明な基体にコ−テイングを行う方法 - Google Patents
透明な基体にコ−テイングを行う方法Info
- Publication number
- JPS59184745A JPS59184745A JP59054600A JP5460084A JPS59184745A JP S59184745 A JPS59184745 A JP S59184745A JP 59054600 A JP59054600 A JP 59054600A JP 5460084 A JP5460084 A JP 5460084A JP S59184745 A JPS59184745 A JP S59184745A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- layer
- partial pressure
- sputtering
- indium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 title claims description 12
- 238000000576 coating method Methods 0.000 title claims description 11
- 239000011248 coating agent Substances 0.000 title claims description 10
- 239000010410 layer Substances 0.000 claims description 46
- 238000004544 sputter deposition Methods 0.000 claims description 19
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 10
- 229910001887 tin oxide Inorganic materials 0.000 claims description 10
- 239000011241 protective layer Substances 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229910003437 indium oxide Inorganic materials 0.000 claims description 7
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 241001282110 Pagrus major Species 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 230000014759 maintenance of location Effects 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 239000011133 lead Substances 0.000 claims 1
- 238000012423 maintenance Methods 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000002689 soil Substances 0.000 claims 1
- 239000004071 soot Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 20
- 229910052709 silver Inorganic materials 0.000 description 20
- 239000004332 silver Substances 0.000 description 20
- 230000005540 biological transmission Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 241000513439 Ceratopetalum apetalum Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 210000004392 genitalia Anatomy 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Optical Filters (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3310916 | 1983-03-25 | ||
| DE3310916.8 | 1983-03-25 | ||
| DE3316548.3 | 1983-05-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59184745A true JPS59184745A (ja) | 1984-10-20 |
| JPH0339021B2 JPH0339021B2 (enrdf_load_stackoverflow) | 1991-06-12 |
Family
ID=6194652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59054600A Granted JPS59184745A (ja) | 1983-03-25 | 1984-03-23 | 透明な基体にコ−テイングを行う方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS59184745A (enrdf_load_stackoverflow) |
| ZA (1) | ZA842139B (enrdf_load_stackoverflow) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61111940A (ja) * | 1984-10-29 | 1986-05-30 | ピーピージー・インダストリーズ・インコーポレーテツド | 高透過率で低放射率の製品およびその製法 |
| JPS6237052U (enrdf_load_stackoverflow) * | 1985-08-23 | 1987-03-05 | ||
| JPS62196366A (ja) * | 1985-12-23 | 1987-08-29 | ピ−ピ−ジ− インダストリ−ズ，インコ−ポレ−テツド | 高透過率，低放射率物品 |
| JPS63131101A (ja) * | 1986-11-21 | 1988-06-03 | Nippon Sheet Glass Co Ltd | 多層反射防止膜 |
| JPH03287757A (ja) * | 1990-04-02 | 1991-12-18 | Toyoda Gosei Co Ltd | 有色製品の製造方法及び有色製品 |
| JP2002533565A (ja) * | 1998-12-18 | 2002-10-08 | ピーピージー・インダストリーズ・オハイオ・インコーポレイテッド | 金属プライマー層を使用しないで銀ベース低放射率コーティングを製造するための方法及び装置並びにそれによる製造物品 |
| US6522463B1 (en) | 1998-05-15 | 2003-02-18 | Toyo Boseki Kabushiki Kaisha | Infrared absorption filter |
| US6542292B2 (en) | 1999-12-20 | 2003-04-01 | Toyo Boseki Kabushiki Kaisha | Infrared absorption filter |
-
1984
- 1984-03-22 ZA ZA842139A patent/ZA842139B/xx unknown
- 1984-03-23 JP JP59054600A patent/JPS59184745A/ja active Granted
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61111940A (ja) * | 1984-10-29 | 1986-05-30 | ピーピージー・インダストリーズ・インコーポレーテツド | 高透過率で低放射率の製品およびその製法 |
| JPS6237052U (enrdf_load_stackoverflow) * | 1985-08-23 | 1987-03-05 | ||
| JPS62196366A (ja) * | 1985-12-23 | 1987-08-29 | ピ−ピ−ジ− インダストリ−ズ，インコ−ポレ−テツド | 高透過率，低放射率物品 |
| JPS63131101A (ja) * | 1986-11-21 | 1988-06-03 | Nippon Sheet Glass Co Ltd | 多層反射防止膜 |
| JPH03287757A (ja) * | 1990-04-02 | 1991-12-18 | Toyoda Gosei Co Ltd | 有色製品の製造方法及び有色製品 |
| US6522463B1 (en) | 1998-05-15 | 2003-02-18 | Toyo Boseki Kabushiki Kaisha | Infrared absorption filter |
| USRE39858E1 (en) | 1998-05-15 | 2007-09-25 | Toyo Boseki Kabushiki Kaisha | Infrared absorption filter |
| USRE39857E1 (en) | 1998-05-15 | 2007-09-25 | Toyo Boseki Kabushiki Kaisha | Infrared absorption filter |
| JP2002533565A (ja) * | 1998-12-18 | 2002-10-08 | ピーピージー・インダストリーズ・オハイオ・インコーポレイテッド | 金属プライマー層を使用しないで銀ベース低放射率コーティングを製造するための方法及び装置並びにそれによる製造物品 |
| US6542292B2 (en) | 1999-12-20 | 2003-04-01 | Toyo Boseki Kabushiki Kaisha | Infrared absorption filter |
Also Published As
| Publication number | Publication date |
|---|---|
| ZA842139B (en) | 1984-10-31 |
| JPH0339021B2 (enrdf_load_stackoverflow) | 1991-06-12 |
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