JPS5918435U - Non-contact wafer backpack - Google Patents
Non-contact wafer backpackInfo
- Publication number
- JPS5918435U JPS5918435U JP11397382U JP11397382U JPS5918435U JP S5918435 U JPS5918435 U JP S5918435U JP 11397382 U JP11397382 U JP 11397382U JP 11397382 U JP11397382 U JP 11397382U JP S5918435 U JPS5918435 U JP S5918435U
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- contact wafer
- backpack
- main body
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図および第２図は従来の非接触型ウェーハチャック
を示し、第１図はその下面図で、第２図は第１図の■−
■線に沿う断面図である。第３図および第４図はこの考
案の一実施例の非接触型ウェーハチャックを示し、第３
図はその下面図で、第４図は第３図のＴＶ＝ＩＶ線に沿
う断面図である。
１０・・・・・・本体、１１・・・・・・空洞、１２・
・・・・・ガス吹き出し口、１３・・・・・・ガス供給
口、１４・・・・・・ガス排出口、１５・・・・・・半
導体ウェーハ、１６・・・・・・不活性ガス。Figures 1 and 2 show a conventional non-contact wafer chuck, with Figure 1 being a bottom view, and Figure 2 being the same as in Figure 1.
■It is a sectional view along the line. FIGS. 3 and 4 show a non-contact wafer chuck according to an embodiment of this invention.
The figure is a bottom view thereof, and FIG. 4 is a sectional view taken along the line TV=IV in FIG. 3. 10...Main body, 11...Cavity, 12.
...Gas outlet, 13...Gas supply port, 14...Gas discharge port, 15...Semiconductor wafer, 16...Inert gas.
Claims (1)
この空洞に連通し本体の下面より中央部に向って斜めに
開口した多数のガス吹き出し口と、空洞に連通ずるガス
供給口と、前記本体の下面中央に開口し前記空洞とは区
画されているガス排出口とを有する非接触型ウェーハチ
ャック。A disc-shaped main body, a cavity provided inside the main body,
A large number of gas outlets that communicate with the cavity and open diagonally from the bottom surface of the body toward the center, a gas supply port that communicates with the cavity, and a gas supply port that opens at the center of the bottom surface of the body and are separated from the cavity. A non-contact wafer chuck with a gas exhaust port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397382U JPS5918435U (en) | 1982-07-27 | 1982-07-27 | Non-contact wafer backpack |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397382U JPS5918435U (en) | 1982-07-27 | 1982-07-27 | Non-contact wafer backpack |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5918435U true JPS5918435U (en) | 1984-02-04 |
Family
ID=30263636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11397382U Pending JPS5918435U (en) | 1982-07-27 | 1982-07-27 | Non-contact wafer backpack |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5918435U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6216924A (en) * | 1985-05-04 | 1987-01-26 | Seibu Giken:Kk | Method for suspensorily floating platelike body by means of fluid in noncontact state |
| JPS62211236A (en) * | 1986-03-12 | 1987-09-17 | Hitachi Ltd | Holding material for plate-like member |
| JP2008284671A (en) * | 2007-05-15 | 2008-11-27 | Keizo Otani | Non-contact carrying pad |
| WO2012144120A1 (en) * | 2011-04-20 | 2012-10-26 | 村田機械株式会社 | Suction chuck, and transfer device of workpiece including same |
-
1982
- 1982-07-27 JP JP11397382U patent/JPS5918435U/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6216924A (en) * | 1985-05-04 | 1987-01-26 | Seibu Giken:Kk | Method for suspensorily floating platelike body by means of fluid in noncontact state |
| JPS62211236A (en) * | 1986-03-12 | 1987-09-17 | Hitachi Ltd | Holding material for plate-like member |
| JP2008284671A (en) * | 2007-05-15 | 2008-11-27 | Keizo Otani | Non-contact carrying pad |
| WO2012144120A1 (en) * | 2011-04-20 | 2012-10-26 | 村田機械株式会社 | Suction chuck, and transfer device of workpiece including same |
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