JPS59181536A - レジストパタ−ンの形成方法 - Google Patents

レジストパタ−ンの形成方法

Info

Publication number
JPS59181536A
JPS59181536A JP58053674A JP5367483A JPS59181536A JP S59181536 A JPS59181536 A JP S59181536A JP 58053674 A JP58053674 A JP 58053674A JP 5367483 A JP5367483 A JP 5367483A JP S59181536 A JPS59181536 A JP S59181536A
Authority
JP
Japan
Prior art keywords
water
developed
acid ester
resist
acetic acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58053674A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334054B2 (Direct
Inventor
Yoshio Yamashita
山下　吉雄
Takaharu Kawazu
河津　隆治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58053674A priority Critical patent/JPS59181536A/ja
Priority to US06/574,363 priority patent/US4600684A/en
Publication of JPS59181536A publication Critical patent/JPS59181536A/ja
Publication of JPH0334054B2 publication Critical patent/JPH0334054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58053674A 1983-02-10 1983-03-31 レジストパタ−ンの形成方法 Granted JPS59181536A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58053674A JPS59181536A (ja) 1983-03-31 1983-03-31 レジストパタ−ンの形成方法
US06/574,363 US4600684A (en) 1983-02-10 1984-01-27 Process for forming a negative resist using high energy beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58053674A JPS59181536A (ja) 1983-03-31 1983-03-31 レジストパタ−ンの形成方法

Publications (2)

Publication Number Publication Date
JPS59181536A true JPS59181536A (ja) 1984-10-16
JPH0334054B2 JPH0334054B2 (Direct) 1991-05-21

Family

ID=12949370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58053674A Granted JPS59181536A (ja) 1983-02-10 1983-03-31 レジストパタ−ンの形成方法

Country Status (1)

Country Link
JP (1) JPS59181536A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045243A (ja) * 1983-08-23 1985-03-11 Oki Electric Ind Co Ltd レジストパタ−ンの形成方法
JPH01177539A (ja) * 1988-01-07 1989-07-13 Matsushita Electron Corp レジストの現像方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127615A (Direct) * 1973-04-07 1974-12-06
JPS512430A (en) * 1974-05-28 1976-01-10 Ibm Mechiru isopuchiru ketongenzozai
JPS5151939A (en) * 1974-10-31 1976-05-07 Canon Kk Saisenpataanyohotorejisutogenzoeki

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127615A (Direct) * 1973-04-07 1974-12-06
JPS512430A (en) * 1974-05-28 1976-01-10 Ibm Mechiru isopuchiru ketongenzozai
JPS5151939A (en) * 1974-10-31 1976-05-07 Canon Kk Saisenpataanyohotorejisutogenzoeki

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045243A (ja) * 1983-08-23 1985-03-11 Oki Electric Ind Co Ltd レジストパタ−ンの形成方法
JPH01177539A (ja) * 1988-01-07 1989-07-13 Matsushita Electron Corp レジストの現像方法

Also Published As

Publication number Publication date
JPH0334054B2 (Direct) 1991-05-21

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