JPS59180081A - 真空ポンプ装置 - Google Patents

真空ポンプ装置

Info

Publication number
JPS59180081A
JPS59180081A JP58054424A JP5442483A JPS59180081A JP S59180081 A JPS59180081 A JP S59180081A JP 58054424 A JP58054424 A JP 58054424A JP 5442483 A JP5442483 A JP 5442483A JP S59180081 A JPS59180081 A JP S59180081A
Authority
JP
Japan
Prior art keywords
vacuum pump
adsorbent
vacuum
pump device
hydride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58054424A
Other languages
English (en)
Japanese (ja)
Other versions
JPH021993B2 (enExample
Inventor
Yoshio Moriwaki
良夫 森脇
Koji Urao
浦生　孝治
Nobuyuki Yanagihara
伸行 柳原
Tadayasu Mitsumata
光亦　忠泰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58054424A priority Critical patent/JPS59180081A/ja
Publication of JPS59180081A publication Critical patent/JPS59180081A/ja
Publication of JPH021993B2 publication Critical patent/JPH021993B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP58054424A 1983-03-29 1983-03-29 真空ポンプ装置 Granted JPS59180081A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58054424A JPS59180081A (ja) 1983-03-29 1983-03-29 真空ポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58054424A JPS59180081A (ja) 1983-03-29 1983-03-29 真空ポンプ装置

Publications (2)

Publication Number Publication Date
JPS59180081A true JPS59180081A (ja) 1984-10-12
JPH021993B2 JPH021993B2 (enExample) 1990-01-16

Family

ID=12970325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58054424A Granted JPS59180081A (ja) 1983-03-29 1983-03-29 真空ポンプ装置

Country Status (1)

Country Link
JP (1) JPS59180081A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233679A (ja) * 1986-04-01 1987-10-14 石川島播磨重工業株式会社 熱処理炉

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4356250B2 (ja) * 2001-02-13 2009-11-04 日本電気株式会社 無線受信機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55124538A (en) * 1979-02-05 1980-09-25 Getters Spa Method of absorbing water* steam and other gas by using nonnvaporizing threeedimensional getter alloy
JPS5753235A (en) * 1980-06-04 1982-03-30 Getters Spa Getter composition and structure particularly available at low temperature and their use in manufacture of vessel enclosing vacuum or rare gas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55124538A (en) * 1979-02-05 1980-09-25 Getters Spa Method of absorbing water* steam and other gas by using nonnvaporizing threeedimensional getter alloy
JPS5753235A (en) * 1980-06-04 1982-03-30 Getters Spa Getter composition and structure particularly available at low temperature and their use in manufacture of vessel enclosing vacuum or rare gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233679A (ja) * 1986-04-01 1987-10-14 石川島播磨重工業株式会社 熱処理炉

Also Published As

Publication number Publication date
JPH021993B2 (enExample) 1990-01-16

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