JPH021993B2 - - Google Patents

Info

Publication number
JPH021993B2
JPH021993B2 JP58054424A JP5442483A JPH021993B2 JP H021993 B2 JPH021993 B2 JP H021993B2 JP 58054424 A JP58054424 A JP 58054424A JP 5442483 A JP5442483 A JP 5442483A JP H021993 B2 JPH021993 B2 JP H021993B2
Authority
JP
Japan
Prior art keywords
adsorbent
vacuum
vacuum pump
pump device
hydride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58054424A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59180081A (ja
Inventor
Yoshio Moriwaki
Koji Urao
Nobuyuki Yanagihara
Tadayasu Mitsumata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58054424A priority Critical patent/JPS59180081A/ja
Publication of JPS59180081A publication Critical patent/JPS59180081A/ja
Publication of JPH021993B2 publication Critical patent/JPH021993B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP58054424A 1983-03-29 1983-03-29 真空ポンプ装置 Granted JPS59180081A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58054424A JPS59180081A (ja) 1983-03-29 1983-03-29 真空ポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58054424A JPS59180081A (ja) 1983-03-29 1983-03-29 真空ポンプ装置

Publications (2)

Publication Number Publication Date
JPS59180081A JPS59180081A (ja) 1984-10-12
JPH021993B2 true JPH021993B2 (enExample) 1990-01-16

Family

ID=12970325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58054424A Granted JPS59180081A (ja) 1983-03-29 1983-03-29 真空ポンプ装置

Country Status (1)

Country Link
JP (1) JPS59180081A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002065653A1 (fr) * 2001-02-13 2002-08-22 Nec Corporation Recepteur radio

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0721389B2 (ja) * 1986-04-01 1995-03-08 石川島播磨重工業株式会社 熱処理炉

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1110271B (it) * 1979-02-05 1985-12-23 Getters Spa Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas
IT1198325B (it) * 1980-06-04 1988-12-21 Getters Spa Struttura e composizione getteranti,particolarmente adatti per basse temperature

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002065653A1 (fr) * 2001-02-13 2002-08-22 Nec Corporation Recepteur radio

Also Published As

Publication number Publication date
JPS59180081A (ja) 1984-10-12

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