JPH021993B2 - - Google Patents
Info
- Publication number
- JPH021993B2 JPH021993B2 JP58054424A JP5442483A JPH021993B2 JP H021993 B2 JPH021993 B2 JP H021993B2 JP 58054424 A JP58054424 A JP 58054424A JP 5442483 A JP5442483 A JP 5442483A JP H021993 B2 JPH021993 B2 JP H021993B2
- Authority
- JP
- Japan
- Prior art keywords
- adsorbent
- vacuum
- vacuum pump
- pump device
- hydride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58054424A JPS59180081A (ja) | 1983-03-29 | 1983-03-29 | 真空ポンプ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58054424A JPS59180081A (ja) | 1983-03-29 | 1983-03-29 | 真空ポンプ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59180081A JPS59180081A (ja) | 1984-10-12 |
| JPH021993B2 true JPH021993B2 (enExample) | 1990-01-16 |
Family
ID=12970325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58054424A Granted JPS59180081A (ja) | 1983-03-29 | 1983-03-29 | 真空ポンプ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59180081A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002065653A1 (fr) * | 2001-02-13 | 2002-08-22 | Nec Corporation | Recepteur radio |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0721389B2 (ja) * | 1986-04-01 | 1995-03-08 | 石川島播磨重工業株式会社 | 熱処理炉 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1110271B (it) * | 1979-02-05 | 1985-12-23 | Getters Spa | Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas |
| IT1198325B (it) * | 1980-06-04 | 1988-12-21 | Getters Spa | Struttura e composizione getteranti,particolarmente adatti per basse temperature |
-
1983
- 1983-03-29 JP JP58054424A patent/JPS59180081A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002065653A1 (fr) * | 2001-02-13 | 2002-08-22 | Nec Corporation | Recepteur radio |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59180081A (ja) | 1984-10-12 |
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