JPS59170852U - フオトマスク洗浄装置 - Google Patents

フオトマスク洗浄装置

Info

Publication number
JPS59170852U
JPS59170852U JP1983064123U JP6412383U JPS59170852U JP S59170852 U JPS59170852 U JP S59170852U JP 1983064123 U JP1983064123 U JP 1983064123U JP 6412383 U JP6412383 U JP 6412383U JP S59170852 U JPS59170852 U JP S59170852U
Authority
JP
Japan
Prior art keywords
photomask
gear
support
ring
cleaning equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983064123U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230030Y2 (enrdf_load_stackoverflow
Inventor
田中　規雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1983064123U priority Critical patent/JPS59170852U/ja
Publication of JPS59170852U publication Critical patent/JPS59170852U/ja
Application granted granted Critical
Publication of JPS6230030Y2 publication Critical patent/JPS6230030Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1983064123U 1983-04-28 1983-04-28 フオトマスク洗浄装置 Granted JPS59170852U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983064123U JPS59170852U (ja) 1983-04-28 1983-04-28 フオトマスク洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983064123U JPS59170852U (ja) 1983-04-28 1983-04-28 フオトマスク洗浄装置

Publications (2)

Publication Number Publication Date
JPS59170852U true JPS59170852U (ja) 1984-11-15
JPS6230030Y2 JPS6230030Y2 (enrdf_load_stackoverflow) 1987-08-01

Family

ID=30194307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983064123U Granted JPS59170852U (ja) 1983-04-28 1983-04-28 フオトマスク洗浄装置

Country Status (1)

Country Link
JP (1) JPS59170852U (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61201796A (ja) * 1985-03-04 1986-09-06 Matsushita Refrig Co 伝熱管壁面の製造方法
JPS61158948U (enrdf_load_stackoverflow) * 1985-03-23 1986-10-02
JPS63137429A (ja) * 1986-11-28 1988-06-09 Dainippon Screen Mfg Co Ltd 基板の両面洗浄装置
JPH11135468A (ja) * 1997-10-31 1999-05-21 Shibaura Mechatronics Corp 洗浄装置とその方法および洗浄用ディスクブラシ
JP2020074450A (ja) * 2020-01-23 2020-05-14 株式会社東京精密 洗浄装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61201796A (ja) * 1985-03-04 1986-09-06 Matsushita Refrig Co 伝熱管壁面の製造方法
JPS61158948U (enrdf_load_stackoverflow) * 1985-03-23 1986-10-02
JPS63137429A (ja) * 1986-11-28 1988-06-09 Dainippon Screen Mfg Co Ltd 基板の両面洗浄装置
JPH11135468A (ja) * 1997-10-31 1999-05-21 Shibaura Mechatronics Corp 洗浄装置とその方法および洗浄用ディスクブラシ
JP2020074450A (ja) * 2020-01-23 2020-05-14 株式会社東京精密 洗浄装置

Also Published As

Publication number Publication date
JPS6230030Y2 (enrdf_load_stackoverflow) 1987-08-01

Similar Documents

Publication Publication Date Title
JPS586783U (ja) 水中における表面清掃装置
JPS59170852U (ja) フオトマスク洗浄装置
JPS5941405U (ja) 擦過細胞採取具
JPS60172692U (ja) 工業用ロボツト
JPS604388U (ja) ハンドリング装置
JPS60167658U (ja) 回転研削装置
JPS6055408U (ja) 結石用超音波砕石器
JPS59170477U (ja) 魚の洗浄装置
JPS5861029U (ja) 原子炉設備のプ−ル壁面研掃用ディスクブラシ
JPS59127780U (ja) 塗装治具洗浄装置
JPS5972157U (ja) ワイパ−ア−ムの取付構造
JPS59102187U (ja) 洗車機
JPS6084242U (ja) 超音波を用いた光フアイバコネクタ端面研磨機
JPS603865U (ja) 電子写真用感光体の研摩および清掃装置
JPS59145351U (ja) 電気掃除機
JPS6079404U (ja) 結石用砕石器
JPS59168726U (ja) 超音波洗浄装置
JPS5921948U (ja) ブラシ式湿し装置
JPS59135713U (ja) 超音波診断装置
JPS60161490U (ja) 管内面研掃機
JPS5960635U (ja) フイルム移送装置
JPS59106046U (ja) 試験片研摩装置
JPS5963369U (ja) 清掃装置
JPS59168728U (ja) 超音波洗浄装置
JPS6034324U (ja) 反転装置