JPS5916538A - プラズマ密度の調整装置 - Google Patents
プラズマ密度の調整装置Info
- Publication number
- JPS5916538A JPS5916538A JP57125396A JP12539682A JPS5916538A JP S5916538 A JPS5916538 A JP S5916538A JP 57125396 A JP57125396 A JP 57125396A JP 12539682 A JP12539682 A JP 12539682A JP S5916538 A JPS5916538 A JP S5916538A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- reactor
- fabric
- plasma
- plasma density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004744 fabric Substances 0.000 abstract description 44
- 238000009832 plasma treatment Methods 0.000 abstract description 10
- 230000007246 mechanism Effects 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000007789 gas Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000009991 scouring Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000004043 dyeing Methods 0.000 description 2
- 238000007730 finishing process Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 239000005871 repellent Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000009990 desizing Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Landscapes
- Plasma Technology (AREA)
- Treatment Of Fiber Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57125396A JPS5916538A (ja) | 1982-07-19 | 1982-07-19 | プラズマ密度の調整装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57125396A JPS5916538A (ja) | 1982-07-19 | 1982-07-19 | プラズマ密度の調整装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5916538A true JPS5916538A (ja) | 1984-01-27 |
| JPH025456B2 JPH025456B2 (enrdf_load_stackoverflow) | 1990-02-02 |
Family
ID=14909097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57125396A Granted JPS5916538A (ja) | 1982-07-19 | 1982-07-19 | プラズマ密度の調整装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5916538A (enrdf_load_stackoverflow) |
-
1982
- 1982-07-19 JP JP57125396A patent/JPS5916538A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH025456B2 (enrdf_load_stackoverflow) | 1990-02-02 |
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