JPS59164914A - 光学式スケ−ル読取装置 - Google Patents

光学式スケ−ル読取装置

Info

Publication number
JPS59164914A
JPS59164914A JP3995183A JP3995183A JPS59164914A JP S59164914 A JPS59164914 A JP S59164914A JP 3995183 A JP3995183 A JP 3995183A JP 3995183 A JP3995183 A JP 3995183A JP S59164914 A JPS59164914 A JP S59164914A
Authority
JP
Japan
Prior art keywords
light
scale
half mirror
reflected
phase difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3995183A
Other languages
English (en)
Japanese (ja)
Other versions
JPH046884B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Koji Akiyama
浩二 秋山
Hideto Iwaoka
秀人 岩岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP3995183A priority Critical patent/JPS59164914A/ja
Publication of JPS59164914A publication Critical patent/JPS59164914A/ja
Publication of JPH046884B2 publication Critical patent/JPH046884B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP3995183A 1983-03-10 1983-03-10 光学式スケ−ル読取装置 Granted JPS59164914A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3995183A JPS59164914A (ja) 1983-03-10 1983-03-10 光学式スケ−ル読取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3995183A JPS59164914A (ja) 1983-03-10 1983-03-10 光学式スケ−ル読取装置

Publications (2)

Publication Number Publication Date
JPS59164914A true JPS59164914A (ja) 1984-09-18
JPH046884B2 JPH046884B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-07

Family

ID=12567267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3995183A Granted JPS59164914A (ja) 1983-03-10 1983-03-10 光学式スケ−ル読取装置

Country Status (1)

Country Link
JP (1) JPS59164914A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167513U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-10-09 1986-05-09
JPS6167515U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-10-09 1986-05-09
JPS61178613A (ja) * 1985-02-04 1986-08-11 Canon Inc エンコーダー
JPS61251715A (ja) * 1985-04-30 1986-11-08 Yokogawa Electric Corp 光学式スケ−ル読取装置
JPS6235223A (ja) * 1985-08-08 1987-02-16 Agency Of Ind Science & Technol 相対変位測定方法
DE3625327C1 (de) * 1986-07-26 1988-02-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
US4923300A (en) * 1987-02-21 1990-05-08 Dr. Johannes Heidenhain Gmbh Defraction photoelectric position measuring system
US4955718A (en) * 1987-01-27 1990-09-11 Dr. Johannes Heidenhain Gmbh Photoelectric measuring system with integrated optical circuit including and illuminating system
US5127733A (en) * 1989-06-08 1992-07-07 Dr. Johannes Heidenhain Gmbh Integrated optical precision measuring device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010050211A1 (ja) 2008-10-30 2010-05-06 国立大学法人 岡山大学 局所麻酔用組成物

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-11-05 1982-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-11-05 1982-05-20

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167513U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-10-09 1986-05-09
JPS6167515U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1984-10-09 1986-05-09
JPS61178613A (ja) * 1985-02-04 1986-08-11 Canon Inc エンコーダー
JPS61251715A (ja) * 1985-04-30 1986-11-08 Yokogawa Electric Corp 光学式スケ−ル読取装置
JPS6235223A (ja) * 1985-08-08 1987-02-16 Agency Of Ind Science & Technol 相対変位測定方法
DE3625327C1 (de) * 1986-07-26 1988-02-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
DE3705653C1 (en) * 1986-07-26 1988-07-28 Heidenhain Gmbh Dr Johannes Photoelectric position-measuring device
US4938595A (en) * 1986-07-26 1990-07-03 Dr. Johannes Heidenhain Gmbh Diffraction photoelectric displacement measuring device
US4955718A (en) * 1987-01-27 1990-09-11 Dr. Johannes Heidenhain Gmbh Photoelectric measuring system with integrated optical circuit including and illuminating system
US4923300A (en) * 1987-02-21 1990-05-08 Dr. Johannes Heidenhain Gmbh Defraction photoelectric position measuring system
US5127733A (en) * 1989-06-08 1992-07-07 Dr. Johannes Heidenhain Gmbh Integrated optical precision measuring device

Also Published As

Publication number Publication date
JPH046884B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-07

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