JPS59164340A - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPS59164340A
JPS59164340A JP3820483A JP3820483A JPS59164340A JP S59164340 A JPS59164340 A JP S59164340A JP 3820483 A JP3820483 A JP 3820483A JP 3820483 A JP3820483 A JP 3820483A JP S59164340 A JPS59164340 A JP S59164340A
Authority
JP
Japan
Prior art keywords
plasma
processing
processed
objects
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3820483A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425299B2 (cg-RX-API-DMAC7.html
Inventor
Kenji Fukuda
賢治 福田
Yoshinobu Takahashi
芳信 高橋
Takaoki Kaneko
金子　隆興
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP3820483A priority Critical patent/JPS59164340A/ja
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to AU24672/84A priority patent/AU548915B2/en
Priority to EP84101935A priority patent/EP0117541B1/en
Priority to EP19890105490 priority patent/EP0326191A3/en
Priority to DE8484101935T priority patent/DE3482155D1/de
Publication of JPS59164340A publication Critical patent/JPS59164340A/ja
Priority to US06/772,208 priority patent/US4595570A/en
Priority to AU49368/85A priority patent/AU578499B2/en
Priority to US06/817,115 priority patent/US4874453A/en
Priority to US07/307,509 priority patent/US4919745A/en
Publication of JPH0425299B2 publication Critical patent/JPH0425299B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/142—Pretreatment
    • B05D3/144—Pretreatment of polymeric substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP3820483A 1983-02-25 1983-03-10 プラズマ処理装置 Granted JPS59164340A (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP3820483A JPS59164340A (ja) 1983-03-10 1983-03-10 プラズマ処理装置
AU24672/84A AU548915B2 (en) 1983-02-25 1984-02-16 Plasma treatment
EP84101935A EP0117541B1 (en) 1983-02-25 1984-02-23 Apparatus for plasma treatment of resin material
EP19890105490 EP0326191A3 (en) 1983-02-25 1984-02-23 Apparatus and method for plasma treatment of resin material
DE8484101935T DE3482155D1 (de) 1983-02-25 1984-02-23 Vorrichtung zur plasmabearbeitung von kunstharz-materialien.
US06/772,208 US4595570A (en) 1983-02-25 1985-09-05 Apparatus and method for plasma treatment of resin material
AU49368/85A AU578499B2 (en) 1983-02-25 1985-11-05 Apparatus and method for plasma treatment of resin material
US06/817,115 US4874453A (en) 1983-02-25 1986-01-08 Apparatus and method for plasma treatment of resin material
US07/307,509 US4919745A (en) 1983-02-25 1989-02-08 Apparatus and method for plasma treatment of resin material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3820483A JPS59164340A (ja) 1983-03-10 1983-03-10 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS59164340A true JPS59164340A (ja) 1984-09-17
JPH0425299B2 JPH0425299B2 (cg-RX-API-DMAC7.html) 1992-04-30

Family

ID=12518799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3820483A Granted JPS59164340A (ja) 1983-02-25 1983-03-10 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS59164340A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206649U (cg-RX-API-DMAC7.html) * 1985-06-13 1986-12-27

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7195994B2 (ja) * 2019-03-27 2022-12-26 日本電産コパル電子株式会社 圧力センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55165924A (en) * 1979-06-12 1980-12-24 Sekisui Chem Co Ltd Surface-treating apparatus for plastic molding

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55165924A (en) * 1979-06-12 1980-12-24 Sekisui Chem Co Ltd Surface-treating apparatus for plastic molding

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206649U (cg-RX-API-DMAC7.html) * 1985-06-13 1986-12-27

Also Published As

Publication number Publication date
JPH0425299B2 (cg-RX-API-DMAC7.html) 1992-04-30

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