JPS5916255A - 電子銃 - Google Patents
電子銃Info
- Publication number
- JPS5916255A JPS5916255A JP57124342A JP12434282A JPS5916255A JP S5916255 A JPS5916255 A JP S5916255A JP 57124342 A JP57124342 A JP 57124342A JP 12434282 A JP12434282 A JP 12434282A JP S5916255 A JPS5916255 A JP S5916255A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- cathode
- electrode
- deflection
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 14
- 230000001133 acceleration Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57124342A JPS5916255A (ja) | 1982-07-19 | 1982-07-19 | 電子銃 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57124342A JPS5916255A (ja) | 1982-07-19 | 1982-07-19 | 電子銃 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5916255A true JPS5916255A (ja) | 1984-01-27 |
JPH0335775B2 JPH0335775B2 (enrdf_load_stackoverflow) | 1991-05-29 |
Family
ID=14882979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57124342A Granted JPS5916255A (ja) | 1982-07-19 | 1982-07-19 | 電子銃 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5916255A (enrdf_load_stackoverflow) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63237340A (ja) * | 1987-03-26 | 1988-10-03 | Canon Inc | 表示装置 |
JPS63274048A (ja) * | 1987-05-06 | 1988-11-11 | Canon Inc | 電子放出素子およびその製造方法 |
JPS6454649A (en) * | 1987-08-26 | 1989-03-02 | Canon Kk | Electron emission element |
JPS6454650A (en) * | 1987-08-26 | 1989-03-02 | Canon Kk | Electron emission element |
JPH01311929A (ja) * | 1988-06-11 | 1989-12-15 | Nitto Denko Corp | 車体外装材の固定部材 |
JPH02186545A (ja) * | 1988-11-01 | 1990-07-20 | Internatl Business Mach Corp <Ibm> | 荷電粒子ビーム発生装置 |
US5384463A (en) * | 1991-06-10 | 1995-01-24 | Fujisu Limited | Pattern inspection apparatus and electron beam apparatus |
US5430292A (en) * | 1991-06-10 | 1995-07-04 | Fujitsu Limited | Pattern inspection apparatus and electron beam apparatus |
US5557105A (en) * | 1991-06-10 | 1996-09-17 | Fujitsu Limited | Pattern inspection apparatus and electron beam apparatus |
US5746605A (en) * | 1994-06-06 | 1998-05-05 | Red Ant, Inc. | Method and system for music training |
JP2007518223A (ja) * | 2003-12-30 | 2007-07-05 | コミツサリア タ レネルジー アトミーク | 発散制御機能を有したハイブリッド型マルチビーム電子放出デバイス |
JP2010118361A (ja) * | 2005-09-06 | 2010-05-27 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 放出パターンの放出領域を選択するための装置及び方法 |
-
1982
- 1982-07-19 JP JP57124342A patent/JPS5916255A/ja active Granted
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63237340A (ja) * | 1987-03-26 | 1988-10-03 | Canon Inc | 表示装置 |
JPS63274048A (ja) * | 1987-05-06 | 1988-11-11 | Canon Inc | 電子放出素子およびその製造方法 |
JPS6454649A (en) * | 1987-08-26 | 1989-03-02 | Canon Kk | Electron emission element |
JPS6454650A (en) * | 1987-08-26 | 1989-03-02 | Canon Kk | Electron emission element |
JPH01311929A (ja) * | 1988-06-11 | 1989-12-15 | Nitto Denko Corp | 車体外装材の固定部材 |
JPH02186545A (ja) * | 1988-11-01 | 1990-07-20 | Internatl Business Mach Corp <Ibm> | 荷電粒子ビーム発生装置 |
US5384463A (en) * | 1991-06-10 | 1995-01-24 | Fujisu Limited | Pattern inspection apparatus and electron beam apparatus |
US5430292A (en) * | 1991-06-10 | 1995-07-04 | Fujitsu Limited | Pattern inspection apparatus and electron beam apparatus |
US5557105A (en) * | 1991-06-10 | 1996-09-17 | Fujitsu Limited | Pattern inspection apparatus and electron beam apparatus |
US5746605A (en) * | 1994-06-06 | 1998-05-05 | Red Ant, Inc. | Method and system for music training |
JP2007518223A (ja) * | 2003-12-30 | 2007-07-05 | コミツサリア タ レネルジー アトミーク | 発散制御機能を有したハイブリッド型マルチビーム電子放出デバイス |
JP2010118361A (ja) * | 2005-09-06 | 2010-05-27 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 放出パターンの放出領域を選択するための装置及び方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0335775B2 (enrdf_load_stackoverflow) | 1991-05-29 |
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