JPS59160844A - 基板成形用スタンパ - Google Patents
基板成形用スタンパInfo
- Publication number
- JPS59160844A JPS59160844A JP3434183A JP3434183A JPS59160844A JP S59160844 A JPS59160844 A JP S59160844A JP 3434183 A JP3434183 A JP 3434183A JP 3434183 A JP3434183 A JP 3434183A JP S59160844 A JPS59160844 A JP S59160844A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- stamper
- substrate
- film
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 51
- 239000002184 metal Substances 0.000 claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 14
- 238000002844 melting Methods 0.000 claims abstract description 8
- 230000008018 melting Effects 0.000 claims abstract description 7
- 238000010521 absorption reaction Methods 0.000 claims abstract description 6
- 239000010408 film Substances 0.000 claims description 51
- 239000007789 gas Substances 0.000 claims description 19
- 239000011347 resin Substances 0.000 claims description 14
- 229920005989 resin Polymers 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 14
- 229910052709 silver Inorganic materials 0.000 claims description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 8
- 238000000465 moulding Methods 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 3
- 229910045601 alloy Inorganic materials 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 3
- -1 Co Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 9
- 238000004544 sputter deposition Methods 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 3
- 238000004299 exfoliation Methods 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 238000009751 slip forming Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 239000010931 gold Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000005323 electroforming Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005266 casting Methods 0.000 description 3
- 239000006023 eutectic alloy Substances 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 241000272201 Columbiformes Species 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000006188 syrup Substances 0.000 description 1
- 235000020357 syrup Nutrition 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/0057—Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture
- G11B23/0064—Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture mediums or carriers characterised by the selection of the material
Landscapes
- Laminated Bodies (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3434183A JPS59160844A (ja) | 1983-03-04 | 1983-03-04 | 基板成形用スタンパ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3434183A JPS59160844A (ja) | 1983-03-04 | 1983-03-04 | 基板成形用スタンパ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59160844A true JPS59160844A (ja) | 1984-09-11 |
| JPH0576103B2 JPH0576103B2 (enrdf_load_stackoverflow) | 1993-10-21 |
Family
ID=12411432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3434183A Granted JPS59160844A (ja) | 1983-03-04 | 1983-03-04 | 基板成形用スタンパ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59160844A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4931336A (en) * | 1988-01-18 | 1990-06-05 | Fuji Photo Film Co., Ltd. | Information recording medium and method of optically recording information employing the same |
-
1983
- 1983-03-04 JP JP3434183A patent/JPS59160844A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4931336A (en) * | 1988-01-18 | 1990-06-05 | Fuji Photo Film Co., Ltd. | Information recording medium and method of optically recording information employing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0576103B2 (enrdf_load_stackoverflow) | 1993-10-21 |
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