JPS59158952A - 光照射加熱装置 - Google Patents

光照射加熱装置

Info

Publication number
JPS59158952A
JPS59158952A JP58032908A JP3290883A JPS59158952A JP S59158952 A JPS59158952 A JP S59158952A JP 58032908 A JP58032908 A JP 58032908A JP 3290883 A JP3290883 A JP 3290883A JP S59158952 A JPS59158952 A JP S59158952A
Authority
JP
Japan
Prior art keywords
light irradiation
holding part
wafer
furnace
carriage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58032908A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6359530B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Shimizu
洋 清水
Tetsuharu Arai
荒井　徹治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP58032908A priority Critical patent/JPS59158952A/ja
Publication of JPS59158952A publication Critical patent/JPS59158952A/ja
Publication of JPS6359530B2 publication Critical patent/JPS6359530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
JP58032908A 1983-03-02 1983-03-02 光照射加熱装置 Granted JPS59158952A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58032908A JPS59158952A (ja) 1983-03-02 1983-03-02 光照射加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58032908A JPS59158952A (ja) 1983-03-02 1983-03-02 光照射加熱装置

Publications (2)

Publication Number Publication Date
JPS59158952A true JPS59158952A (ja) 1984-09-08
JPS6359530B2 JPS6359530B2 (enrdf_load_stackoverflow) 1988-11-21

Family

ID=12371988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58032908A Granted JPS59158952A (ja) 1983-03-02 1983-03-02 光照射加熱装置

Country Status (1)

Country Link
JP (1) JPS59158952A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5592581A (en) * 1993-07-19 1997-01-07 Tokyo Electron Kabushiki Kaisha Heat treatment apparatus
JP2016042569A (ja) * 2014-08-15 2016-03-31 茂迪股▲分▼有限公司 処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0866236A (ja) * 1994-08-26 1996-03-12 Naito Kogyo:Kk 清掃用ブラシ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5592581A (en) * 1993-07-19 1997-01-07 Tokyo Electron Kabushiki Kaisha Heat treatment apparatus
JP2016042569A (ja) * 2014-08-15 2016-03-31 茂迪股▲分▼有限公司 処理装置

Also Published As

Publication number Publication date
JPS6359530B2 (enrdf_load_stackoverflow) 1988-11-21

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