JPS59158434U - 原料ガス発生・供給装置 - Google Patents

原料ガス発生・供給装置

Info

Publication number
JPS59158434U
JPS59158434U JP4972483U JP4972483U JPS59158434U JP S59158434 U JPS59158434 U JP S59158434U JP 4972483 U JP4972483 U JP 4972483U JP 4972483 U JP4972483 U JP 4972483U JP S59158434 U JPS59158434 U JP S59158434U
Authority
JP
Japan
Prior art keywords
raw material
container
gas
gas generation
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4972483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328911Y2 (enExample
Inventor
日野　功
徹 鈴木
Original Assignee
工業技術院長
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長 filed Critical 工業技術院長
Priority to JP4972483U priority Critical patent/JPS59158434U/ja
Publication of JPS59158434U publication Critical patent/JPS59158434U/ja
Application granted granted Critical
Publication of JPH0328911Y2 publication Critical patent/JPH0328911Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP4972483U 1983-04-05 1983-04-05 原料ガス発生・供給装置 Granted JPS59158434U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4972483U JPS59158434U (ja) 1983-04-05 1983-04-05 原料ガス発生・供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4972483U JPS59158434U (ja) 1983-04-05 1983-04-05 原料ガス発生・供給装置

Publications (2)

Publication Number Publication Date
JPS59158434U true JPS59158434U (ja) 1984-10-24
JPH0328911Y2 JPH0328911Y2 (enExample) 1991-06-20

Family

ID=30180220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4972483U Granted JPS59158434U (ja) 1983-04-05 1983-04-05 原料ガス発生・供給装置

Country Status (1)

Country Link
JP (1) JPS59158434U (enExample)

Also Published As

Publication number Publication date
JPH0328911Y2 (enExample) 1991-06-20

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