JPS59156666A - Automatic work loading mechanism in surface grinder - Google Patents

Automatic work loading mechanism in surface grinder

Info

Publication number
JPS59156666A
JPS59156666A JP59017969A JP1796984A JPS59156666A JP S59156666 A JPS59156666 A JP S59156666A JP 59017969 A JP59017969 A JP 59017969A JP 1796984 A JP1796984 A JP 1796984A JP S59156666 A JPS59156666 A JP S59156666A
Authority
JP
Japan
Prior art keywords
carrier
plate
suction
attached
proximity switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59017969A
Other languages
Japanese (ja)
Other versions
JPH0360627B2 (en
Inventor
Hatsuyuki Arai
新井 初雪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU KK
Speedfam Corp
Original Assignee
SUPIIDE FUAMU KK
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU KK, Speedfam Corp filed Critical SUPIIDE FUAMU KK
Priority to JP59017969A priority Critical patent/JPS59156666A/en
Publication of JPS59156666A publication Critical patent/JPS59156666A/en
Publication of JPH0360627B2 publication Critical patent/JPH0360627B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories
    • B24B37/345Feeding, loading or unloading work specially adapted to lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

PURPOSE:To aim at enhancing the efficiency of working and as well to prevent works from being contaminated, by providing such an arrangement that a carrier and works are held, by suckers, to an absorbing base plate of a work charging mechanism in a surface grinder, and the charging of the carrier and works is automated. CONSTITUTION:A plate 29 is relatively displaciably attached through a spring 30b to the rod 30a of a cylinder 30 which is secured to a machine frame 1 in a surface grinder. A plurality of suckers 38, 39 for absorbing and holding a carrier 8 and works 9 are vertically movably attached to an absorbing base plate 34 which is, in turn, vertically movably supported to the above-mentioned plate 29. A proximity switch 42 for detecting the mis-mesh between the carrier 8 and a sun gear 4 in view of the relative displacement between the plate 29 and the rod 30a, is attached to the plate 29. Further, a proximity switch 46 for detecting the mis-mesh between the carrier 8 and an inner ring gear 3 in view of the displacement of the suckers 38, 39, is attached to the absorbing base plate 34. In accordance with detection signals from these proximity switches 42, 46, the absorbing base plate 34 is rotated by means of a jig cylinder so that a supporting plate transversely moves.

Description

【発明の詳細な説明】 本発明は平面研削装置に関するものである。[Detailed description of the invention] The present invention relates to a surface grinding device.

従来、ラッピング装置やポリッシング装置のように、回
転する内歯歯車と太陽歯車との間にキャリヤを噛合させ
、このキャリヤに保持させたワークを上下の定盤によっ
て研削加工するようにしたものは知られているが、この
種従来の平面研削装置においては、キャリヤ及びワーク
の装填を人手に頼っていたため非能率的且つ非量産的で
あり、しかも、作業者自身が汚染源となったり、加工面
に接触してその品質低下を来し易い等の問題があった。
Conventionally, there have been known lapping machines and polishing machines in which a carrier is meshed between a rotating internal gear and a sun gear, and the workpiece held by the carrier is ground by upper and lower surface plates. However, this kind of conventional surface grinding equipment relies on manual loading of carriers and workpieces, which is inefficient and prevents mass production.Furthermore, the workers themselves become a source of contamination and damage the machined surface. There was a problem that the quality could easily deteriorate due to contact.

本発明は、キャリヤ及びワークの装填を自動化すること
によって加工能率の向上を図ると同時に、作業者による
ワークの汚染を防止することを目的とするもので、平面
研削装置における機体上に固定したシリンダのロッド(
ニスプリングラ介シてプレートを相対変位可能に取付け
、該プレートに吸着基板を」−下動可能に支持させて該
吸着基板にキャリヤ及びワークを吸着保持させるだめの
複数の吸盤を上下動可能に装着し、上記プレートに該プ
レートとロッドとの相対変位からキャリヤと太陽歯車と
の不噛合を検出する近接スイッチを増付けると共に、吸
着基板に吸盤の変位からギヤリヤと内歯歯車との不噛合
を検出する近接スイッチを取付け、これらの近接スイッ
チからの検出信号に基づいて吸着基板を回転させる回転
手段と横移動させる横移動手段とを付設したことを特徴
とするものである。
The present invention aims to improve machining efficiency by automating the loading of carriers and workpieces, and at the same time to prevent contamination of workpieces by workers. rod (
A plate is attached so as to be relatively displaceable through a spring brush, and a suction substrate is supported on the plate so as to be movable downward, and a plurality of suction cups for suctioning and holding carriers and workpieces on the suction substrate are movable up and down. A proximity switch is attached to the plate to detect mismeshing between the carrier and the sun gear from the relative displacement between the plate and the rod, and a proximity switch is added to the suction board to detect mismeshing between the gear rear and the internal gear from the displacement of the suction cup. The present invention is characterized in that proximity switches for detection are attached, and a rotation means for rotating the suction substrate and a lateral movement means for laterally moving the suction substrate based on detection signals from these proximity switches are attached.

以下、本発明の実施例を図面に基づいて詳細に説明する
に、第1図及び第2図において、1は機体、2は該機体
1の中央に配設されだ下定盤、3は下定盤20回りにお
いて上下動自在の内歯歯車、4は下定盤2の中央に位置
する太陽歯車、5はシリンダ6によって」二下動自在の
上定盤であって、これらに」=り構成される加工部7は
、公知の平面研削装置の場合と同様に、内歯歯車3と太
陽歯車4とに複数のキャリヤ8を噛合させ、これらのキ
ャリヤ8に保持させたワーク9を」二下の定盤2゜5に
よって研削加工するように構成されている。
Hereinafter, embodiments of the present invention will be described in detail based on the drawings. In FIGS. 1 and 2, 1 is a body, 2 is a lower surface plate disposed in the center of the body 1, and 3 is a lower surface plate. 20 is an internal gear that can freely move up and down around 20 rotations, 4 is a sun gear located at the center of the lower surface plate 2, and 5 is an upper surface plate that can be freely moved downward by a cylinder 6. In the processing section 7, a plurality of carriers 8 are meshed with the internal gear 3 and the sun gear 4, and the workpiece 9 held by these carriers 8 is machined at a constant speed of 2. It is configured to perform grinding processing using a disk 2.5.

上記加工部7の周囲には、円環状の回転リング10を下
定盤2と同心状に配設し、該回転リング10の周縁を機
体1上の支持ローラII 、 12に支持させると共に
、回転リング10の内面のギヤ10αにモータ13に連
結された駆動歯車14を噛合させ、この駆動歯車I4に
よって回転リング10を加工部7を周回するように駆動
可能に構成し、該回転リング10上には、キャリヤ8と
同数のキャリヤ移送台15を等間隔で取付けている。
Around the processing section 7, an annular rotating ring 10 is disposed concentrically with the lower surface plate 2, and the peripheral edge of the rotating ring 10 is supported by support rollers II and 12 on the machine body 1. A drive gear 14 connected to a motor 13 is meshed with a gear 10α on the inner surface of the rotary ring 10, and the rotary ring 10 is configured to be able to be driven to revolve around the processing section 7 by the drive gear I4. , the same number of carrier transfer tables 15 as the carriers 8 are installed at equal intervals.

まだ、上記加工部7の回りには、上記移送台]5と同数
のキャリヤ取出台16を等間隔で配設し、これらの取出
台16は、移送台15より低位置において上下動自在且
つ加工部7の中心に向けて前後動自在となしている。即
ち、第3図及び第4図からも明らかなように、機体1上
に基台17をモータ18により上下動自在に支持させ、
該基台17上に上記取出台16をガイド19に沿って摺
動自在に配設すると共に、該取出台16に駆動用のシリ
ンダ20を連結している。そして、上記取出台16の上
面には、下定盤2を検出するだめの近接スイッチ161
Zを高さ調節自在且つ作動位置(鎖線位置)へ回動自在
に取付け、キャリヤの取出し時に、取出台】6の高さを
上記近接スイッチ16 (Lで下定盤2が検出される位
置まで調節することにより、該取出台16の高さを、下
定盤2の摩耗等に伴う研削面の高さの変化とは無関係に
それと略同−または僅かに低くなるように保持可能とし
、また、取出台16の上面には、加工部7から取出され
たキャリヤ8を載置させるだめのターンテーブル21を
モータ22により回転可能に配設すると共に、不規則な
向きで取出されるキャリヤ8の方向調整を行うため、ワ
ーク検出用センサ25を収納位置(鎖線)と検出位置(
実線)とに回動自在に設け、該センサ25でワーク9が
検出される位置までターンテーブル21を回転させるこ
とによってキャリヤ8の向きを一定の向きに調整できる
ようにしている。
Still, around the processing section 7, the same number of carrier take-out tables 16 as the transfer tables 5 are arranged at equal intervals, and these take-out tables 16 are movable up and down at a position lower than the transfer table 15 and can be used for processing. It is movable back and forth toward the center of the section 7. That is, as is clear from FIGS. 3 and 4, the base 17 is supported on the body 1 so as to be movable up and down by the motor 18,
The take-out stand 16 is disposed on the base 17 so as to be slidable along a guide 19, and a driving cylinder 20 is connected to the take-out stand 16. A proximity switch 161 for detecting the lower surface plate 2 is provided on the upper surface of the take-out table 16.
Z is height-adjustable and rotatable to the operating position (chain line position), and when taking out the carrier, adjust the height of the take-out table 6 to the position where the lower surface plate 2 is detected with the proximity switch 16 (L). By doing so, the height of the take-out table 16 can be maintained at approximately the same level or slightly lower regardless of changes in the height of the grinding surface due to wear of the lower surface plate 2, etc. On the top surface of the platform 16, a turntable 21 on which the carriers 8 taken out from the processing section 7 are placed is rotatably arranged by a motor 22, and also for adjusting the direction of the carriers 8 taken out in irregular directions. In order to perform
The direction of the carrier 8 can be adjusted to a fixed direction by rotating the turntable 21 to a position where the workpiece 9 is detected by the sensor 25.

上記各取出台16との対応位置には、移送台15上のキ
ャリヤ8及びワーク9を同時に保持して加工部7へ装填
するだめのキャリヤ装填機構26と、加工の終了したキ
ャリヤ8及びワーク9を加工部7から上記取出台16上
に取出すためのキャリヤ取出機構27とをそれぞれ設け
ている。
At positions corresponding to each of the take-out tables 16, there is a carrier loading mechanism 26 for simultaneously holding the carrier 8 and workpiece 9 on the transfer table 15 and loading them into the processing section 7, and a carrier loading mechanism 26 for simultaneously holding the carrier 8 and workpiece 9 on the transfer table 15 and loading the carrier 8 and workpiece 9 after processing. A carrier take-out mechanism 27 for taking out the carrier from the processing section 7 onto the take-out stand 16 is provided.

キャリヤ装填機構26は、第5図及び第6図に示すよう
に、機体1上に加工部7の中心に向けて前後動自在に摺
動杆28を設け、該摺動杆28の先端に固定したプレー
ト29に駆動用シリンダ30のロンド30 (Lをスプ
リング30 hを介して前後摺動可能に連結する々共に
、プレート29の前面に支持板31を横移動可能に取付
け、横移動のだめの駆動用のジグシリンダ;32に連結
された」−記支持板31には内蔵したモ〜りによってロ
ッド33 (lを駆動スるモータシリンダ33を垂設し
て、このモルタシリンダ33のロッド33 (Lに吸着
基板:34をベアリング35を介して回転可能に取付け
、該モータシリンダによって近接スイッチ34 (Lが
作動する位置即ち下定盤2に近接する位置まで下降可能
としだ上記吸着基板34には、バキーーム管:(6、3
7を介して真空ポンプに接続されたキャリヤ用吸盤38
とワーク用吸盤39とをそれぞれ」二下動可能に複数個
設け、独立にオン、オフ制御可能なこれらの吸盤38 
、39によってキャリヤ8とワーク9とを同時に吸着保
持できるように構成し、−上記吸着基板34の下面中央
には内蔵したばねにより上下動可能な突子40を設け、
キャリヤ8の吸着時に該突子40がキャリヤ中央の孔4
1に嵌入してそれらの心出しが行われるようにしている
As shown in FIGS. 5 and 6, the carrier loading mechanism 26 includes a sliding rod 28 provided on the machine body 1 so as to be movable back and forth toward the center of the processing section 7, and fixed to the tip of the sliding rod 28. The rond 30 (L) of the drive cylinder 30 is connected to the plate 29 with a spring 30 h so as to be slidable back and forth, and the support plate 31 is attached to the front surface of the plate 29 so as to be movable laterally, and the drive cylinder 30 (L) is attached to the front surface of the plate 29 so as to be movable laterally. A motor cylinder 33 that drives the rod 33 (L) by a built-in mortar is installed vertically on the support plate 31, which is connected to the jig cylinder 32 for the mortar cylinder 33. The suction substrate 34 is rotatably attached via a bearing 35, and can be lowered by the motor cylinder to the position where the proximity switch 34 (L) is activated, that is, the position close to the lower surface plate 2.The suction substrate 34 is equipped with a vacuum tube. :(6,3
carrier suction cup 38 connected to the vacuum pump via 7
A plurality of workpiece suction cups 39 are provided, each of which can be moved downwardly, and these suction cups 38 can be turned on and off independently.
, 39, so that the carrier 8 and the workpiece 9 can be held by suction at the same time, - a protrusion 40 is provided at the center of the lower surface of the suction substrate 34, which is movable up and down by a built-in spring;
When the carrier 8 is attracted, the protrusion 40 is inserted into the hole 4 in the center of the carrier.
1 so that their centering is performed.

まだ、上記プレート29には、該プレート29とロッド
30 (Lとの間の隙間αの変化を検出する近接スイッ
チ42を取付け、一方、吸着基板34の上面にはジグシ
リンダ43とばね座板44とを固定し、上記モータシリ
ンダ330ロツド33 (l上に固定されたアーム45
の一側面にジグシリンダ43のロッド43 (lを当接
させると共に、アーム45の他側面とばね座板44との
間に復帰ばね44 (Lを介在させ、ジグシリンダ43
ノロソド43 (Lを伸縮させてアーム45を押圧、解
放することにより吸着基板34を僅かに回転可能とし、
而して、第5図に示すように、下定盤2との間に若干の
間隙を保った状態でキャリヤ8を太陽歯車4に押し当て
て噛合させるに当り、それらが噛合しない場合にキャリ
ヤ8を介してプレート29が後方へ押圧されることによ
って上記隙間αが狭まるのを近接スイッチ42で検出し
、その検出信号によって装填機構26を若干後退させる
と共に、ジグシリンダ44を駆動して吸着基板34を僅
かに(例えば太陽歯車4のギヤピッチの一程度)回転さ
せ、再び上記噛合動作を繰り返すことにより太陽歯車4
との噛合を行うようにしている。
A proximity switch 42 for detecting a change in the gap α between the plate 29 and the rod 30 (L) is still attached to the plate 29, while a jig cylinder 43 and a spring seat plate 44 are mounted on the upper surface of the suction substrate 34. and arm 45 fixed on the motor cylinder 330 and rod 33 (l).
The rod 43 (L) of the jig cylinder 43 is brought into contact with one side, and the return spring 44 (L) is interposed between the other side of the arm 45 and the spring seat plate 44.
Norosod 43 (By extending and contracting L and pressing and releasing the arm 45, the suction substrate 34 can be slightly rotated,
As shown in FIG. 5, when the carrier 8 is pressed against the sun gear 4 and meshed with the lower surface plate 2 while maintaining a slight gap, if they do not mesh, the carrier 8 The proximity switch 42 detects the narrowing of the gap α due to the plate 29 being pushed rearward via the proximity switch 42, and the detection signal causes the loading mechanism 26 to move slightly backward, and the jig cylinder 44 is driven to remove the suction substrate 34. By rotating the sun gear 4 slightly (for example, about one gear pitch of the sun gear 4) and repeating the above meshing operation, the sun gear 4
I am trying to engage with them.

さらに、上記キャリヤ用吸盤38のうち内歯歯車3側に
位置するものには、その上動を検出する近接スイッチ4
6を設け、太陽歯車4と噛合したキャリヤ8を内歯歯車
3を上昇させて該内歯歯車3と噛合させる際に、それら
の不噛合時にキャリヤ8によって吸盤38が押上げられ
るのを上記近接スイッチ46によって検出し、その検出
信号で内歯歯車3をその位置に停止させてジグシリンダ
32を作動させることにより、支持板31即ちキャリヤ
8を僅かに(例えば内歯歯車3のギヤピッチの一程度)
横移動させるようにしている。この横移動によりてキャ
リヤ8と内歯歯車3との噛合が可能になる。
Further, among the carrier suction cups 38, the one located on the internal gear 3 side has a proximity switch 4 for detecting its upward movement.
6 is provided to prevent the suction cup 38 from being pushed up by the carrier 8 when the carrier 8 meshes with the sun gear 4 and the internal gear 3 is raised and meshes with the internal gear 3. By detecting it with the switch 46 and using the detection signal to stop the internal gear 3 at that position and operate the jig cylinder 32, the support plate 31, that is, the carrier 8, is slightly adjusted (for example, about one gear pitch of the internal gear 3).
I'm trying to move it horizontally. This lateral movement allows the carrier 8 and the internal gear 3 to mesh with each other.

また、キャリヤ取出機構27は、第3図及び第4図に示
すように、上記取出台16上に、ロッド4? C1が加
工部7の中心に向けて前後動するようにシリンダ47を
固定し、とのロッド47 (lの先端に設けたブロック
48にキャリヤ8の端部を挾持する上下一対の爪49 
a 、 49 hを開閉自在に設けたもので、上記ロッ
ド47αには、その先端が下方に変位するのを防止する
だめの支持ローラ50を取付けている。
Further, as shown in FIGS. 3 and 4, the carrier take-out mechanism 27 is mounted on the take-out table 16 with the rod 4? A cylinder 47 is fixed so that C1 moves back and forth toward the center of the processing section 7, and a pair of upper and lower claws 49 that clamp the end of the carrier 8 to a block 48 provided at the tip of the rod 47 (L) are fixed.
a, 49h are provided so as to be openable and closable, and a support roller 50 is attached to the rod 47α to prevent its tip from being displaced downward.

なお、上記キャリヤの取出し手段としては、吸盤や電磁
石によってキャリヤを吸着する方式を採用することもで
きる。
Note that as the means for taking out the carrier, a method of attracting the carrier using a suction cup or an electromagnet can also be adopted.

上記移送台15の外方には、キャリヤの搬入部51と搬
出部52とを設け、搬入部5]には、搬入台53上のキ
ャリヤ8及びワーク9を同時に保持して移送台15上に
載置可能な搬入機構54を設け、搬出部52には、移送
台15上のキャリヤ8及びワーク9を同時に保持して搬
出台55土に搬出可能な搬出機構56を設けている。こ
れらの搬入機構54及び搬出機構56は、回動自在のア
ーム57の先端に上記キャリヤ装填機構26と同様に独
立してオン・オフ制御可能  。
A carrier loading section 51 and a carrier unloading section 52 are provided outside the transfer table 15. A carry-in mechanism 54 that can be placed is provided, and the carry-out section 52 is provided with a carry-out mechanism 56 that can simultaneously hold the carrier 8 and workpiece 9 on the transfer table 15 and carry them out to the carry-out table 55. The carrying-in mechanism 54 and the carrying-out mechanism 56 are mounted at the tip of a rotatable arm 57 and can be independently controlled on and off in the same manner as the carrier loading mechanism 26 described above.

なキャリヤ用吸盤とワーク用吸盤とを設け、これらの吸
盤によってキャリヤ8とワーク9とを同時に吸着可能と
したものである。
A carrier suction cup and a workpiece suction cup are provided, and the carrier 8 and the workpiece 9 can be sucked at the same time by these suction cups.

次に、」−記構酸を有する平面研削装置の作用について
説明する。
Next, the operation of the surface grinding device having the structure acid will be explained.

マス、モータ13により回転リング10が間欠的に0度
づつ回転され、搬入台53上に方向調整された状態でコ
ンベヤで送られて来るキャリヤ8がワーク9を保持した
まま搬入機構54によって移送台15上に載置される。
The rotary ring 10 is intermittently rotated by 0 degrees by the mass and motor 13, and the carrier 8, which is conveyed by a conveyor with the direction adjusted onto the loading table 53, is transferred to the transfer table by the loading mechanism 54 while holding the workpiece 9. 15.

全ての移送台15上にキャリヤ8が載置されると、と同
位置で停止する。ここで各キャリヤ装填機構26が一斉
に作動し、移送台15上のキャリヤ8及びワーク9を吸
盤38 、39によって同時に吸着して持ち上げ、加工
部7へ装填すべくシリンダ30の作動によって前方へ移
送する。この間に回転リング10続イテ、キャリヤ装填
機構26においては、モータシリンダ33の作動により
吸着基板34が近接スイッチ34 Qが作動する位置即
ちキャリヤ8と下定盤2との間に若干の間隙が保持され
る位置(第5図参照)寸で下降し、この位置からシリン
ダ3oの作動により吸着基板34が前進してキャリヤ8
がまず太陽歯車4に噛合せしめられる。太陽歯車4との
噛合が完了すると内歯歯車3が上昇し、キャリヤ8が該
内歯歯車3と噛合せしめられ、これによってキャリヤ8
の装填が完了する。キャリヤ8と太陽歯車4″!、たは
内歯歯車3とが一度で噛合しない場合には、前述したよ
うにその不噛合が近接スイッチ42寸たけ46で検出さ
れ、ジグシリンダ44まだは32で吸着基板34の回転
または支持板31の横移動が行われて上記噛合動作が繰
り返される。
When the carriers 8 are placed on all the transfer tables 15, they stop at the same position. Here, each carrier loading mechanism 26 operates simultaneously, and the carriers 8 and workpieces 9 on the transfer table 15 are simultaneously sucked and lifted by the suction cups 38 and 39, and transferred forward by the operation of the cylinder 30 to be loaded into the processing section 7. do. During this time, in the rotating ring 10 series and the carrier loading mechanism 26, the suction substrate 34 is held at the position where the proximity switch 34Q is activated by the operation of the motor cylinder 33, that is, a slight gap is maintained between the carrier 8 and the lower surface plate 2. From this position, the suction substrate 34 moves forward by the operation of the cylinder 3o, and the carrier 8
is first meshed with the sun gear 4. When the meshing with the sun gear 4 is completed, the internal gear 3 rises, and the carrier 8 is brought into mesh with the internal gear 3.
loading is completed. If the carrier 8 and the sun gear 4''!, or the internal gear 3 do not mesh at once, the mismatch is detected by the proximity switch 42 and the jig cylinder 44, as described above, and the jig cylinder 44 is sucked by the jig cylinder 32. The rotation of the substrate 34 or the lateral movement of the support plate 31 is performed to repeat the above-described meshing operation.

キャリヤ8の装填が完了すると、キャリヤ装填機構26
はキャリヤ8及びワーク9を解放して始めの位置に復帰
し、上定盤5が下降してワーク9の研削加工が開始され
る。研削加工の間、上述した搬入機構54によって各移
送台15上に新たなキャリヤ8及びワーク9が載置され
る。
When loading of the carrier 8 is completed, the carrier loading mechanism 26
releases the carrier 8 and the workpiece 9 and returns to the starting position, the upper surface plate 5 descends, and grinding of the workpiece 9 is started. During the grinding process, a new carrier 8 and workpiece 9 are placed on each transfer table 15 by the above-mentioned carry-in mechanism 54.

加工が終了すると、各歯車3,4及び定盤2゜5が一旦
停止して下定盤5が上昇し、該上定盤51だけ機体1に
取付けられたセンサ(図示せず)によりキャリヤの位置
が検出されて各キャリヤ8が取出台16と対応する位置
に来るようにその位置調整が行われ、内歯歯車3が下降
する。
When the machining is completed, the gears 3, 4 and the surface plate 2.5 temporarily stop, the lower surface plate 5 rises, and only the upper surface plate 51 detects the position of the carrier by a sensor (not shown) attached to the machine body 1. is detected, the position of each carrier 8 is adjusted so that it comes to a position corresponding to the take-out table 16, and the internal gear 3 is lowered.

続いて、取出台16がシリンダ20の作動により前進し
、その高さが下定盤2に合わせて調整されると同時に次
回のキャリヤ取出時の前進高さとして設定された後、キ
ャリヤ取出機構27におけるシリンダ、17のロンドア
I7 (lが前進して爪49(1,4’31)の間にキ
ャリヤ8の端部を挾持し、それを取出台16におけるタ
ーンテーブル2I上に引出す。ここで取ni台16は後
退し、ターンテーブル21の回転によってキャリヤ8の
方向が調整される。このキャリヤの方向調整は、不規則
な向きで取出されるキャリヤ8を各ワーク9が一定の位
置を占めるように方向調整することにより、該キャリヤ
8とワーク9とをキャリヤ装填機構26の各吸盤38 
、39で同時に吸着できるようにするためであって、ワ
ーク9がセンサ25で検出されるまでターンテーブル2
1を回転させることによりその方向調整が行われる。
Subsequently, the take-out table 16 moves forward by the operation of the cylinder 20, and its height is adjusted to match the lower surface plate 2, and at the same time is set as the forward height for the next carrier take-out. The cylinder, 17, of the round door I7 (l) moves forward to clamp the end of the carrier 8 between the claws 49 (1, 4'31) and pulls it out onto the turntable 2I in the take-out table 16. The table 16 is moved back, and the direction of the carrier 8 is adjusted by rotating the turntable 21. This adjustment of the direction of the carrier is such that each workpiece 9 occupies a fixed position when the carrier 8 is taken out in an irregular direction. By adjusting the direction, the carrier 8 and the workpiece 9 can be moved to each suction cup 38 of the carrier loading mechanism 26.
, 39 at the same time, and until the workpiece 9 is detected by the sensor 25, the turntable 2
1 is rotated to adjust its direction.

キャリヤの方向調整が行われている間、移送台15上に
載置されたキャリヤ8及びワーク9はキャリヤ装填機構
26によって加工部7へ装填され、その研削加工が行わ
れる。
While the direction of the carrier is being adjusted, the carrier 8 and workpiece 9 placed on the transfer table 15 are loaded into the processing section 7 by the carrier loading mechanism 26, and the grinding process is performed thereon.

一方、取出台16上において方向調整されたキャリヤ8
及びワーク9は、上記キャリヤ装填機構26て取出台1
6と同位置に移動して来た移送台15上にして第2図に
示す位置に停止すると、搬出機構56が作動し、搬出部
52に位置する移送台15上のキャリヤ8及びワ−り9
を搬出台55上に搬出する。その後、」二記各移送台1
5はθ度づつ間欠的に回転し、それらに載置されている
キャリヤ及びワークが搬出部52において順次搬出され
、空になった移送台+5−にには、搬入部51において
搬入台53上の新だなキャリヤ8及びワーク9が搬入さ
れる。
On the other hand, the carrier 8 whose direction is adjusted on the take-out table 16
And the work 9 is loaded onto the carrier loading mechanism 26 and the take-out table 1.
6 and stops at the position shown in FIG. 9
is carried out onto the carrying-out table 55. After that, each transfer table 1
5 rotates intermittently by θ degrees, and the carriers and workpieces placed thereon are sequentially carried out at the carry-out section 52, and the empty transfer table +5- is placed on the carry-in table 53 at the carry-in section 51. A new shell carrier 8 and workpiece 9 are carried in.

かかる動作を繰り返すことによってワークの研削加工が
行われる。
Grinding of the workpiece is performed by repeating this operation.

このように、本発明によれば、吸着基板にキャリヤ用の
吸盤とワーク用の吸盤とを設け、これらの吸盤によって
キャリヤ及びワークを同時に吸着保持して加工部へ装填
するようにしだので、それらの装填を自動的且つ短時間
に行うことができ、また、キャリヤと太陽歯車及び内歯
歯車とが一度で噛合しない場合には、それらの不噛合を
近接スイッチで検出し、吸着基板を回転捷たは横移動さ
せて噛合動作を繰り返すようにしたので、それらを簡単
な操作で確実に噛合させることができる。
As described above, according to the present invention, the suction board is provided with a suction cup for the carrier and a suction cup for the workpiece, and these suction cups simultaneously suck and hold the carrier and the workpiece and load them into the processing section. can be loaded automatically and in a short time, and if the carrier and the sun gear and internal gear do not mesh at once, a proximity switch detects their mismatch and rotates the suction board. Since the meshing operation is repeated by moving the parts horizontally or horizontally, it is possible to reliably mesh them with a simple operation.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す一部省略部分断面図、
第2図はその部分省略平面図、第6図及び第4図はキャ
リヤの取出金及びキャリヤ取出機構の拡大側面図及び平
面図、第5図及び第6図はキャリヤ装填機構の拡大側面
図及び平面図である。 1・・・機体、     2・・・下定盤、3・・・内
歯歯車、   4・・・太陽歯車、5・11e上定盤、
    8・台・キャリヤ、9・・・ワーク、26・・
・キャリヤ装填機構、29−−−プレート、   30
・・・シリンダ、30 (L・・・ロッド、   30
h・・・スフリング、34・・・吸着基板、38.39
・・・吸盤、42 、46・・・近接スイッチ。
FIG. 1 is a partially omitted partial sectional view showing an embodiment of the present invention;
Fig. 2 is a partially omitted plan view, Figs. 6 and 4 are enlarged side views and plan views of the carrier ejection mechanism and carrier ejection mechanism, and Figs. 5 and 6 are enlarged side views and plan views of the carrier loading mechanism. FIG. 1... Airframe, 2... Lower surface plate, 3... Internal gear, 4... Sun gear, 5.11e upper surface plate,
8.Table/Carrier, 9..Work, 26..
・Carrier loading mechanism, 29---plate, 30
... Cylinder, 30 (L... Rod, 30
h...Sufring, 34...Adsorption substrate, 38.39
...Sucker, 42, 46...Proximity switch.

Claims (1)

【特許請求の範囲】[Claims] 1、 駆動源に連結されて回転自在の内歯歯車と太陽歯
車とにキャリヤを噛合させ、該キャリヤに保持させたワ
ークを上下の定盤によって加工するようにした平面研削
装置において、機体上に固定したシリンダのロンドにス
プリングを介してプレートを相対変位可能に取付け、該
プレートに吸着基板を上下動可能に支持させて該吸着基
板にキャリヤ及びワークを吸着保持させるだめの複数の
吸盤を上下動可能に装着し、上記プレートに該プレート
とロンドとの相対変位からキャリヤと太陽歯車との不噛
合を検出する近接スイッチを取付けると共に、吸着基板
に吸盤の変位からキャリヤと内歯歯車との不噛合を検出
する近接スイッチを取付け、これらの近接スイッチから
の検出信号に基づいて吸着基板を回転させる回転手段と
横移動させる横移動手段とを付設したことを特徴とする
平面研削装置におけるワークの自動装填機構。
1. In a surface grinding device in which a carrier is meshed with an internal gear and a sun gear that are connected to a drive source and are rotatable, and a workpiece held by the carrier is processed by upper and lower surface plates, A plate is attached to the rond of a fixed cylinder so as to be relatively displaceable via a spring, and a suction substrate is supported by the plate so as to be movable up and down, and a plurality of suction cups for holding carriers and workpieces on the suction substrate can be moved up and down. A proximity switch is installed on the plate to detect mismeshing between the carrier and the sun gear from the relative displacement between the plate and the rond, and a proximity switch is installed on the suction board to detect mismeshing between the carrier and the internal gear from the displacement of the suction cup. automatic loading of a workpiece in a surface grinding device, characterized in that a proximity switch is installed to detect this, and a rotation means for rotating a suction substrate and a lateral movement means for lateral movement are attached based on detection signals from these proximity switches. mechanism.
JP59017969A 1984-02-03 1984-02-03 Automatic work loading mechanism in surface grinder Granted JPS59156666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59017969A JPS59156666A (en) 1984-02-03 1984-02-03 Automatic work loading mechanism in surface grinder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59017969A JPS59156666A (en) 1984-02-03 1984-02-03 Automatic work loading mechanism in surface grinder

Publications (2)

Publication Number Publication Date
JPS59156666A true JPS59156666A (en) 1984-09-05
JPH0360627B2 JPH0360627B2 (en) 1991-09-17

Family

ID=11958557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59017969A Granted JPS59156666A (en) 1984-02-03 1984-02-03 Automatic work loading mechanism in surface grinder

Country Status (1)

Country Link
JP (1) JPS59156666A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176269A (en) * 1984-09-18 1986-04-18 Toa Kogyo Kk Automatic charging and extracting method of planetary guide work in lapping machine and device thereof
JPS6328562A (en) * 1986-07-22 1988-02-06 Otani Reiji Meshedly charging method for lapping carrier
JPH0632886B2 (en) * 1985-11-01 1994-05-02 モトロ−ラ・インコ−ポレ−テッド Polishing system with underwater Bernoulli pickup
AU2003251817B2 (en) * 2002-07-09 2009-01-15 Alotech Ltd. Llc. Mold-removal casting method and apparatus
CN109434630A (en) * 2018-12-03 2019-03-08 大同新成新材料股份有限公司 A kind of graphite jig arrangement for grinding and its application method
CN110509149A (en) * 2019-07-23 2019-11-29 安徽春辉仪表线缆集团有限公司 A kind of electromagnetic instrument meter flow-meter outer cover port processing unit (plant)
CN111002218A (en) * 2019-12-11 2020-04-14 广州大学 Feeding device and feeding method of reinforced grinding processing equipment
CN111872807A (en) * 2020-07-29 2020-11-03 宁波建炟车辆配件有限公司 Clamp for hub machining and polishing device thereof

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176269A (en) * 1984-09-18 1986-04-18 Toa Kogyo Kk Automatic charging and extracting method of planetary guide work in lapping machine and device thereof
JPH0632886B2 (en) * 1985-11-01 1994-05-02 モトロ−ラ・インコ−ポレ−テッド Polishing system with underwater Bernoulli pickup
JPS6328562A (en) * 1986-07-22 1988-02-06 Otani Reiji Meshedly charging method for lapping carrier
AU2003251817B2 (en) * 2002-07-09 2009-01-15 Alotech Ltd. Llc. Mold-removal casting method and apparatus
CN109434630A (en) * 2018-12-03 2019-03-08 大同新成新材料股份有限公司 A kind of graphite jig arrangement for grinding and its application method
CN110509149A (en) * 2019-07-23 2019-11-29 安徽春辉仪表线缆集团有限公司 A kind of electromagnetic instrument meter flow-meter outer cover port processing unit (plant)
CN111002218A (en) * 2019-12-11 2020-04-14 广州大学 Feeding device and feeding method of reinforced grinding processing equipment
CN111002218B (en) * 2019-12-11 2020-10-09 广州大学 Feeding device and feeding method of reinforced grinding processing equipment
CN111872807A (en) * 2020-07-29 2020-11-03 宁波建炟车辆配件有限公司 Clamp for hub machining and polishing device thereof

Also Published As

Publication number Publication date
JPH0360627B2 (en) 1991-09-17

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