JPS6176269A - Automatic charging and extracting method of planetary guide work in lapping machine and device thereof - Google Patents

Abstract

PURPOSE:To make highly charging accuracy and quick extraction attainable, by performing drilling operation of a planetary work charging hole, a work guide at the underside of a robot and each station of work housing, feeding, etc., and their phase solidly and simultaneously into accuracy of finishing. CONSTITUTION:A driving gear 9 is situated in the center of a lapping machine while a fixed internal gear 10 is provided at the outside of a table, and planetary gears P1-Pn are engaged with one another for work conveyance and its guidance. An upper lapping table 17 is smaller in size than a lower table, exposing an engaging part between each planetary hear and the internal fear 10 during lapping operation. Therefore a first planet is stoppable at a robot base line before an upper cover rises. And, each planet and a work guide at the underside of a robot as well as each relay station and a work guide for a work W are all machined in accuracy of finishing in common and, what is more, phase judging marks m and m' are impressed so that if a robot head rotates at the aim of these marks and accords with them, quick extraction and accurate charging of the work in each hole are easily performable.

Description

[Detailed Description of the Invention] At present, the handling of silicon wafers and thin ceramics that serve as semiconductor substrates and the lapping process, which requires low-processing workpiece insertion and high accuracy, relies almost entirely on manual labor. Even if it were planned, it would be difficult to safely, reliably, and quickly solve the relationship between the physical properties of the workpiece and the dimensional accuracy of the insert, and there would be many structural risks and expensive equipment would be required. There are conflicting investment benefits, and complete unmanning is still a concern.

The present invention has high loading accuracy, low cost, reliability, and excellent maintainability, and in order to easily meet especially strict loading tolerances, the workpiece insertion hole of the planet, the workpiece insertion guide on the underside of the robot, the workpiece storage relay rotary, and the workpiece supply The hole machining and phase of each station such as the rotary cartridge are all machined at the same time, so after centering, one (2) sensors installed on the bottom of the robot are used to determine the same relative position of each planet, storage, or supply station. Perfect alignment of the hole and phase can be easily achieved by simply sensing one or two points of the . However, two-point detection is more accurate than one-point detection.

Therefore, unprocessed continuous supply of unprocessed workpieces with strict loading tolerances, which is extremely difficult, can be easily carried out continuously by moving up and down the vertical multi-stage rack onto the conveyor at a constant level. Load the workpiece that has reached the end into the cartridge with a pusher, turn the ratchet, and lower the level of the rotary cartridge by one workpiece each time the rotary cartridge is fully inserted, so that the cartridge is at least equal to the number of planets on the lap plate Multiple pool the work,
Efforts are being made to reduce the pitch for loading and extracting workpieces on the planet.

When heading to each station, the phase scale of the robot head is adjusted to the cycle start point using the control software in advance, so it is concentric and in phase with the supply rotary cartridge, and the robot immediately descends, picks up the workpiece as a puck, and rotates its arm. The robot head is stationary on the theoretical center orbit of the planet, and in order to quickly align the center of the robot head and the center of the planet, the yuri is set at a point slightly away from the stopping baseline of the robot arm in order to improve the accuracy of stopping the robot arm at the baseline. The sensor detects the point at which the gear meshes with the fixed internal gear, and uses it as the deceleration point for the lap table.In the case of a one-sensor system, the robot is placed directly above the four intersections of the circumference and both ends of the diameter that intersect with the marker hole of approximately 30-degrees in the center of the planet. Among the equipped sensors, when the sensors installed at two locations perpendicular to the robot arm base line detect two points in sequence, the planet is completely stopped, and the four sensors detect X-Y axis eccentricity and calculations are performed using the planned software. Electric X- with robot head through function
Move the Y-axis centering table to completely align it with the marker center of the planet. Alternatively, the reflector provided at the center of the robot and the video camera body provided at the fixed end function to calculate the deviation value of the irradiation onto approximately 15 holes or markers filled with contrast metal to ensure contrast at the center of the planet. This feeds back to the electric X-Y axis centering table drive equipped with a robot head to accurately track and align the planet center. Finally, to align the multiple holes on the planet and the phase, the robot head is rotated and aligned until the sensor at the specific point on the work guide on the bottom of the robot detects the same-related 1 (2) point marker on the planet, as in the supply station described above. descend,
The workpiece can be loaded correctly into the planetary hole.

If the next planet has a completed workpiece, use the same procedure to guide the planet directly below the robot arm axis, align it, and then adjust the head rotation angle at which the workpiece was extracted until the next unprocessed workpiece is loaded. Memorize the phase angle of the hole,
The robot arm rotates to transfer the processed product to the relay storage station. On the way, the robot head rotates back to the storage relay pool station scale, where it always waits at the specified work phase, reaches above the rotary pool station, and descends. Release suction for all workpieces at the same time and transfer all workpieces. Workpiece storage from the rotary station is carried out by a fixed level conveyor that is linked to the ratchet movement of the rotary pool, and then the vertical multi-stage storage rack at the other end of the conveyor moves up and down in conjunction with the conveyor to complete one cycle. do.

In the case of video camera detection, as shown in Fig. 4, a light source is directly irradiated or reflected through the machining marker hole at the planet center 15-, and the circumferential intersection point a-b in the X-axis direction is first detected, and it is perpendicular to the center point C of The centering can be performed by sensing the circumferential intersection de in the Y-axis direction and setting the midpoint 0 as the midpoint of each of the X and Y axes by controlling the X-Y table based on calculation software. If detecting with 4 sensors, open a hole at 3° in the center of the planet.

Setting conditions ■TV scanning line...525 wood ■Marker hole 15
φ ■Setting insertion accuracy・0.2 m/m = 0.2
m/m=2 1! M=28.57100m/m 10
00 525 1000 Lens magnification 28.57÷2=
14.3 ■Lens magnification: Plan for 20x or more for safety.

Next, based on this method (eIC), an example of its implementation will be described with reference to a drawing. There is a drive gear (■) in the center of the lapping machine, and a fixed internal gear (0) on the outside of the table, which is used to transport and guide the workpiece. The upper lap table 0, in which the planetary gears P1 to Pn are meshed, is smaller than the lower table and exposes the meshing portion of the teeth of the wrapping inner hook planet.

The center marker hole of the planet is filled with different metals with AM or IICMK contrast, and each planet, the work guide on the bottom of the robot, and the work guide of each relay station SW and W are co-processed, and a phase determination mark M is processed. Because of this, the robot head can rotate to aim at the marker and accurately extract and load the workpiece in each hole.

The workpiece guide on the underside of the robot head is installed horizontally with mounting bins ■ and springs ■ distributed evenly around the circumference.Suction packs A are equally distributed according to the number of workpieces, and the phase discrimination sensor M is placed in the same relative position as each planet. Since it is an installation, the supply is sent from the rack @ via the conveyor [phase] to the supply relay station SW, and from the storage relay W station, it is stored in the multi-stage vertical rack 0 via the conveyor @. The robot head can be equipped with four sensors aiming at the planetary center marker, or in addition, an anti-'Nff1 and a video camera body. The phase discrimination sensor 1 is always positioned to aim at the bottom surface, and a worm reducer is also used to rotate the robot head.
The robot arm (2), which is equipped with an electric table T for fine adjustment, is rotated by a hydraulic lift (2).A walk reducer (3) is mounted on the top of the robot arm (2), and the robot head is raised and lowered by a hydraulic lift mechanism (3).

[Brief explanation of drawings]

Figure 1: An explanatory diagram of the planar configuration of the lapping machine and the robot's turning action system. Figure 2: A cross-sectional diagram of the robot head and arm. Figure 3: Planetary plan view for 6 workpieces. Figure 4...
・・Sensor positioning explanatory diagram Figure 5 ・・・Cross-sectional view of internal gear, planet, upper and lower table relationship Figure 6 ・・Unprocessed workpiece removal ~ Processed product storage system diagram ■・・・Bottom surface of robot Work guide■...Robot rotation base■...Robot arm rotation mechanism■...Head rotation worm■...Robot lifting hydraulic lift■...Robot rotation Arm ■...Work guide attachment spring■...Work guide attachment pin■...Drive gear 0...Lower lap table■...Fixed internal gear■...Planet Deceleration start point 0... Conveyor between storage relay station and conch 0... Storage vertical multi-stage rack [phase]... Conveyor between multi-stage rack and supply relay station ■... Vertical supply Type multi-tier rack ■・・・Upper lap rotary table [phase]・・・Supply station transfer butcher A・
...Suction pad R...Reflector BC.
...Video camera T...X-Y table RA...Robot rotating arm center 5t (
S2)... Phase discrimination sensor H1~Hm...
・Workpiece loading hole cm...Planetary center marker m (m')...Planet top phase alignment marker pi-Pn
...Yusei

Claims (1)

[Claims] 1. In a lapping machine in which there is a driving gear at the center of a rotary table, a fixed internal gear on the outer periphery of the table, and a plurality of planetary gears in the radial center of the rotating table,
The planetary gear is used as a carrier and retainer for the workpiece, and the workpiece is inserted into the planetary hole with a small gap.For hole machining, the workpiece is inserted into the hole of the planet using the workpiece insertion guide for loading the robot on the underside of the robot and the station that supplies the finished workpiece to the robot. Rotary work cartridges and the like are all machined as one piece and the phases of the holes are perfectly matched. After the top lid rotary table of the lapping machine has been raised, when tracking and matching the center of the robot head that rotates or slides in from the outside of the table and the center of the planet, the stop baseline of the robot arm is set in order to improve and speed up the accuracy and speed of stopping the robot arm. The sensor detects the point at which the planet meshes with the fixed internal gear when it is slightly away from the position, and uses it as the deceleration point of the lap table.
When the sensors installed at two locations orthogonal to the robot arm base line sequentially detect two points among the four intersections of the circumference and both ends of the diameter that intersect with the marker hole at the center of the planet, the planet is stopped and four more sensors are detected. Then, the electric X-Y axis centering table mounted on the robot head is moved to perfectly match the marker center of the planet through the sensing information of the X-Y axis eccentricity and the calculation function of the planned software. Alternatively, the reflector provided at the center of the robot and the video camera body provided at the fixed end function to calculate the deviation value of the irradiation onto the approximately 15φ hole or marker filled with contrast metal to ensure contrast at the center of the planet. Feedback is provided to the electric X-Y axis centering table drive equipped with a robot head to accurately track and match the planetary center. In any case of alignment, the final phase alignment between the holes that hold the work on the planet is performed using a sensor at the end of work guide 1 (2) on the bottom of the robot, which is machined simultaneously with the planet. This automatic workpiece loading and extraction method is characterized in that automatic loading and extraction can be easily performed even in workpiece holes with high loading accuracy by simply aiming at one or two marker holes at related positions. 2. In a wrapping device that applies planetary motion by inserting a workpiece into the surface through-hole of a planetary gear, when unmannedly loading and extracting a single planet's worth of conveyed workpieces at once, unprocessed workpieces are collected from the vertical storage rack at the start point of the unmanned cycle. Workpieces are transferred one by one to a conveyor by vertical racks that move up and down in conjunction with each other, and the amount equivalent to one planet is pooled at a relay rotary station.In order to quickly load and extract workpieces with strict planetary insertion accuracy, a system is installed at the bottom of the robot head. The installed guide for workpieces and suction pads, the rotary cartridge for supplying unprocessed workpieces and the finished product storage station, etc. are all integrated and machined at the same time with the same diameter and diameter, and one (2) point marker is used to distinguish the phase of multiple workpiece insertion holes. The center of the robot head and the center of the planet load and extract the work onto and from the planet on the lapping machine. For alignment, in the first step, the engagement between the planet and the fixed internal gear is sensed at a set point before the robot stops, and the table rotation is decelerated to stop the precision.The planet enters directly under the robot and aims at the marker hole of the planet with a regular cross. In either case, the planetary marker deviation can be processed using four sensors, or it can be captured using a video camera and the information can be processed using pre-planned software. , completely unite the two minds. To align the hole phase in the second alignment step, the head is electrically rotated until one (2) sensors on the robot detect the marker 1 (2) point at the same relative position between the robot's sensor and the planet. A device that unmannedly loads and extracts workpieces into holes with strict insertion tolerances, takes out workpieces, and stores finished processed products.