JPS5915072Y2 - プラズマエツチング装置 - Google Patents
プラズマエツチング装置Info
- Publication number
- JPS5915072Y2 JPS5915072Y2 JP1976049152U JP4915276U JPS5915072Y2 JP S5915072 Y2 JPS5915072 Y2 JP S5915072Y2 JP 1976049152 U JP1976049152 U JP 1976049152U JP 4915276 U JP4915276 U JP 4915276U JP S5915072 Y2 JPS5915072 Y2 JP S5915072Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction tube
- etching
- plasma etching
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976049152U JPS5915072Y2 (ja) | 1976-04-19 | 1976-04-19 | プラズマエツチング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976049152U JPS5915072Y2 (ja) | 1976-04-19 | 1976-04-19 | プラズマエツチング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52140772U JPS52140772U (it) | 1977-10-25 |
JPS5915072Y2 true JPS5915072Y2 (ja) | 1984-05-04 |
Family
ID=28508343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976049152U Expired JPS5915072Y2 (ja) | 1976-04-19 | 1976-04-19 | プラズマエツチング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5915072Y2 (it) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4944517U (it) * | 1972-07-21 | 1974-04-19 | ||
JPS5011672A (it) * | 1973-06-01 | 1975-02-06 |
-
1976
- 1976-04-19 JP JP1976049152U patent/JPS5915072Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4944517U (it) * | 1972-07-21 | 1974-04-19 | ||
JPS5011672A (it) * | 1973-06-01 | 1975-02-06 |
Also Published As
Publication number | Publication date |
---|---|
JPS52140772U (it) | 1977-10-25 |
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