JPS59145640U - 簡易クリ−ンル−ム - Google Patents

簡易クリ−ンル−ム

Info

Publication number
JPS59145640U
JPS59145640U JP3950583U JP3950583U JPS59145640U JP S59145640 U JPS59145640 U JP S59145640U JP 3950583 U JP3950583 U JP 3950583U JP 3950583 U JP3950583 U JP 3950583U JP S59145640 U JPS59145640 U JP S59145640U
Authority
JP
Japan
Prior art keywords
clean room
simple clean
chamber
sealed
sealing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3950583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0112115Y2 (enrdf_load_stackoverflow
Inventor
千明 加藤
柳原　威
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shinmaywa Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries Ltd filed Critical Shinmaywa Industries Ltd
Priority to JP3950583U priority Critical patent/JPS59145640U/ja
Publication of JPS59145640U publication Critical patent/JPS59145640U/ja
Application granted granted Critical
Publication of JPH0112115Y2 publication Critical patent/JPH0112115Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP3950583U 1983-03-17 1983-03-17 簡易クリ−ンル−ム Granted JPS59145640U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3950583U JPS59145640U (ja) 1983-03-17 1983-03-17 簡易クリ−ンル−ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3950583U JPS59145640U (ja) 1983-03-17 1983-03-17 簡易クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS59145640U true JPS59145640U (ja) 1984-09-28
JPH0112115Y2 JPH0112115Y2 (enrdf_load_stackoverflow) 1989-04-10

Family

ID=30170148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3950583U Granted JPS59145640U (ja) 1983-03-17 1983-03-17 簡易クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS59145640U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0112115Y2 (enrdf_load_stackoverflow) 1989-04-10

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