JPS59143909A - 表面粗さ検出方法 - Google Patents
表面粗さ検出方法Info
- Publication number
- JPS59143909A JPS59143909A JP1868083A JP1868083A JPS59143909A JP S59143909 A JPS59143909 A JP S59143909A JP 1868083 A JP1868083 A JP 1868083A JP 1868083 A JP1868083 A JP 1868083A JP S59143909 A JPS59143909 A JP S59143909A
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- optical
- roughness
- ratio
- checked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003746 surface roughness Effects 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims description 12
- 230000003287 optical effect Effects 0.000 claims abstract description 88
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 238000007689 inspection Methods 0.000 claims description 23
- 238000012360 testing method Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 4
- 230000014509 gene expression Effects 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 238000003754 machining Methods 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 239000013307 optical fiber Substances 0.000 description 13
- 238000005259 measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 2
- KZMAWJRXKGLWGS-UHFFFAOYSA-N 2-chloro-n-[4-(4-methoxyphenyl)-1,3-thiazol-2-yl]-n-(3-methoxypropyl)acetamide Chemical compound S1C(N(C(=O)CCl)CCCOC)=NC(C=2C=CC(OC)=CC=2)=C1 KZMAWJRXKGLWGS-UHFFFAOYSA-N 0.000 description 1
- 238000005314 correlation function Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 235000013367 dietary fats Nutrition 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010520 ghee Substances 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1868083A JPS59143909A (ja) | 1983-02-07 | 1983-02-07 | 表面粗さ検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1868083A JPS59143909A (ja) | 1983-02-07 | 1983-02-07 | 表面粗さ検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59143909A true JPS59143909A (ja) | 1984-08-17 |
| JPH0153722B2 JPH0153722B2 (enrdf_load_stackoverflow) | 1989-11-15 |
Family
ID=11978316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1868083A Granted JPS59143909A (ja) | 1983-02-07 | 1983-02-07 | 表面粗さ検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59143909A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0863380A1 (en) * | 1997-03-07 | 1998-09-09 | Mitutoyo Corporation | Method of surface roughness measurement using a fiber-optic probe |
| CN103759675A (zh) * | 2013-12-23 | 2014-04-30 | 中国兵器工业第五二研究所 | 一种用于光学元件非球面微结构的同步检测方法 |
| EP2777862A3 (en) * | 2013-03-11 | 2014-11-19 | Samsung Display Co., Ltd. | Substrate peeling device, method for peeling substrate, and method for fabricating flexible display device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163851A (en) * | 1981-04-01 | 1982-10-08 | Mitsutoyo Mfg Co Ltd | Optical fiber |
| JPS5950309A (ja) * | 1982-08-13 | 1984-03-23 | コミサリア タ レネルジー アトミック | 表面のあらさを決定するための方法と装置 |
-
1983
- 1983-02-07 JP JP1868083A patent/JPS59143909A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163851A (en) * | 1981-04-01 | 1982-10-08 | Mitsutoyo Mfg Co Ltd | Optical fiber |
| JPS5950309A (ja) * | 1982-08-13 | 1984-03-23 | コミサリア タ レネルジー アトミック | 表面のあらさを決定するための方法と装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0863380A1 (en) * | 1997-03-07 | 1998-09-09 | Mitutoyo Corporation | Method of surface roughness measurement using a fiber-optic probe |
| EP2777862A3 (en) * | 2013-03-11 | 2014-11-19 | Samsung Display Co., Ltd. | Substrate peeling device, method for peeling substrate, and method for fabricating flexible display device |
| CN103759675A (zh) * | 2013-12-23 | 2014-04-30 | 中国兵器工业第五二研究所 | 一种用于光学元件非球面微结构的同步检测方法 |
| CN103759675B (zh) * | 2013-12-23 | 2016-07-06 | 中国兵器科学研究院宁波分院 | 一种用于光学元件非球面微结构的同步检测方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0153722B2 (enrdf_load_stackoverflow) | 1989-11-15 |
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