JPS59135620A - Magnetic head - Google Patents

Abstract

PURPOSE:To improve the wear resistance and to reduce the output reduction in a high frequency region by laminating plural thin films of an amorphous magnetic Co-Zr alloy with a nonmetallic intermediate layer having specified Vickers hardness in-between. CONSTITUTION:Plural thin films of an amorphous magnetic alloy represented by a formula TxXy are laminated with a nonmagnetic intermediate layer in- between. The Vickers hardness Hv (100g DPH load) of the material forming the intermediate layer is 400-2,000kg/mm.<2>. In case of >2,000kg/mm.<2> hardness Hv, the edge planeness of the thin films on a face to be butted is deteriorated, and the output is reduced in a high frequency region. In case of <400kgmm.<2>hardness Hv, the wear resistance is deteriorated, and the output reduction in the high- frequency region is increased. In the formula, T is Co or a combination of Co with one or more kinds of transition metallic elements others than Co and Zr, X is Zr or a combination of Zr with one or more kinds of other vitrifying elements, x+y=100atom%, and y is 5-35atom%.

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Background of the Invention Technical Field The present invention relates to a magnetic head. More specifically, the present invention relates to a magnetic head having an amorphous magnetic alloy thin film.

Prior art and its problems Thin sheets of amorphous magnetic alloys have attracted attention as magnetic head materials because they exhibit high saturation magnetization and high magnetic permeability.

To form a narrow magnetic head with track 11 from an amorphous magnetic alloy thin plate, such as a rotary head for video recording, recording/playback, or audio, or a magnetic head for a computer, a Co-based non-alloy is used. A thin plate of a crystalline magnetic alloy is used as it is, or a plurality of sheets thereof are laminated to form a track width of several tens of meters or less, especially about 20 to 30 gm, and a core semicircle is formed into a predetermined shape through a gap. They are manufactured together.

However, heads for videos and the like manufactured in this manner are extremely thin and therefore do not have sufficient strength, and are deformed during mechanical processing, resulting in poor dimensional accuracy after one processing.

Furthermore, since the thin plate of amorphous magnetic alloy has high elasticity, it deforms as it slides at high speed with the video magnetic recording medium, causing the head arm to become unbalanced and resulting in poor rotational running performance.

In order to eliminate such inconveniences, it is conceivable to form a thin film of an amorphous magnetic alloy on a predetermined substrate by sputtering to form a half-core core, and then form a magnetic head from this. In the magnetic head formed in this way, the disadvantages mentioned above are eliminated.

Incidentally, as an example of an amorphous magnetic alloy thin film formed by sputtering, a Co--Zr based film is known.

However, a magnetic head having a Co--Zr based magnetic thin film formed in this manner has a drawback of lacking wear resistance.

Further, there is a drawback that the eddy current phase cannot be ignored and the output decreases significantly in the high frequency range.

Furthermore, when processing the shape of the core f: body, the flatness of the end face of the thin film that is placed on the butting surface deteriorates, and the effective gear width increases during butting, which also reduces the output, especially in the high frequency range. It has the disadvantage that it decreases.

II. OBJECTS OF THE INVENTION The present invention was made in view of the above-mentioned circumstances, and its main purpose is to improve wear resistance and reduce output drop in the high frequency range. An object of the present invention is to provide a magnetic head having an alloy thin film.

Such objects are achieved by the invention described below.

That is, the present invention has a laminate formed by laminating a plurality of amorphous magnetic alloy thin films represented by the following formula with a non-magnetic intermediate layer interposed therebetween on the base body -1-, and the material forming the intermediate layer is Vickers hardness is 400~
This magnetic head is characterized by having a power of 2000 Kg/mrn'.

Formula (in the above formula, T is Co, or Go, Co and Zr
X represents a combination of Zr, or a combination of Zr and one or more other vitrification elements, x+y=100 at% Yes, and among these, y is 5 to 35 at%. )■ Specific configuration of the invention The specific configuration of the present invention will be explained in detail below.

The thin film in the present invention has magnetic properties and is in an amorphous state with substantially no long-range regularity.

In the present invention, the composition of the amorphous magnetic alloy thin film formed on the substrate is expressed by a two-part formula.

] - in the foot price, T represents the combination of CO or 1 basis weight of CO and another transition metal element, i.e., T
may consist of Co alone, or may consist of CO and another transition metal element. .

When T consists of CO and other transition metal elements, the other transition metal elements include Fe and Ni.

Cr, Mo, W, V, Nb,
T a , T i , Z rHf, Mn, Pt, R
u, Rh, Pd, Os.

(1) One insert such as r can be cited as a specific example, but the total of these is preferably 38 at% or less.

Among such additive elements in T, one preferable example is Ru. Ru has a great effect in improving high-speed abrasion resistance and preventing a decrease in output when using Meckle tape (coated tape using alloy magnetic powder).

Note that when Ru is replaced with another platinum group element, such as Pt or Rh, such an effect cannot be achieved.
It is preferably 6 at%, more preferably 1 to 5 at%.

Another preferred element is Cr.

By adding Cr, high-speed wear resistance and storage stability under high temperature and high humidity conditions are significantly improved.

In this case, the amount of Cr added is 8 at% or less, especially 0.5 to
It is preferably 6 at%, more preferably 0.5 to 5 at%.

In addition, other than Cr (7) VIB group, VB group, rVB group elements, Mo, W, V, Nb, T
a, Ti.

It is also preferable to add one or more of Zr and Hf. These additions improve high-speed wear resistance under high temperature and high humidity conditions and reduce embrittlement after heat treatment.

In this case, the amount of these additions is 5 at% or less.

In particular, it is preferably 0.1 to 2 at%.

Further, when Ru, more preferably Ru+Cr, and even more preferably Ru+Cr+ (other IVB to IVB group elements) are included, even more favorable results can be obtained.

Furthermore, other additive elements may include Fe. Addition of Fe reduces magnetostriction.

In this case, the amount of Fe added is preferably 6 at% or less.

Furthermore, Ni may be included.

Ni replaces CO and reduces material cost, but the amount added is preferably 10 at % or less.

In addition, Mn is also a suitable additive element.

On the other hand, X is Zr or a combination of Zr and another vitrifying element.

In this case, X usually consists of only Zr, but in addition,
and one or more of B, St, etc. B,S
When t and the like are included, the total amount thereof is preferably 10 at% or less.

The content of X is 5 to 35 at%, especially 5 to 3 at%.
It is preferably 0 at%, more preferably 5 to 20 at%.

In such a magnetic thin film, a plurality of layers are laminated with a nonmagnetic intermediate layer interposed therebetween.

Vickers hardness Hv (UP) of the material forming the intermediate layer
load 100g) is 400~2000Kg/mrn
' )Must.

In this case, Hv is that of the material used in its normal bulk state.

When Hv exceeds 2000 Kg/mm', the flatness of the thin film end face at the abutting surface becomes poor, the effective gear width increases, and the output particularly in the high frequency range decreases.

Moreover, when Hv becomes less than 400 Kg/mmj, wear resistance decreases and output decrease in a high frequency range becomes large.

In this case, Hv is 400-1500 K g/m
It is preferable that it is m'.

Materials exhibiting such Hv include various inorganic substances, particularly aluminum oxide, silicon oxide, titanium oxide, magnesium oxide, composite systems thereof, and various types of glass.

Such an intermediate layer preferably has a thickness of 30 to 100 OA. This reduces the amount of eddy power used, and the drop in output in the high frequency range becomes extremely small.

The magnetic thin film and the intermediate layer as described above are stacked on each other to form a laminate.

In this case, the magnetic thin film generally has about 1 to 3 layers.

The total thickness of the laminate is 0.1 to 100 gm,
Preferably, it is about 0.1 to 30 gm.

The substrate used is usually non-magnetic.

In this case, there are no particular restrictions on the material of the body.

Therefore, any of various oxides, carbides, silicides, nitrides, glasses, etc. can be suitably used.

The substrate material may be selected and used as appropriate, taking into consideration the physical properties of the amorphous magnetic alloy thin film, workability, fluidity with the medium, etc.

Although there is no particular restriction on the thickness of the body, it is usually about 0.1 to 5 mm.

To form a laminate of an amorphous magnetic alloy thin film and a nonmagnetic intermediate layer on such a substrate -1-, a vapor phase deposition method, usually sputtering, is used.

The sputtering method used is to sputter a target with li''71 ions, usually at several eV to about 1
Any known sputtering method that evaporates the target material with a kinetic energy of 00 eV can be used.

Therefore, even if a plasma method is used in which the target is sputtered with p, r/:, l; ions generated by abnormal glow discharge in an inert gas atmosphere such as Ar, the target will not be exposed to the ion beam of Ar, Kr, Xe, etc. An ion beam method using irradiation may also be used.

When using a plasma method, it may be so-called RF sputtering or so-called DC sputtering,
The device configuration may be either 2-pole, 4-pole, etc. Furthermore, so-called magnetron sputtering may be used. In some cases, so-called reactive sputtering may also be used. Furthermore, various methods can be used as the ion beam method.

In normal cases, the target used is the corresponding M
A one-piece product may be used.

There are no special restrictions on operating pressure, plate I/voltage, plate current, gap between electrodes, etc., and these may vary depending on the conditions.
Can be set to any value.

In such cases, a base layer is formed on one side of the substrate,
A laminate of an amorphous magnetic alloy thin film and a nonmagnetic intermediate layer may be formed on this underlayer.

In addition, a two-layer protective layer may be formed on the laminate of the amorphous magnetic alloy thin film and the nonmagnetic intermediate layer. The base body 2.2' on which the laminate 3.3' is formed is processed into a predetermined shape, as shown in FIGS. ', and are brought together at the front gap portion 4 and the rear gap portion via a gap material 40 such as 5i02 to form a magnetic head. In this case, it is preferable that at least the abutting surfaces of the front gap portion be inclined from the normal to the film forming surface to form a so-called azimuth angle.

Note that the core half 1.1' is a laminate of a thin film and an intermediate layer 3.
Furthermore, a protector 5 made of the same material as the base 2.2' can be bonded to the base 2.2'.

In such a case, after forming the thin film, it is preferable to perform heat treatment in a non-magnetic field or in a static magnetic field or a rotating magnetic field, if necessary.

Next, it is ground into a predetermined shape, and if necessary, it is ground to a predetermined thickness, and if necessary, it is further polished to make the core semi-dry.

Then, winding 8 is applied, alignment is performed as described above, and other necessary processing is performed, and the magnetic head is fixed 71 to a support 9 to produce a magnetic head.

Note that the heat treatment described in -1- may be performed after shape pressing and before winding.

(2) Specific effects of the invention Such a magnetic head is extremely useful as a rotary head for video recording, recording/playback, audio, etc., or a magnetic head for computers.

The magnetic head of the present invention has extremely high wear resistance.

Furthermore, as the eddy current phase becomes extremely small, the output drop in the high frequency range becomes extremely small.

Furthermore, the flatness of the end face of the thin film located at the gap abutting surface is improved, and the effective gear 5. Since the spread of +t+ is reduced, this further reduces the output drop in the high frequency range.

■ Specific Examples of the Invention In the following, specific examples that have not yet been invented will be shown, and the present invention 5 will be explained in more detail. A thin film of a magnetic alloy was formed to a thickness of 30 μm.

Separately, the total thickness of the magnetic layer was kept at 30 gm, and 2QOA thick S was placed on 1/3 of the magnetic layer.
iS102 (117=1500/mm), BK7 glass ()lv=605Kg/mm'), KF2 glass (Hv
= 480 K g / mnf) A 1203 (
An intermediate layer consisting of Hv=500Kg/mm'') was interposed.

Further, a layer was produced in which the intermediate layer was changed to M n O2 having an Hv of less than 400 Kg/mrn'.

The thin film was formed by sputtering.

In this case, a target with a corresponding composition was used, and RF magnetron sputtering was performed at an operating argon pressure of 6 and an input power of 4 W/cm'.

This is then ground and polished to form a core half 1.1' as shown in FIGS. 1 and 2).
They were brought together via a 3gm front gap material 5i02, and a predetermined winding 8 was applied to produce a magnetic head. Note that the azimuth angle was 6°.

Next, each magnetic head was mounted on an 8 mm video deck, and the following measurements 1) and 2) were performed.

l) Amount of wear: At 25°C and 50% RH, apply 3 coated metal tape.
, 75 m/see for 200 hours, and the amount of wear after running was measured using a surface roughness meter.

? ) Storage property After storage for 240 hours at 40°C and relative humidity of 90-95%, the self-recording/reproducing output was measured using a coated metal tape with a coercive force of 15,000e, and the output drop (dB) was measured. .

The results are shown in Table 1.

19 From the results shown in Table 1, the effects of the present invention are clear.

[Brief explanation of the drawing]

1 and 2 show one example of the structure of the magnetic head of the present invention.
1 is a perspective view, and FIG. 2 is an enlarged partial front view. 1.1'...Core half 2.2'...Substrate 3.3'...Amorphous magnetic alloy thin film and Laminated product with non-magnetic intermediate layer Applicant Tokyo Denki Kagaku Kogyo Co., Ltd. Representative Patent attorney Yo Ishii −

Claims (1)

[Claims] (2) A laminate formed by laminating a plurality of amorphous magnetic alloy thin films represented by the following formula with a non-magnetic intermediate layer interposed therebetween is provided on the base 2 to form an intermediate layer. Vickers hardness of material is 400
~2000Kg/mrn'. Formula (in the above formula, T is Co, or Co and Co and Zr
X represents a combination of Zr or one of Zr and another vitrification element.
- represents a combination with x+y=100at%, where y is 5 to 35at%. )2. The magnetic head according to claim 1, having a Vickers hardness of 400 to 1500 Kg/mm'. 3. The magnetic head according to claim 1 or 2, wherein the intermediate layer has a thickness of 30 to 100 OA. 4. Claim 1, wherein the thickness of the laminate is 0.1 to 1100K. The magnetic head according to any one of g'i to 3.