JPS59132187A - Method of producing ceramic circuit board - Google Patents

Method of producing ceramic circuit board

Info

Publication number
JPS59132187A
JPS59132187A JP612883A JP612883A JPS59132187A JP S59132187 A JPS59132187 A JP S59132187A JP 612883 A JP612883 A JP 612883A JP 612883 A JP612883 A JP 612883A JP S59132187 A JPS59132187 A JP S59132187A
Authority
JP
Japan
Prior art keywords
powder
weight
parts
circuit board
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP612883A
Other languages
Japanese (ja)
Inventor
堀部 芳幸
宮 好宏
守 上村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP612883A priority Critical patent/JPS59132187A/en
Publication of JPS59132187A publication Critical patent/JPS59132187A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明はセラミック配線板の製造方法に関する。[Detailed description of the invention] The present invention relates to a method of manufacturing a ceramic wiring board.

セラミック配線板には、一般にアルミナ基板が用いられ
、導体を形成するため導体ペースト・、として金ペース
ト、銀−パラジウム、金−白金ペースト等が用いられて
いる。しかし、このような市販されているペーストを用
いて導体を形成すると、その導体層の接着強度は、アル
ミナ純度96チのアルミナ基板(以下96%アルミナ基
板という)を使用した場合、1.0〜1.5にμ−′を
有するが、アルミナ含有率99.5%のアルミナ基板(
以下99.5%アルミナ基板という)やSiC基板を使
用すると接着強度が弱く、良好な回路が形成できない。
Ceramic wiring boards generally use an alumina substrate, and conductor pastes such as gold paste, silver-palladium, and gold-platinum paste are used to form conductors. However, when a conductor is formed using such a commercially available paste, the adhesive strength of the conductor layer is 1.0 to 1.0 when an alumina substrate with an alumina purity of 96% (hereinafter referred to as 96% alumina substrate) is used. An alumina substrate with an alumina content of 99.5% (
If a 99.5% alumina substrate (hereinafter referred to as a 99.5% alumina substrate) or a SiC substrate is used, the adhesive strength is weak and a good circuit cannot be formed.

また、耐半田性、ボンディング性の面でも満足すべきも
のではない。
Furthermore, the solder resistance and bonding properties are also unsatisfactory.

本発明は、これらの欠点のないセラミック配線板を提供
することを目的とするものである。
The object of the present invention is to provide a ceramic wiring board that does not have these drawbacks.

本発明は、セラミック基板上に貴金属粉100重量部に
Cu粉とMn粉との混合粉1〜4重量部。
In the present invention, 1 to 4 parts by weight of a mixed powder of Cu powder and Mn powder is placed on a ceramic substrate in 100 parts by weight of noble metal powder.

結合剤及び溶剤を添加混合してなる導体ペーストを、印
刷し、ついで焼成するセラミック配線板の製造方法に関
する。
The present invention relates to a method for manufacturing a ceramic wiring board, in which a conductive paste made by adding and mixing a binder and a solvent is printed and then fired.

なお本発明において貴金属粉としては、金粉。In the present invention, the noble metal powder is gold powder.

銀−パラジウム粉、金−白金粉等が使用され特に制限は
ない。
Silver-palladium powder, gold-platinum powder, etc. are used, and there are no particular limitations.

Cu粉とMn粉との配合割合については特に制限はない
がCu粉50〜70重量%に対しMn粉50〜30重量
%配合することが好ましい。Cu粉とMn粉とは必ず混
合粉を使用しなければならず。
Although there is no particular restriction on the mixing ratio of Cu powder and Mn powder, it is preferable to mix 50 to 30% by weight of Mn powder to 50 to 70% by weight of Cu powder. A mixed powder of Cu powder and Mn powder must be used.

Cu粉単粉では焼成温度を高くしなければならず。When using a single Cu powder, the firing temperature must be increased.

Mn粉単粉では接着強度が弱い。Cu粉とMn粉との混
合粉は、貴金属粉100重量部に対し1〜4重量部添加
することが必要であり、1重量部未満では接着強度が弱
く、4重量部を越えると導体回路に比抵抗が急増し、導
体としての性能が低下し9本発明の目的を達成できない
Single powder Mn powder has weak adhesive strength. It is necessary to add 1 to 4 parts by weight of the mixed powder of Cu powder and Mn powder to 100 parts by weight of the precious metal powder. If it is less than 1 part by weight, the adhesive strength will be weak, and if it exceeds 4 parts by weight, it will not form in the conductor circuit. The resistivity increases rapidly, the performance as a conductor deteriorates, and the object of the present invention cannot be achieved.

また本発明において結合剤としては、エチルセルロース
、ニトロセルロース、アクリル樹脂。
In the present invention, binders include ethyl cellulose, nitrocellulose, and acrylic resin.

エポキシ樹脂等が、溶剤としては、テルピネオール、カ
ルピトールアセテート等が使用されるが、これらの配合
量については特に制限はない。
Terpineol, carpitol acetate, etc. are used as the solvent for the epoxy resin, but there are no particular restrictions on the amount of these.

本発明の導体ペーストには上記の他に必要に応じて、ホ
ウケイ酸鉛ガラス、ホウケイ酸バリウム等のガラス質成
分が添加される。
In addition to the above, glassy components such as lead borosilicate glass and barium borosilicate may be added to the conductor paste of the present invention, if necessary.

更に本発明において、セラミック基板には。Furthermore, in the present invention, the ceramic substrate includes:

特に制限はないが、99.5%アルミナ基板、SiC等
の非酸化物系の基板に対して特に有効である。
Although there are no particular limitations, it is particularly effective for non-oxide based substrates such as 99.5% alumina substrates and SiC.

以下実施例により本発明を説明する。The present invention will be explained below with reference to Examples.

実施例I Au粉100重量部に第1表に示す量のCu粉とMn粉
との混合粉(Cu粉6o重量%、Mn粉40重量%)。
Example I A mixed powder of 100 parts by weight of Au powder and Cu powder and Mn powder in the amounts shown in Table 1 (Cu powder: 60% by weight, Mn powder: 40% by weight).

さらに結合剤としてエチルセルロース6重量部。Furthermore, 6 parts by weight of ethyl cellulose was used as a binder.

溶剤としてテルピネオール40重量部及びポウケイ酸鉛
ガラス20重量部を添加して、らいかい機にて均一に混
合してペースト化して導体ペーストを得た。
40 parts by weight of terpineol and 20 parts by weight of lead porosilicate glass were added as a solvent, and the mixture was uniformly mixed in a sieve machine to form a paste to obtain a conductor paste.

次に、96チアルミナ基板、99.5%アルミナ基板及
びSiC基板上に前記で得た導体ペーストをスクリーン
印刷し、ついで850’Cで焼成した後。
Next, the conductive paste obtained above was screen printed on a 96% alumina substrate, a 99.5% alumina substrate, and a SiC substrate, and then fired at 850'C.

所定の金属を半田付して接着強度試験7行なった。Seven adhesive strength tests were conducted by soldering predetermined metals.

その試験結果も合わせて第1表に示す。The test results are also shown in Table 1.

実施例2 銀−パラジウム粉100重量部に第2表に示す量のCu
粉とMn粉との混合粉(Cu粉60重量%。
Example 2 Adding Cu in the amount shown in Table 2 to 100 parts by weight of silver-palladium powder
Mixed powder of powder and Mn powder (Cu powder 60% by weight.

Mn粉40重量%)、以下実施例1と同様の配合及び同
様の方法にて導体ペーストを得た。その後実施例1と同
様の方法にて接着強度試験を行なった。
(Mn powder 40% by weight), a conductor paste was obtained using the same formulation and method as in Example 1. Thereafter, an adhesive strength test was conducted in the same manner as in Example 1.

その試験結果を第2表に示す。The test results are shown in Table 2.

以下余白 実施例3 金−白金粉100重量部に第3表に示す量のCu粉とM
n粉との混合粉(Cu粉60重量%、Mn粉40重量%
)、以下実施例1と同様の配合及び同様の方法にて導体
ペーストを得た。その後実施例1と同様の方法にて接着
強度試験を行なった。その試験結果を第3表に示す。
Below is a margin Example 3 100 parts by weight of gold-platinum powder, Cu powder and M in the amount shown in Table 3
Mixed powder with n powder (Cu powder 60% by weight, Mn powder 40% by weight
), a conductor paste was obtained using the same formulation and method as in Example 1. Thereafter, an adhesive strength test was conducted in the same manner as in Example 1. The test results are shown in Table 3.

第1表、第2表及び第3表かられかるように本発明の実
施例になる導体ペーストを用いることにより、99.5
%アルミナ基板及びSiC基板に対しても、96チアル
ミナ基板に対する接着強度1.0〜1.5 Ky/lr
m’が得られ、良好なセラミック配線板を製造すること
ができる。
As shown in Tables 1, 2, and 3, by using the conductive paste of the embodiment of the present invention, 99.5%
Adhesion strength to 96% alumina substrate and SiC substrate is 1.0 to 1.5 Ky/lr.
m' can be obtained, and a good ceramic wiring board can be manufactured.

本発明はセラミック基板上に、貴金属粉100重量部に
Cu粉とMn粉との混合粉1〜4重量部。
The present invention uses 100 parts by weight of noble metal powder and 1 to 4 parts by weight of a mixed powder of Cu powder and Mn powder on a ceramic substrate.

結合剤及び溶剤を添加混合してなる導体ペーストを印刷
し、ついで焼成するので、99.5%アルミナ基板及び
SiC基板に対しても1.0〜1. s Kg/rra
n’の接着強度を有し、耐半田性、ポンディング性にお
いても満足すべきセラミック配線板が製造できる。
Since a conductive paste made by adding and mixing a binder and a solvent is printed and then fired, the conductive paste is 1.0 to 1.0% even for 99.5% alumina substrates and SiC substrates. s Kg/rra
A ceramic wiring board having an adhesive strength of n' and satisfactory solder resistance and bonding properties can be manufactured.

Claims (1)

【特許請求の範囲】 1、 セラミック基板上に、貴金属粉100重量部にC
u粉とMn粉との混合粉1〜4重量部。 結合剤及び溶剤を添加混合してなる導体ペーストを、印
刷し、ついで焼成すること゛を特徴とするセラミック配
線板の製造方法。
[Claims] 1. On a ceramic substrate, 100 parts by weight of noble metal powder is coated with C.
1 to 4 parts by weight of mixed powder of U powder and Mn powder. A method for manufacturing a ceramic wiring board, characterized by printing a conductive paste made by adding and mixing a binder and a solvent, and then firing it.
JP612883A 1983-01-18 1983-01-18 Method of producing ceramic circuit board Pending JPS59132187A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP612883A JPS59132187A (en) 1983-01-18 1983-01-18 Method of producing ceramic circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP612883A JPS59132187A (en) 1983-01-18 1983-01-18 Method of producing ceramic circuit board

Publications (1)

Publication Number Publication Date
JPS59132187A true JPS59132187A (en) 1984-07-30

Family

ID=11629862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP612883A Pending JPS59132187A (en) 1983-01-18 1983-01-18 Method of producing ceramic circuit board

Country Status (1)

Country Link
JP (1) JPS59132187A (en)

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