JPS59130057A - 気体吸蔵形活性合金生成型複合陰極スパッタイオンポンプ - Google Patents
気体吸蔵形活性合金生成型複合陰極スパッタイオンポンプInfo
- Publication number
- JPS59130057A JPS59130057A JP529183A JP529183A JPS59130057A JP S59130057 A JPS59130057 A JP S59130057A JP 529183 A JP529183 A JP 529183A JP 529183 A JP529183 A JP 529183A JP S59130057 A JPS59130057 A JP S59130057A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- cathodes
- ion pump
- zirconium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 15
- 239000000956 alloy Substances 0.000 title claims abstract description 15
- 150000001875 compounds Chemical class 0.000 title description 4
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 11
- 230000000694 effects Effects 0.000 claims abstract description 7
- 239000007769 metal material Substances 0.000 claims abstract description 7
- 108010083687 Ion Pumps Proteins 0.000 claims description 37
- 239000002131 composite material Substances 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052782 aluminium Inorganic materials 0.000 abstract description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052726 zirconium Inorganic materials 0.000 abstract description 12
- 238000004544 sputter deposition Methods 0.000 abstract description 9
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 abstract description 3
- 150000001768 cations Chemical class 0.000 abstract 3
- 230000001955 cumulated effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 46
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 32
- 238000005086 pumping Methods 0.000 description 19
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 16
- 229910052786 argon Inorganic materials 0.000 description 16
- 229910052719 titanium Inorganic materials 0.000 description 14
- 239000010936 titanium Substances 0.000 description 14
- 239000001257 hydrogen Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 9
- 102000006391 Ion Pumps Human genes 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 229910002056 binary alloy Inorganic materials 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000010849 ion bombardment Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003446 memory effect Effects 0.000 description 3
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 2
- 229910052776 Thorium Inorganic materials 0.000 description 2
- 238000001994 activation Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 150000004044 tetrasaccharides Chemical class 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP529183A JPS59130057A (ja) | 1983-01-18 | 1983-01-18 | 気体吸蔵形活性合金生成型複合陰極スパッタイオンポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP529183A JPS59130057A (ja) | 1983-01-18 | 1983-01-18 | 気体吸蔵形活性合金生成型複合陰極スパッタイオンポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59130057A true JPS59130057A (ja) | 1984-07-26 |
| JPS647459B2 JPS647459B2 (enExample) | 1989-02-08 |
Family
ID=11607133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP529183A Granted JPS59130057A (ja) | 1983-01-18 | 1983-01-18 | 気体吸蔵形活性合金生成型複合陰極スパッタイオンポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59130057A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011060430A (ja) * | 2009-09-04 | 2011-03-24 | Sanyu Electron Co Ltd | イオン化スパッタ真空ポンプ |
-
1983
- 1983-01-18 JP JP529183A patent/JPS59130057A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011060430A (ja) * | 2009-09-04 | 2011-03-24 | Sanyu Electron Co Ltd | イオン化スパッタ真空ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS647459B2 (enExample) | 1989-02-08 |
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