JPS59121174A - 脆性材料の複合加工法 - Google Patents

脆性材料の複合加工法

Info

Publication number
JPS59121174A
JPS59121174A JP23292082A JP23292082A JPS59121174A JP S59121174 A JPS59121174 A JP S59121174A JP 23292082 A JP23292082 A JP 23292082A JP 23292082 A JP23292082 A JP 23292082A JP S59121174 A JPS59121174 A JP S59121174A
Authority
JP
Japan
Prior art keywords
etching
processing
workpiece
laser beam
composite processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23292082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154755B2 (enExample
Inventor
政弘 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP23292082A priority Critical patent/JPS59121174A/ja
Publication of JPS59121174A publication Critical patent/JPS59121174A/ja
Publication of JPS6154755B2 publication Critical patent/JPS6154755B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP23292082A 1982-12-24 1982-12-24 脆性材料の複合加工法 Granted JPS59121174A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23292082A JPS59121174A (ja) 1982-12-24 1982-12-24 脆性材料の複合加工法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23292082A JPS59121174A (ja) 1982-12-24 1982-12-24 脆性材料の複合加工法

Publications (2)

Publication Number Publication Date
JPS59121174A true JPS59121174A (ja) 1984-07-13
JPS6154755B2 JPS6154755B2 (enExample) 1986-11-25

Family

ID=16946902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23292082A Granted JPS59121174A (ja) 1982-12-24 1982-12-24 脆性材料の複合加工法

Country Status (1)

Country Link
JP (1) JPS59121174A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6060995A (ja) * 1983-09-09 1985-04-08 日本電信電話株式会社 セラミツクステンシルの製造方法およびその装置
JPS61238986A (ja) * 1985-04-17 1986-10-24 Nec Corp レ−ザ加工装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0733255U (ja) * 1993-11-30 1995-06-20 株式会社東陽鉄工 切断用ナイフ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6060995A (ja) * 1983-09-09 1985-04-08 日本電信電話株式会社 セラミツクステンシルの製造方法およびその装置
JPS61238986A (ja) * 1985-04-17 1986-10-24 Nec Corp レ−ザ加工装置

Also Published As

Publication number Publication date
JPS6154755B2 (enExample) 1986-11-25

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