JPS59119835A - 電子ビ−ム露光方法 - Google Patents

電子ビ−ム露光方法

Info

Publication number
JPS59119835A
JPS59119835A JP57228362A JP22836282A JPS59119835A JP S59119835 A JPS59119835 A JP S59119835A JP 57228362 A JP57228362 A JP 57228362A JP 22836282 A JP22836282 A JP 22836282A JP S59119835 A JPS59119835 A JP S59119835A
Authority
JP
Japan
Prior art keywords
pattern
electron beam
turn
sample points
chisel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57228362A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336296B2 (enExample
Inventor
Yasuhide Machida
町田　泰秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57228362A priority Critical patent/JPS59119835A/ja
Publication of JPS59119835A publication Critical patent/JPS59119835A/ja
Publication of JPH0336296B2 publication Critical patent/JPH0336296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP57228362A 1982-12-27 1982-12-27 電子ビ−ム露光方法 Granted JPS59119835A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57228362A JPS59119835A (ja) 1982-12-27 1982-12-27 電子ビ−ム露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57228362A JPS59119835A (ja) 1982-12-27 1982-12-27 電子ビ−ム露光方法

Publications (2)

Publication Number Publication Date
JPS59119835A true JPS59119835A (ja) 1984-07-11
JPH0336296B2 JPH0336296B2 (enExample) 1991-05-31

Family

ID=16875265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57228362A Granted JPS59119835A (ja) 1982-12-27 1982-12-27 電子ビ−ム露光方法

Country Status (1)

Country Link
JP (1) JPS59119835A (enExample)

Also Published As

Publication number Publication date
JPH0336296B2 (enExample) 1991-05-31

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