JPS59119661A - 電子顕微鏡における電子線偏向方法 - Google Patents

電子顕微鏡における電子線偏向方法

Info

Publication number
JPS59119661A
JPS59119661A JP57230542A JP23054282A JPS59119661A JP S59119661 A JPS59119661 A JP S59119661A JP 57230542 A JP57230542 A JP 57230542A JP 23054282 A JP23054282 A JP 23054282A JP S59119661 A JPS59119661 A JP S59119661A
Authority
JP
Japan
Prior art keywords
deflection
electron beams
electron beam
sample
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57230542A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6363109B2 (cg-RX-API-DMAC7.html
Inventor
Toshikazu Honda
本田　敏和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57230542A priority Critical patent/JPS59119661A/ja
Publication of JPS59119661A publication Critical patent/JPS59119661A/ja
Publication of JPS6363109B2 publication Critical patent/JPS6363109B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57230542A 1982-12-27 1982-12-27 電子顕微鏡における電子線偏向方法 Granted JPS59119661A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57230542A JPS59119661A (ja) 1982-12-27 1982-12-27 電子顕微鏡における電子線偏向方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57230542A JPS59119661A (ja) 1982-12-27 1982-12-27 電子顕微鏡における電子線偏向方法

Publications (2)

Publication Number Publication Date
JPS59119661A true JPS59119661A (ja) 1984-07-10
JPS6363109B2 JPS6363109B2 (cg-RX-API-DMAC7.html) 1988-12-06

Family

ID=16909383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57230542A Granted JPS59119661A (ja) 1982-12-27 1982-12-27 電子顕微鏡における電子線偏向方法

Country Status (1)

Country Link
JP (1) JPS59119661A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011181393A (ja) * 2010-03-02 2011-09-15 Hitachi High-Technologies Corp 荷電粒子線装置及び荷電粒子線を用いた測長方法
JP2014170751A (ja) * 2014-03-07 2014-09-18 Hitachi High-Technologies Corp 荷電粒子線装置及び荷電粒子線を用いた測長方法
JP2017054606A (ja) * 2015-09-07 2017-03-16 日本電子株式会社 荷電粒子装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011181393A (ja) * 2010-03-02 2011-09-15 Hitachi High-Technologies Corp 荷電粒子線装置及び荷電粒子線を用いた測長方法
JP2014170751A (ja) * 2014-03-07 2014-09-18 Hitachi High-Technologies Corp 荷電粒子線装置及び荷電粒子線を用いた測長方法
JP2017054606A (ja) * 2015-09-07 2017-03-16 日本電子株式会社 荷電粒子装置

Also Published As

Publication number Publication date
JPS6363109B2 (cg-RX-API-DMAC7.html) 1988-12-06

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