JPS59119253A - ガス感応体素子 - Google Patents

ガス感応体素子

Info

Publication number
JPS59119253A
JPS59119253A JP23435082A JP23435082A JPS59119253A JP S59119253 A JPS59119253 A JP S59119253A JP 23435082 A JP23435082 A JP 23435082A JP 23435082 A JP23435082 A JP 23435082A JP S59119253 A JPS59119253 A JP S59119253A
Authority
JP
Japan
Prior art keywords
pore diameter
gas sensitive
gas
pore size
size parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23435082A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0221743B2 (enExample
Inventor
Toshitaka Matsuura
松浦 利孝
Shigeru Miyata
繁 宮田
Teppei Okawa
哲平 大川
Akio Takami
高見 昭雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Tokushu Togyo KK
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Nippon Tokushu Togyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd, Nippon Tokushu Togyo KK filed Critical NGK Spark Plug Co Ltd
Priority to JP23435082A priority Critical patent/JPS59119253A/ja
Publication of JPS59119253A publication Critical patent/JPS59119253A/ja
Publication of JPH0221743B2 publication Critical patent/JPH0221743B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP23435082A 1982-12-25 1982-12-25 ガス感応体素子 Granted JPS59119253A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23435082A JPS59119253A (ja) 1982-12-25 1982-12-25 ガス感応体素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23435082A JPS59119253A (ja) 1982-12-25 1982-12-25 ガス感応体素子

Publications (2)

Publication Number Publication Date
JPS59119253A true JPS59119253A (ja) 1984-07-10
JPH0221743B2 JPH0221743B2 (enExample) 1990-05-16

Family

ID=16969615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23435082A Granted JPS59119253A (ja) 1982-12-25 1982-12-25 ガス感応体素子

Country Status (1)

Country Link
JP (1) JPS59119253A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003019168A1 (fr) * 2001-08-27 2003-03-06 Uchiya Thermostat Co., Ltd. Capteur de gaz mos
JP2006258422A (ja) * 2005-03-15 2006-09-28 Fuji Electric Fa Components & Systems Co Ltd 薄膜ガスセンサ
JP2006275950A (ja) * 2005-03-30 2006-10-12 New Cosmos Electric Corp 半導体式ガス検知素子及びその製造方法
WO2007098774A1 (de) * 2006-02-22 2007-09-07 Testo Ag Gassensor und verfahren zu dessen herstellung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5796501A (en) * 1980-12-09 1982-06-15 Ngk Spark Plug Co Moisture sensitive resistance element
JPS59159062A (ja) * 1983-03-01 1984-09-08 Sumitomo Alum Smelt Co Ltd 感湿素子用感湿体の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5796501A (en) * 1980-12-09 1982-06-15 Ngk Spark Plug Co Moisture sensitive resistance element
JPS59159062A (ja) * 1983-03-01 1984-09-08 Sumitomo Alum Smelt Co Ltd 感湿素子用感湿体の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003019168A1 (fr) * 2001-08-27 2003-03-06 Uchiya Thermostat Co., Ltd. Capteur de gaz mos
JP2006258422A (ja) * 2005-03-15 2006-09-28 Fuji Electric Fa Components & Systems Co Ltd 薄膜ガスセンサ
JP2006275950A (ja) * 2005-03-30 2006-10-12 New Cosmos Electric Corp 半導体式ガス検知素子及びその製造方法
WO2007098774A1 (de) * 2006-02-22 2007-09-07 Testo Ag Gassensor und verfahren zu dessen herstellung
US8079256B2 (en) 2006-02-22 2011-12-20 Testo Ag Gas sensor and method for its production

Also Published As

Publication number Publication date
JPH0221743B2 (enExample) 1990-05-16

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