JPH0221743B2 - - Google Patents

Info

Publication number
JPH0221743B2
JPH0221743B2 JP57234350A JP23435082A JPH0221743B2 JP H0221743 B2 JPH0221743 B2 JP H0221743B2 JP 57234350 A JP57234350 A JP 57234350A JP 23435082 A JP23435082 A JP 23435082A JP H0221743 B2 JPH0221743 B2 JP H0221743B2
Authority
JP
Japan
Prior art keywords
pore diameter
pores
gas sensitive
gas
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57234350A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59119253A (ja
Inventor
Toshitaka Matsura
Shigeru Myata
Tetsupei Ookawa
Akio Takami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP23435082A priority Critical patent/JPS59119253A/ja
Publication of JPS59119253A publication Critical patent/JPS59119253A/ja
Publication of JPH0221743B2 publication Critical patent/JPH0221743B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP23435082A 1982-12-25 1982-12-25 ガス感応体素子 Granted JPS59119253A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23435082A JPS59119253A (ja) 1982-12-25 1982-12-25 ガス感応体素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23435082A JPS59119253A (ja) 1982-12-25 1982-12-25 ガス感応体素子

Publications (2)

Publication Number Publication Date
JPS59119253A JPS59119253A (ja) 1984-07-10
JPH0221743B2 true JPH0221743B2 (enExample) 1990-05-16

Family

ID=16969615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23435082A Granted JPS59119253A (ja) 1982-12-25 1982-12-25 ガス感応体素子

Country Status (1)

Country Link
JP (1) JPS59119253A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4659295B2 (ja) * 2001-08-27 2011-03-30 ウチヤ・サーモスタット株式会社 金属酸化物半導体ガスセンサ
JP4641832B2 (ja) * 2005-03-15 2011-03-02 富士電機システムズ株式会社 薄膜ガスセンサ
JP4870938B2 (ja) * 2005-03-30 2012-02-08 新コスモス電機株式会社 半導体式ガス検知素子の製造方法
US8079256B2 (en) 2006-02-22 2011-12-20 Testo Ag Gas sensor and method for its production

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5796501A (en) * 1980-12-09 1982-06-15 Ngk Spark Plug Co Moisture sensitive resistance element
JPS59159062A (ja) * 1983-03-01 1984-09-08 Sumitomo Alum Smelt Co Ltd 感湿素子用感湿体の製造方法

Also Published As

Publication number Publication date
JPS59119253A (ja) 1984-07-10

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