JPS59119034U - 半導体ペレツト外観検査装置 - Google Patents
半導体ペレツト外観検査装置Info
- Publication number
- JPS59119034U JPS59119034U JP1168783U JP1168783U JPS59119034U JP S59119034 U JPS59119034 U JP S59119034U JP 1168783 U JP1168783 U JP 1168783U JP 1168783 U JP1168783 U JP 1168783U JP S59119034 U JPS59119034 U JP S59119034U
- Authority
- JP
- Japan
- Prior art keywords
- inspection
- movable table
- block
- image processing
- pellet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 title claims description 12
- 239000008188 pellet Substances 0.000 title claims description 9
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000002950 deficient Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1168783U JPS59119034U (ja) | 1983-01-28 | 1983-01-28 | 半導体ペレツト外観検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1168783U JPS59119034U (ja) | 1983-01-28 | 1983-01-28 | 半導体ペレツト外観検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59119034U true JPS59119034U (ja) | 1984-08-11 |
| JPS6311724Y2 JPS6311724Y2 (cg-RX-API-DMAC7.html) | 1988-04-05 |
Family
ID=30143113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1168783U Granted JPS59119034U (ja) | 1983-01-28 | 1983-01-28 | 半導体ペレツト外観検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59119034U (cg-RX-API-DMAC7.html) |
-
1983
- 1983-01-28 JP JP1168783U patent/JPS59119034U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6311724Y2 (cg-RX-API-DMAC7.html) | 1988-04-05 |
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