JPS59115533A - ワイヤボンデイング装置 - Google Patents
ワイヤボンデイング装置Info
- Publication number
- JPS59115533A JPS59115533A JP57224023A JP22402382A JPS59115533A JP S59115533 A JPS59115533 A JP S59115533A JP 57224023 A JP57224023 A JP 57224023A JP 22402382 A JP22402382 A JP 22402382A JP S59115533 A JPS59115533 A JP S59115533A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- bonding
- spool
- tool
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 65
- 230000002159 abnormal effect Effects 0.000 claims description 2
- 238000007664 blowing Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract 1
- 230000005856 abnormality Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 239000008188 pellet Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 239000012212 insulator Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78313—Wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/786—Means for supplying the connector to be connected in the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/851—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57224023A JPS59115533A (ja) | 1982-12-22 | 1982-12-22 | ワイヤボンデイング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57224023A JPS59115533A (ja) | 1982-12-22 | 1982-12-22 | ワイヤボンデイング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59115533A true JPS59115533A (ja) | 1984-07-04 |
JPH0148656B2 JPH0148656B2 (enrdf_load_stackoverflow) | 1989-10-20 |
Family
ID=16807371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57224023A Granted JPS59115533A (ja) | 1982-12-22 | 1982-12-22 | ワイヤボンデイング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59115533A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60109239A (ja) * | 1983-11-18 | 1985-06-14 | Hitachi Tokyo Electronics Co Ltd | 断線検出方法 |
JPH02122637A (ja) * | 1988-11-01 | 1990-05-10 | Shinkawa Ltd | ワイヤボンデイング装置 |
JP2007150365A (ja) * | 2007-03-09 | 2007-06-14 | Matsushita Electric Ind Co Ltd | バンプボンディング装置 |
-
1982
- 1982-12-22 JP JP57224023A patent/JPS59115533A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60109239A (ja) * | 1983-11-18 | 1985-06-14 | Hitachi Tokyo Electronics Co Ltd | 断線検出方法 |
JPH02122637A (ja) * | 1988-11-01 | 1990-05-10 | Shinkawa Ltd | ワイヤボンデイング装置 |
JP2007150365A (ja) * | 2007-03-09 | 2007-06-14 | Matsushita Electric Ind Co Ltd | バンプボンディング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0148656B2 (enrdf_load_stackoverflow) | 1989-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4213556A (en) | Method and apparatus to detect automatic wire bonder failure | |
CN100365785C (zh) | 用于夹住引线的引线焊接设备和方法 | |
US5058797A (en) | Detection method for wire bonding failures | |
JPH07106365A (ja) | ワイヤボンダのワイヤ尾部長さを監視する装置および方法 | |
US5468927A (en) | Wire bonding apparatus | |
US3934108A (en) | Lead bonding method and apparatus | |
JPS59115533A (ja) | ワイヤボンデイング装置 | |
JPH088271B2 (ja) | ワイヤボンデイング装置 | |
JPH02222158A (ja) | 動的チツプ・バーン・イン可能なテープ構造 | |
US6189765B1 (en) | Apparatus and method for detecting double wire bonding | |
JP2005251919A (ja) | バンプボンディング装置及びバンプ不着検出方法 | |
KR100273694B1 (ko) | 반도체패키지용와이어본딩기의와이어본딩감지방법및그장치 | |
KR100526060B1 (ko) | 자기 복구형 와이어 본딩 장치 및 그를 이용한 자동 볼형성 방법 | |
JP2722886B2 (ja) | ワイヤボンディング装置 | |
JP3651253B2 (ja) | ワイヤーのプーリーからの外れを検出する機構 | |
JP2000012602A (ja) | ボンディングワイヤ不良検出装置および検出方法 | |
JPS6113377B2 (enrdf_load_stackoverflow) | ||
JPS60245140A (ja) | ワイヤボンデイング方法および装置 | |
JP3908640B2 (ja) | ワイヤボンディング方法及び装置 | |
JP2500642B2 (ja) | ワイヤボンディング装置及びワイヤボンディング方法 | |
JPS62104126A (ja) | ワイヤボンデイング方法 | |
JPH0122127Y2 (enrdf_load_stackoverflow) | ||
JPH1074789A (ja) | ボンディング装置の荷重異常検出装置 | |
JP2890897B2 (ja) | ワイヤボンディング装置 | |
JPH0276629A (ja) | ワイヤ放電加工装置 |