JPS59114412A - 磁気抵抗素子を具える磁気検出器 - Google Patents
磁気抵抗素子を具える磁気検出器Info
- Publication number
- JPS59114412A JPS59114412A JP57224120A JP22412082A JPS59114412A JP S59114412 A JPS59114412 A JP S59114412A JP 57224120 A JP57224120 A JP 57224120A JP 22412082 A JP22412082 A JP 22412082A JP S59114412 A JPS59114412 A JP S59114412A
- Authority
- JP
- Japan
- Prior art keywords
- magnetoresistive
- magneto
- film
- elements
- magnetoresistive elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000000059 patterning Methods 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 abstract description 7
- 238000009413 insulation Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 16
- 239000004020 conductor Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 229910002555 FeNi Inorganic materials 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical group 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analogue/Digital Conversion (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57224120A JPS59114412A (ja) | 1982-12-21 | 1982-12-21 | 磁気抵抗素子を具える磁気検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57224120A JPS59114412A (ja) | 1982-12-21 | 1982-12-21 | 磁気抵抗素子を具える磁気検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59114412A true JPS59114412A (ja) | 1984-07-02 |
| JPH0130410B2 JPH0130410B2 (enrdf_load_stackoverflow) | 1989-06-20 |
Family
ID=16808848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57224120A Granted JPS59114412A (ja) | 1982-12-21 | 1982-12-21 | 磁気抵抗素子を具える磁気検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59114412A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186614A (ja) * | 1984-09-29 | 1986-05-02 | ローベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 磁気抵抗差動センサ装置 |
| JP2010060341A (ja) * | 2008-09-02 | 2010-03-18 | Murata Mfg Co Ltd | 磁気センサ |
| EP2409872A1 (en) | 2010-07-20 | 2012-01-25 | Honda Motor Co., Ltd. | Shutter unit for vehicle |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133117U (enrdf_load_stackoverflow) * | 1974-04-16 | 1975-11-01 | ||
| JPS5337204A (en) * | 1976-06-11 | 1978-04-06 | Babcock & Wilcox Ltd | Boiler for use in ship |
-
1982
- 1982-12-21 JP JP57224120A patent/JPS59114412A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133117U (enrdf_load_stackoverflow) * | 1974-04-16 | 1975-11-01 | ||
| JPS5337204A (en) * | 1976-06-11 | 1978-04-06 | Babcock & Wilcox Ltd | Boiler for use in ship |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186614A (ja) * | 1984-09-29 | 1986-05-02 | ローベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 磁気抵抗差動センサ装置 |
| JP2010060341A (ja) * | 2008-09-02 | 2010-03-18 | Murata Mfg Co Ltd | 磁気センサ |
| EP2409872A1 (en) | 2010-07-20 | 2012-01-25 | Honda Motor Co., Ltd. | Shutter unit for vehicle |
| US8794360B2 (en) | 2010-07-20 | 2014-08-05 | Honda Motor Co., Ltd. | Shutter unit for vehicle |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0130410B2 (enrdf_load_stackoverflow) | 1989-06-20 |
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