JPS59112427A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS59112427A
JPS59112427A JP57222297A JP22229782A JPS59112427A JP S59112427 A JPS59112427 A JP S59112427A JP 57222297 A JP57222297 A JP 57222297A JP 22229782 A JP22229782 A JP 22229782A JP S59112427 A JPS59112427 A JP S59112427A
Authority
JP
Japan
Prior art keywords
magnetic
layer
recording medium
magnetic recording
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57222297A
Other languages
Japanese (ja)
Inventor
Kenji Yazawa
健児 矢沢
Hitoshi Kimura
均 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP57222297A priority Critical patent/JPS59112427A/en
Publication of JPS59112427A publication Critical patent/JPS59112427A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/73Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7369Two or more non-magnetic underlayers, e.g. seed layers or barrier layers

Landscapes

  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain a magnetic recording medium having high coercive force and square ratio with good productivity without using diagonal vapor deposition by providing the 1st underlying layer consisting essentially of Ti or Cr on a non- magnetic base and the 2nd underlying layer consisting of Bi thereon and further forming a thin magnetic metallic film thereon. CONSTITUTION:Ti or Cr or an alloy consisting essentially thereof and contg. Zr, Hf, etc. is formed as the 1st underlying layer on a non-magnetic base to 50- 100Angstrom thickness. The surface layer of the layer 2 is oxidized by using a bombarding electrode in an O2 atmosphere maintained under the reduced pressure. Bi is then deposited by evaporation to 10-1,000Angstrom thickness to form the 2nd underlying layer 3. The layer 3 is also subjected to the bombarding treatment. A thin magnetic metallic film 4 of an Ni-Co alloy, etc. is deposited by evaporation on the layer 3 whereby a magnetic recording medium is obtd. The medium has good adhesion strength of the base 1 and the layers 2-4, is free from exfoliation, etc., excells in a magnetic characteristic, mechanical strength, etc. and has a long still life.

Description

【発明の詳細な説明】 本発明は磁気記録媒体、特に非磁性支持体上に金属磁性
薄膜を被着形成した磁気記録媒体に係る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium, and particularly to a magnetic recording medium in which a metal magnetic thin film is deposited on a non-magnetic support.

従来一般の磁気記録媒体は、針状の磁性粉と高分子結合
剤を主体とする磁性塗料を非磁性支持体空蒸着、スパッ
タリング或いはイオンブレーティング等のいわゆるフィ
ジカルベーパーデポジション技術によって非磁性支持体
上に被着して金属磁性薄膜を形成するようにした金属薄
膜型磁気記録媒体が上述した塗布型の磁気記録媒体にお
けるよ・’5に非磁性の高分子結合剤が用いられていな
いことから高い残留磁束密度が得られ、またその磁性層
を極めて薄く形成することができることから、高出力且
つ短波長応答性に優れているという利点がある。
Conventionally, general magnetic recording media are made by applying a magnetic coating material mainly consisting of acicular magnetic powder and a polymeric binder to a non-magnetic support using a so-called physical vapor deposition technique such as air vapor deposition, sputtering, or ion blating. The metal thin film type magnetic recording medium, which is coated on top to form a metal magnetic thin film, is different from the above-mentioned coating type magnetic recording medium because a non-magnetic polymeric binder is not used. Since a high residual magnetic flux density can be obtained and the magnetic layer can be formed extremely thin, it has the advantage of high output and excellent short wavelength response.

しかしながら、この金属磁性薄膜の形成にあたりその磁
性金属例えばCoを単に非磁性支持体上に蒸着しただゆ
では大きな抗磁力を有する磁気記録媒体が得られない。
However, when forming this metal magnetic thin film, a magnetic recording medium having a large coercive force cannot be obtained by simply depositing the magnetic metal, such as Co, on a non-magnetic support.

このような金属磁性薄膜型の磁気記録媒体において、高
い抗磁力を得るためには、その磁性金属の蒸着にあたっ
てこれを斜め方向より蒸着する斜め蒸着法の適用が考え
られるが、この場合蒸着効率が低く生産性に劣るという
欠点がある。
In order to obtain high coercive force in such metal magnetic thin film type magnetic recording media, it is possible to apply an oblique deposition method in which the magnetic metal is deposited from an oblique direction, but in this case, the deposition efficiency is low. The disadvantage is that the productivity is low.

これに対し【このような斜め蒸着によらず、はぼ垂直蒸
着による方法が採られても充分高い抗磁力を示し、また
高い角型比を得ることのできる金属薄膜型磁気記録媒体
が本出願人によって先に提案された。この磁気記録媒体
は、非磁性支持体上に下地層としてBi薄膜を被着した
のち、これの上にCO等の金属磁性薄膜を蒸着等によっ
て被着形成するものである。
On the other hand, the present application proposes a metal thin film magnetic recording medium that exhibits sufficiently high coercive force and can obtain a high squareness ratio even when a method using almost perpendicular evaporation is adopted instead of using oblique evaporation. It was first suggested by someone. In this magnetic recording medium, a Bi thin film is deposited as an underlayer on a non-magnetic support, and then a magnetic thin film of metal such as CO is deposited thereon by vapor deposition or the like.

本発明は、この種金属薄膜磁気記録媒体において更にそ
の耐久性の向上を図らんとするものである。すなわち本
発明においては、第1図に示すように非磁性支持体(1
)上に、第1の下地層として特に酸素に対して親和力の
高いTiまたはCrを主体とする下地層(2)を被着し
、これの上に上述したBiの第2の下地層を介して金属
磁性薄膜例えば蒸着によるCo或いはCo−Ni合金等
の金属・磁性薄膜(4)を形成する。
The present invention aims to further improve the durability of this type of metal thin film magnetic recording medium. That is, in the present invention, as shown in FIG.
), a base layer (2) mainly made of Ti or Cr, which has a particularly high affinity for oxygen, is deposited as a first base layer, and on top of this, the second base layer of Bi mentioned above is applied. A metal magnetic thin film (4) such as Co or Co--Ni alloy is formed by vapor deposition.

非磁性支持体(1)は、例えばポリエチレンテレフクレ
ート、ポリアミド、ポリアミドイミド、ポリイミド等の
高分子フィルム、ガラスセラミック。
The nonmagnetic support (1) is, for example, a polymer film such as polyethylene terephrate, polyamide, polyamideimide, polyimide, or glass ceramic.

或いは表面を酸化した金属板等を用いることができる。Alternatively, a metal plate or the like whose surface is oxidized can be used.

また、第1の下地層(2)は酸素との親和性が犬なるT
iまたはCrを主体とするも、これにZr 、 Hf 
In addition, the first base layer (2) has a high affinity for oxygen.
Mainly composed of i or Cr, but also Zr, Hf
.

Mn等との合金によって形成し得、この第1の下地層(
2)の膜厚は50〜100X程度に選ばれることが望ま
しい。
This first underlayer (
The film thickness of 2) is desirably selected to be about 50 to 100X.

また、この第1の下地層(2)上に形成する第2の下地
層(3)としてのBi薄膜は、その厚さを10〜100
0Xとされ、連続若しくは不連続の膜として形成される
Further, the Bi thin film as the second underlayer (3) formed on the first underlayer (2) has a thickness of 10 to 100 mm.
0X, and is formed as a continuous or discontinuous film.

また、この第2の下地層上に形成される金属磁性薄膜と
してはCo或いはCo −Ni合金の厚さ100〜10
00 X、好ましくは200〜500Xに選ばれる。
The metal magnetic thin film formed on the second underlayer is made of Co or Co-Ni alloy and has a thickness of 100 to 10
00X, preferably 200-500X.

そして例えばプラスチックペース、ポリエチレンテレフ
タレートよりなる非磁性体(1)の表面には、第1の下
地層(2)の形成に先だって酸素或いは酸素を含む雰囲
気による酸素イオンの叩きつけ、いわゆるボンバード処
理を施こしおくことが望ましく、更にまたこれの上に形
成した第1の下地層(2)の表面においても同様に酸素
のイオンの叩きっけを行ういわゆるボンバード処理を施
こし、下地層(2)の表面に50〜100Xの厚さの酸
化膜を形成しおくことが望ましい。これら、ボンバード
処理は例えば酸素圧0.07 Torrの圧力下でボン
バード電極に直流電圧IK■を印加することによって行
い得る。
For example, the surface of the non-magnetic material (1) made of plastic paste or polyethylene terephthalate is subjected to so-called bombardment treatment, in which oxygen ions are bombarded with oxygen or an atmosphere containing oxygen, prior to forming the first underlayer (2). Furthermore, the surface of the first base layer (2) formed thereon is also subjected to a so-called bombardment process in which oxygen ions are removed in the same manner. It is desirable to form an oxide film with a thickness of 50 to 100 times. These bombardment treatments can be performed by applying a DC voltage IK to the bombardment electrode under an oxygen pressure of 0.07 Torr, for example.

また、Ti或いはCrを主体とする第1の下地層(2)
の被着は、I X 10”” Torrの真空度下にお
いての蒸着によって形成し得る。
Further, a first base layer (2) mainly composed of Ti or Cr
The deposition may be formed by vapor deposition under a vacuum of I x 10"" Torr.

また、第2の下地層(3)のBi層、更にこれの上の金
属磁性薄膜(4)としてのCo或いはCo −Niの被
着においてもI X 10”” Torrの真空度下に
おける各蒸着処理によって被着形成し得る。また金属磁
性薄膜(4)は1層構造とする場合に限らず、第2図に
示すように夫々Biによる第2の下地層(3)の介在の
もとに2層以上の多層金属磁性薄膜(図示の例では2層
の金属磁性薄膜(4a)及び(4b) )の積層構造と
なし得るものであり、この場合においても、下層の金属
磁性薄膜(4a)の表面に前述したと同様のボンバード
処理を施こし、これの上に第2の下地層(2)のBiを
介して上層の金属磁性薄膜(4b)を形成する。
Furthermore, in the deposition of the Bi layer as the second underlayer (3) and the Co or Co-Ni as the metal magnetic thin film (4) thereon, each deposition was performed under a vacuum of I x 10'' Torr. It can be formed by processing. Moreover, the metal magnetic thin film (4) is not limited to a single layer structure, but as shown in FIG. (In the example shown, it can be made into a laminated structure of two layers of metal magnetic thin films (4a) and (4b)), and in this case as well, the surface of the lower layer metal magnetic thin film (4a) is coated with the same structure as described above. A bombardment process is performed, and an upper metal magnetic thin film (4b) is formed on this through the Bi of the second underlayer (2).

実施例1 ポリイミドフィルムよりなる非磁性支持体(1)上に酸
素圧0.07Torrでボンバード電極に対し【直流I
KVを30秒間印加することによる酸素のボンバード処
理を施して後、この支持体(1)の温度を60Cとして
I X 1O−5Torrの真空度下で第10下地層(
2)としてのCr層を200Xの厚さに蒸着した。
Example 1 [Direct current I
After performing oxygen bombardment treatment by applying KV for 30 seconds, the temperature of this support (1) was set to 60C and the tenth underlayer (
A Cr layer as 2) was deposited to a thickness of 200X.

更にこの下地層(2)の表面を酸素圧0.07Torr
で同様にボンバード電極に直流電圧IKVを30秒間印
加してボンバード処理を施こし、その後支持体(1)の
温度すなわち基板温度150Cで第2の下地層としてB
iを80Xの厚さに蒸着し、続いて35%Ni−Co合
金を300 Xの厚みに蒸着して金属磁性薄膜(4)を
形成した。そしてこの金属磁性薄膜(4a)の表面を前
述したと同様の条件でボンバード処理し、更にこれの上
に前述したと同様の条件をもってBiの第2の下地層(
2)を形成し、その上に金属磁性薄膜(4a)と同一の
厚さ及び蒸着条件をもって同様の磁性層(4b)を蒸着
した。そしてこの表面を更に前述したと同様のボンバー
ド条件をもって[2のボンバードを行った。このように
して得た磁気記録媒体を試料テープAとする。
Furthermore, the surface of this base layer (2) is heated to an oxygen pressure of 0.07 Torr.
Similarly, a DC voltage IKV was applied to the bombarded electrode for 30 seconds to carry out bombardment treatment, and then B was applied as a second underlayer at the temperature of the support (1), that is, the substrate temperature of 150C.
Then, 35% Ni--Co alloy was deposited to a thickness of 300X to form a metal magnetic thin film (4). Then, the surface of this metal magnetic thin film (4a) was subjected to bombardment treatment under the same conditions as described above, and then a second underlayer of Bi (
2) was formed, and a similar magnetic layer (4b) was deposited thereon with the same thickness and deposition conditions as the metal magnetic thin film (4a). Then, this surface was further subjected to bombardment [2] under the same bombardment conditions as described above. The magnetic recording medium thus obtained is referred to as sample tape A.

実施例2 実施例IKおける下地層(2)のCrに変えてTiを同
様の条件下で200 X蒸着した。このようにして得た
磁気記録媒体をテープBとする。
Example 2 In place of Cr in the underlayer (2) in Example IK, Ti was evaporated at 200X under the same conditions. The magnetic recording medium thus obtained is referred to as Tape B.

比較例1 上述した実施例1及び2における非磁性支持体(1)に
対するボンバード処理と第1の下地層のTi若しくはC
rの下地層を省略し、非磁性支持体(1)上に直接的に
第2の下地層としてのBi層(2)を形成して、以下実
施例1及び2と同様の方法によって磁気記録媒体を得た
。このようにして得た磁気記録媒体をテープCとし、こ
れら各試料テープA〜Cの磁気的特性及び機械的特性を
測定した結果を表1に示す。
Comparative Example 1 Bombardment treatment of the non-magnetic support (1) in Examples 1 and 2 described above and Ti or C of the first underlayer
By omitting the underlayer r and forming a Bi layer (2) as a second underlayer directly on the non-magnetic support (1), magnetic recording is performed in the same manner as in Examples 1 and 2. Got the medium. The magnetic recording medium thus obtained was referred to as Tape C, and the results of measuring the magnetic properties and mechanical properties of each of these sample tapes A to C are shown in Table 1.

表  1 ここにスチル寿命は各試料テープを家庭用ビデオテープ
レコーダーに装着してスチル寿命を測定したものであっ
て、本発明による試料テープA及びBは比較例すなわち
従来例に比してその磁気的特性すなわち抗磁力Hc 、
角型比Rs等について同等遜色なくそのスチル寿命がす
なわち耐久性が格段的に向上していることが確められた
Table 1 Here, the still life is measured by attaching each sample tape to a home video tape recorder. characteristic, that is, coercive force Hc,
It was confirmed that the still life, that is, the durability, was significantly improved with respect to the squareness ratio Rs and the like.

上述したように本発明による磁気記録媒体によれば、磁
気ヘッドとの対接による金属磁性薄膜の剥離等による損
傷によるスチル寿命の低さを改善することができ、すな
わち金属磁性薄膜の非磁性支持体(1)に対する被着強
度の向上が図られ、耐久性従って寿命の向上化が図られ
実用に供してその利益は犬である。
As described above, according to the magnetic recording medium of the present invention, it is possible to improve the short still life caused by damage such as peeling of the metal magnetic thin film due to contact with the magnetic head. The adhesion strength to the body (1) is improved, the durability and hence the lifespan are improved, and the benefits of this are obvious when put to practical use.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は夫、々本発明による磁気記録媒体の
各側の路線的拡大断面図である。 (1)は非磁性支持体、(2)は第1の下地層、(3)
は第2の下地層、(41、(4a)及び(4b)は金属
磁性薄膜である。
1 and 2 are enlarged cross-sectional views of each side of a magnetic recording medium according to the present invention. (1) is a non-magnetic support, (2) is a first underlayer, (3)
is the second underlayer, and (41, (4a) and (4b) are metal magnetic thin films.

Claims (1)

【特許請求の範囲】[Claims] 非磁性支持体上にTiまたはCrを主体とする第1の下
地層とこの第1の下地層にBi層を介して金属磁性薄膜
が被着されてなる磁気記録媒体。
A magnetic recording medium comprising a first underlayer mainly made of Ti or Cr on a nonmagnetic support, and a metal magnetic thin film adhered to the first underlayer via a Bi layer.
JP57222297A 1982-12-17 1982-12-17 Magnetic recording medium Pending JPS59112427A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57222297A JPS59112427A (en) 1982-12-17 1982-12-17 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57222297A JPS59112427A (en) 1982-12-17 1982-12-17 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS59112427A true JPS59112427A (en) 1984-06-28

Family

ID=16780148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57222297A Pending JPS59112427A (en) 1982-12-17 1982-12-17 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS59112427A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01173313A (en) * 1987-12-26 1989-07-10 Raimuzu:Kk Magnetic recording medium
JP2005032327A (en) * 2003-07-10 2005-02-03 Sony Corp Magnetic recording medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01173313A (en) * 1987-12-26 1989-07-10 Raimuzu:Kk Magnetic recording medium
JPH0416851B2 (en) * 1987-12-26 1992-03-25 Surface High Performance Res
JP2005032327A (en) * 2003-07-10 2005-02-03 Sony Corp Magnetic recording medium

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