JPS63136318A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63136318A JPS63136318A JP28187386A JP28187386A JPS63136318A JP S63136318 A JPS63136318 A JP S63136318A JP 28187386 A JP28187386 A JP 28187386A JP 28187386 A JP28187386 A JP 28187386A JP S63136318 A JPS63136318 A JP S63136318A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- carbonaceous protective
- protective layer
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims abstract description 38
- 239000011241 protective layer Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000004544 sputter deposition Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 8
- 238000010030 laminating Methods 0.000 abstract description 2
- 230000001681 protective effect Effects 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000233855 Orchidaceae Species 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は磁気ディスク、磁気ドラム、磁気テープなど磁
気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to magnetic recording media such as magnetic disks, magnetic drums, and magnetic tapes.
（従来の技術）
近年、磁気記録媒体におげろ記録密度の高密度化、高信
頼性化の要望が強く、これにともない金属磁性薄膜すな
わち遅続薄膜形の磁気記録媒体が注目されている。また
、従来の面内記録方式に加えて、より高密度の記録再生
が可能な垂直磁気記録方式も研究されている。(Prior Art) In recent years, there has been a strong demand for higher recording densities and higher reliability in magnetic recording media, and as a result, magnetic recording media of metal magnetic thin film, ie, delayed thin film type, are attracting attention. In addition to the conventional longitudinal recording method, a perpendicular magnetic recording method that enables higher density recording and reproduction is also being researched.
これらの記録方式はいずれも媒体に磁気ヘラＶを接触さ
せるか、または近接させることにより記録再生が行なわ
れる。媒体の磁性層表面にはこれを保獲するための保護
層が設けられている。In all of these recording methods, recording and reproduction are performed by bringing a magnetic spatula V into contact with or close to the medium. A protective layer is provided on the surface of the magnetic layer of the medium to protect the magnetic layer.
（発明が解決しようとする問題点）
しかしながら、これらの媒体は耐久性に問題がある。す
なわち、ひとたび保護層が損傷を受げると、まもなく、
その蘭所の磁性体も損傷を起すことである。(Problems to be Solved by the Invention) However, these media have problems in durability. That is, once the protective layer is damaged, soon
The magnetic material in the orchid may also cause damage.
浮上形磁気ヘッドを用いる場合でも、高密度記録を達成
するために磁気ヘッドと媒体との間隔を近ずゆる必要か
ら磁気ヘッドと媒体との衝突の機会が増してくる。磁気
記録における信頼性の向上は工業的に極めて意義のある
ことである。本発明は保護層が多少損傷しても、その部
分の磁気記録特性に欠陥が生ずることなく使用を続ける
ことのできる磁気記録媒体を提供することを目的とする
。Even when a floating magnetic head is used, the possibility of collision between the magnetic head and the medium increases because the distance between the magnetic head and the medium must be shortened in order to achieve high-density recording. Improving reliability in magnetic recording is extremely significant industrially. SUMMARY OF THE INVENTION An object of the present invention is to provide a magnetic recording medium that can continue to be used even if the protective layer is damaged to some extent, without causing defects in the magnetic recording characteristics of the damaged portion.
（問題点を解決するための手段）
本発明者はスパッタリング方法による磁性膜と保護膜の
形成方法について種々検討したところ、基本上に磁性層
と炭素質保護層とからなる積層体を少なくとも２段に積
層することによって、高密度記録時性を損うことなく磁
気記録媒体の信頼性がいちじるしく向上することを見出
した。本発明の磁気記録媒体は上記の知見に基づくもの
である。(Means for Solving the Problems) The present inventor has studied various methods of forming a magnetic film and a protective film using a sputtering method, and found that a laminate consisting of a magnetic layer and a carbonaceous protective layer is basically formed in at least two layers. It has been found that the reliability of the magnetic recording medium can be significantly improved by laminating the magnetic recording medium without impairing high-density recording performance. The magnetic recording medium of the present invention is based on the above findings.
すなわち、本発明は基本上に磁性層と炭素質保護層とか
らなる積層体を少なくとも２段に積層させた磁気記録媒
体である。That is, the present invention is basically a magnetic recording medium in which a laminate consisting of a magnetic layer and a carbonaceous protective layer is laminated in at least two stages.
以下、本発明について図面により詳細に説明する。本発
明の基体１はアルミニウム板、がラス板、合成樹脂など
の硬質成形体またはポリエステルフィルムなど軟質フィ
ルムである。基本表面はうねり、表面粗さを充分に小さ
くしておく必要がある。Hereinafter, the present invention will be explained in detail with reference to the drawings. The substrate 1 of the present invention is an aluminum plate, a glass lath plate, a hard molded body such as a synthetic resin, or a soft film such as a polyester film. The basic surface has undulations and surface roughness must be kept sufficiently small.
なお、必要により前記基体の表面にニッケル・リン合金
を被覆して硬質化するなど磁性体の下地となる下地層２
を設ゆでもよい。If necessary, the surface of the base body may be coated with a nickel-phosphorus alloy to make it hard.
You can also set it up.
上記基体の表面または下地層の表面に第１磁性層３を設
ける。第１磁性層はメッキ法、蒸着法またはスパッタ法
のいずれの方法で設けてもよい。A first magnetic layer 3 is provided on the surface of the substrate or the surface of the underlayer. The first magnetic layer may be provided by any method such as plating, vapor deposition, or sputtering.
磁性層の厚さは１層当り１００１〜１００００Ａの範囲
が好ましい。１００Ａ未満では記録再生における感度が
不充分であり、また１００００Ａを越えると記録特性と
くに高密度記録の面で好ましくない。The thickness of the magnetic layer is preferably in the range of 1001 to 10000 A per layer. If it is less than 100 A, the sensitivity in recording and reproduction is insufficient, and if it exceeds 10,000 A, it is not preferable in terms of recording characteristics, especially high-density recording.
第１磁性層σ〕上に第１炭素賞保Ｊ１層４を投げる。A first carbon layer 4 is deposited on the first magnetic layer σ].
炭素質保護層はスパッタ法またはゾラズマ重合法で設け
ることが好ましい。アーク放電による蒸着法による炭素
質保護層は密着性が悪いので好ましくない。炭素質保護
層の厚さは１層当り５０Ａ〜１００００Ａの範囲が望ま
しい。保護層の厚さが５０Ａ以下では磁性体を保護する
作用がない。−ま九、厚さが１０００ＯＡを越えると高
密式記録媒体としての記録特性が得られない。The carbonaceous protective layer is preferably provided by sputtering or zolazma polymerization. A carbonaceous protective layer formed by vapor deposition using arc discharge is not preferred because of its poor adhesion. The thickness of the carbonaceous protective layer is preferably in the range of 50A to 10,000A per layer. If the thickness of the protective layer is less than 50A, there is no effect of protecting the magnetic material. -Ninth, if the thickness exceeds 1000 OA, recording characteristics as a high-density recording medium cannot be obtained.
第１炭木質保護層４の上に第２磁性層５を設ける。第２
以降の磁性層は蒸着法またはスパッタ法で設けることが
好ましい。第２磁性ノーの上に第２炭素質保護層６を設
ける。この上にさらに第６磁性層および第６炭素質保護
層を設けてもよく、さにｅ、本崗滑剤を施してもよい。A second magnetic layer 5 is provided on the first carbon-wood protective layer 4 . Second
The subsequent magnetic layers are preferably provided by a vapor deposition method or a sputtering method. A second carbonaceous protective layer 6 is provided on the second magnetic node. A sixth magnetic layer and a sixth carbonaceous protective layer may be further provided thereon, and a real lubricant may be applied thereto.
（実施例）
以下、実施例１〜６および比較例により本発明を具体的
に説明する。(Example) Hereinafter, the present invention will be specifically explained using Examples 1 to 6 and a comparative example.
基体として外径９Ｏ−１１Ｂ、内径２５Ｂ１厚さ１．２
ｍｘのアルミニウム円盤を準備した。基体表面をラッピ
ングした後、無″這解メッキ法でニッケル・リンからな
る厚さ６０μ扉の硬質の下地層を設けた。As a base body, outer diameter 9O-11B, inner diameter 25B1, thickness 1.2
An aluminum disk of mx was prepared. After lapping the surface of the substrate, a hard base layer of nickel and phosphorus with a thickness of 60 μm was provided using a non-removal plating method.
下地層を鏡面ポリッシングした後、基体なマグネトロン
スパッタ装置（徳山製作所ＯＦＳ −１３Ｉｓ形）の試
料置台に固定した。マグネトロンスパッタ装置を作動さ
せ、磁性層用ターグツトとして０ｏ−Ｐｔ（原子比８２
： １８）を用いてアルイン圧力２ｘ１Ｑ−２Ｔｏｒ
ｒ 、スパッタパワー６ Ｗ ／ ｃｍ”、ＲＦスパッ
タの条件でコバルト・白金からなる表１に示す厚さの第
１磁性層を設けた。ついでカーボンをターガツトとして
アルコ９ン圧力８ ×１０”−５Ｔｏｒｒ、スパッタパ
ワー５ Ｗ／ｃｒＩＬ”、Ｄ Ｃスパッタの条件で表１
に示す厚さの第１炭素質保護層を設けた。After mirror polishing the base layer, it was fixed on a sample holder of a basic magnetron sputtering device (Tokuyama Seisakusho OFS-13Is type). The magnetron sputtering device was operated, and 0o-Pt (atomic ratio 82
: 18) using Aluine pressure 2x1Q-2 Tor
A first magnetic layer made of cobalt and platinum and having the thickness shown in Table 1 was formed under the conditions of RF sputtering with a sputtering power of 6 W/cm" and a sputtering power of 6 W/cm". Then, using carbon as a targat, an Alco 9 pressure of 8 x 10"-5 Torr was applied. , sputtering power 5 W/crIL", and DC sputtering conditions in Table 1.
A first carbonaceous protective layer having a thickness shown in was provided.
数で積層させた。各層の厚さは表１に示すとおりである
。層の厚さのＡ節はスパッタ時間の変更により行なった
。Laminated by numbers. The thickness of each layer is as shown in Table 1. Section A of the layer thickness was achieved by varying the sputtering time.
これらの磁気ディスクについてスチルライフテストを行
なった。スチルライフテストは磁気ディスクを磁気ディ
スクドライブ装置にセットし、磁気ヘッドを素気ディス
クの一定のトラックのみに固定し長時間磁気ディスクを
回転させてディスクの耐久性を調べるものでるり、磁気
ディスクの再生出力が当初の７０％にまで低下する時間
により耐久性を調べた。その結果は表１および表２に示
すとおりである。これらの辰から、基体上に磁性層と炭
素質保護層とからなる積層体を２段以上に積層させると
ヘッドクラッシュが発生しても出力の低下が比較的小さ
く、信頼性の同上にきわめて有効であることがわかる。A still life test was conducted on these magnetic disks. A still life test is a test in which a magnetic disk is set in a magnetic disk drive device, the magnetic head is fixed only on a certain track of the bare disk, and the magnetic disk is rotated for a long period of time to examine the durability of the disk. Durability was examined based on the time it took for the playback output to drop to 70% of its original level. The results are shown in Tables 1 and 2. From these results, it has been found that if a laminate consisting of a magnetic layer and a carbonaceous protective layer is laminated in two or more layers on a substrate, the drop in output will be relatively small even if a head crash occurs, and it will be extremely effective in improving reliability. It can be seen that it is.
いっぽう、実施例１おＬび比較例で得られた磁気ディス
クから直径７ｍ鷹のテストピースを打抜き、理研厩子社
製の振動試料形磁力計（形式８Ｈ１７−３５）を用いて
、外部磁界１５Ｋがウスで磁気特性を測定した。その結
果、第２に示すとおり積層段数を２段にしても、磁気４
ｆ＝注は従来の槓層段数１段のものととくに差はなく優
れていることが確認された。なお、表２においてＨａは
抗磁力（単位二エルステッド）、Ｓ＊は抗磁力角形比（
単位なし）、Ｍｒは残留磁束（単位’ １ （］−４ｅ
ｍｕ・・・ただし、７ ｖａｔ角の試料で）、Ｍｓは飽
和磁束（単位１Ｑ””’ ｅｍｕ・・・ただし、７４角
の試料で）、Ｓは角形比（単位なし）である。Ｈｌは磁
化曲線のＨａ点での接線とＭｒ （残留磁束）点を通り
、横軸（抗磁力を示す軸）に平行な直線との交点におけ
る抗磁力の値（単位二エルステッド）である。On the other hand, a test piece with a diameter of 7 m was punched out from the magnetic disks obtained in Example 1 and Comparative Example, and was exposed to an external magnetic field of 15 K using a vibrating sample magnetometer (model 8H17-35) manufactured by Riken Amaya. The magnetic properties were measured using a micrometer. As a result, as shown in Section 2, even if the number of laminated layers is two, the magnetic
It was confirmed that the f=note is superior to the conventional one with one sill layer, with no particular difference. In Table 2, Ha is the coercive force (unit: 2 Oersteds), and S* is the coercive force squareness ratio (
(no unit), Mr is the residual magnetic flux (unit '1 (]-4e
mu...however, for a 7 vat square sample), Ms is the saturation magnetic flux (unit 1Q""' emu...however, for a 74 square sample), and S is the squareness ratio (no unit). Hl is the value of coercive force (unit: 2 Oersteds) at the intersection of the tangent of the magnetization curve at point Ha and a straight line passing through Mr (residual flux) point and parallel to the horizontal axis (axis indicating coercive force).
（発明の効果）
以上の説明で明らかなように、本発明による磁気記録媒
体は基体上に磁性層と炭素質保護層とからなる積層体を
少なくとも２段に積層させたことにより、磁気ヘッドに
よるヘッドクラッシュが発生しても中間に設けられた保
護層がバリヤーとなりヘッドクラッシュの進行が阻止さ
れ、記録された情報が完全に失われることがない信頼性
の高いものとなる。(Effects of the Invention) As is clear from the above explanation, the magnetic recording medium according to the present invention has a laminate consisting of a magnetic layer and a carbonaceous protective layer stacked in at least two layers on a substrate, so that the magnetic recording medium can be easily controlled by a magnetic head. Even if a head crash occurs, the protective layer provided in the middle acts as a barrier and prevents the head crash from progressing, making it highly reliable that the recorded information will not be completely lost.
図面は本発明の磁気記録媒体の断面図である。
基
符号＝１・・・封体、２・・・下地層、３・・・第１磁
性層、４・・・第１炭素質保護層、５・・・第２磁性層
、６・・・第２炭素質保護層
特許出願人 電気化学工業株式会社
図面The drawing is a cross-sectional view of the magnetic recording medium of the present invention. Base code=1...Encapsulation, 2...Underlayer, 3...First magnetic layer, 4...First carbonaceous protective layer, 5...Second magnetic layer, 6... Second carbonaceous protective layer patent applicant Denki Kagaku Kogyo Co., Ltd. Drawings
Claims (1)
くとも２段に積層させた磁気記録媒体。A magnetic recording medium in which a laminate consisting of a magnetic layer and a carbonaceous protective layer is laminated in at least two stages on a substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28187386A JPS63136318A (en) | 1986-11-28 | 1986-11-28 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28187386A JPS63136318A (en) | 1986-11-28 | 1986-11-28 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63136318A true JPS63136318A (en) | 1988-06-08 |
Family
ID=17645161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28187386A Pending JPS63136318A (en) | 1986-11-28 | 1986-11-28 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63136318A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63144410A (en) * | 1986-12-05 | 1988-06-16 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58182129A (en) * | 1982-04-20 | 1983-10-25 | Tdk Corp | Magnetic recording medium |
-
1986
- 1986-11-28 JP JP28187386A patent/JPS63136318A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58182129A (en) * | 1982-04-20 | 1983-10-25 | Tdk Corp | Magnetic recording medium |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63144410A (en) * | 1986-12-05 | 1988-06-16 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
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