JPS59108304A - Optical magnetic recording medium - Google Patents

Optical magnetic recording medium

Info

Publication number
JPS59108304A
JPS59108304A JP21865282A JP21865282A JPS59108304A JP S59108304 A JPS59108304 A JP S59108304A JP 21865282 A JP21865282 A JP 21865282A JP 21865282 A JP21865282 A JP 21865282A JP S59108304 A JPS59108304 A JP S59108304A
Authority
JP
Japan
Prior art keywords
recording medium
kinds
group
film
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21865282A
Other languages
Japanese (ja)
Other versions
JPH0351082B2 (en
Inventor
Kazuo Kayane
一夫 茅根
Katsuhiko Yahagi
矢萩 勝彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP21865282A priority Critical patent/JPS59108304A/en
Publication of JPS59108304A publication Critical patent/JPS59108304A/en
Publication of JPH0351082B2 publication Critical patent/JPH0351082B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851Coating a support with a magnetic layer by sputtering
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/16Layers for recording by changing the magnetic properties, e.g. for Curie-point-writing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain a medium, whose thetaK is large and S/N ratio is excellent, by including one or more kinds of elements in an I A group and a IIA group into a group into a thin amorphous alloy film, which has an easy magnetizing axis in the vertical direction with respect to the film surface. CONSTITUTION:In a thin amorphous alloy film, which has an easy magnetizing axis in the vertical direction with respect to the film surface, one or more kinds of Li, Na, K, Rb, Cs, Fe, Be, Mg, Ca, Sr, Ba and Ra are included. Said alloy has a composition expressed by, e.g., a general formula (RXT1-X)1-YMY; where R is one or more kinds of Gd, Tb and Dy; T is one or more kinds of Co, Fe and Ni; M is one or more kinds of elements in said I A group and a II A group; X is in 0.1<=X<=0.4; and Y is in 0.01<=Y<=0.4. Said thin film is formed by a sputtering apparatus, a vacuum evaporation apparatus, an ion plating apparatus and other electroless plating method.

Description

【発明の詳細な説明】 本発明は、希土類元素と鉄族元素を主成分とする→1・
品質磁性薄膜を有し、膜面と香石方向に磁化容易軸を有
する光磁気記録媒体に関するものである。
[Detailed Description of the Invention] The present invention is based on the main components of rare earth elements and iron group elements →1.
The present invention relates to a magneto-optical recording medium that has a high-quality magnetic thin film and has an axis of easy magnetization in the film surface and in the direction of the aromatic stone.

従来から、希土類元素とFe、Co、Niの鉄族元素を
主成分とする一部又は全部が非晶質磁性薄膜は膜面と垂
直な方向に磁化容易軸を有す。S椿あるいはN極に全面
磁化さ′i″Lだ膜面に逆向きの小さな(1μm径程度
)スポット(ピット)状の反転磁化を作ることが出来る
。この反転磁区の有無をrl−JtrOjに対応するこ
とによってデジタル信号とした磁気メモリー媒体として
用いることができる。このような磁性薄膜のうち、室温
に近いキューリ一点(Tc)あるいは補償温度をもつ化
合物・合金は、レーザー光等の光又は熱的効果によって
任意の位置に任意の大きさ・形状の反転磁区を作ること
が出来る。これを利用することによって情報を記録する
ことが可能であり、ディスク、テープ、ソート状の光磁
気メモリー媒体として利用することが可能となりつつあ
る。そして読み出す方法として、磁気カー効果やファラ
デー効果を利用する方式が用いられている。
Conventionally, partially or entirely amorphous magnetic thin films containing rare earth elements and iron group elements such as Fe, Co, and Ni as main components have an axis of easy magnetization in a direction perpendicular to the film surface. It is possible to create reversed magnetization in the form of a small spot (pit) with a diameter of about 1 μm in the opposite direction on the film surface where the S or N pole is fully magnetized. Compounds and alloys with a Curie point (Tc) or compensation temperature close to room temperature can be used as a magnetic memory medium that converts digital signals into digital signals. By using this effect, it is possible to create inverted magnetic domains of any size and shape at any position.By utilizing this, it is possible to record information, and it can be used as a magneto-optical memory medium in the form of disks, tapes, and sorts. It is becoming possible to use this method, and methods using the magnetic Kerr effect and Faraday effect are being used as readout methods.

従来、公知である膜面と垂直な方向に磁化容易軸を有し
、かつ光ビームにより情報を書き込み。
Conventionally, the easy magnetization axis is perpendicular to the film surface, and information is written using a light beam.

読み出せる磁性膜合金としては、多結晶としてMnB1
.Mn0uBi、アtCo、0oOr、単結晶としてG
d工G、TbFe0.YGaIG、BiSmErGaI
G、  そして非晶質としてGa0o、TbFe。
MnB1 is a polycrystalline magnetic film alloy that can be read out.
.. Mn0uBi, AtCo, 0oOr, G as single crystal
d Engineering G, TbFe0. YGaIG, BiSmErGaI
G, and Ga0o, TbFe as amorphous.

DyFe、GdFeB1.GdTbFe、TbDyFe
があるが、この中でも非晶質磁性膜合金が良い材料とし
て知られている。
DyFe, GdFeB1. GdTbFe, TbDyFe
Among these, amorphous magnetic film alloys are known to be good materials.

しかし上述した非晶質磁性膜合金は、書き込み感度が良
く、媒体ノイズが少なく、垂直磁気異方性の大面積が安
定に作製小米、又、磁気特性も適当に良いが、読み出し
性能(S/N比)に大きな影響を与えるカー回転角(θ
k)が小さく、そのためにS / N比が小さくなり、
光磁気記録媒体として使用することは困難であるという
公売を有している。
However, the above-mentioned amorphous magnetic film alloy has good writing sensitivity, low medium noise, and can stably produce a large area with perpendicular magnetic anisotropy.Also, the magnetic properties are suitably good, but the read performance (S/ The Kerr rotation angle (θ
k) is small, so the S/N ratio is small,
It has a public reputation that it is difficult to use it as a magneto-optical recording medium.

本発明は、上記の従来の欠点を改良し、θkを太きくt
、、s/N比が優れた光磁気記録媒体全提供することに
ある。
The present invention improves the above-mentioned conventional drawbacks and increases θk and t.
The object of the present invention is to provide a magneto-optical recording medium with an excellent S/N ratio.

本発明の光磁気記録媒体は、膜面に垂直な大部分の方向
が磁1ヒ容易軸の磁気異方性を有するものであり、ギュ
ーリ一点(T c)および補償温度(T :;ompt
; )が室温に近く50℃〜200℃を有する大部分が
非晶質状態の薄膜である。
The magneto-optical recording medium of the present invention has magnetic anisotropy with the magnetic easy axis in most directions perpendicular to the film surface, and has a magnetic anisotropy with a single Gyuri point (T c ) and a compensation temperature (T :;
; ) is close to room temperature, 50°C to 200°C, and is a thin film that is mostly in an amorphous state.

そして従来から希土類元素(R)のG(1,Tb。And conventionally, G(1,Tb) of rare earth element (R).

DyとFe、COD上記非晶質合金は光磁気効果。The above amorphous alloys of Dy, Fe, and COD have a magneto-optical effect.

T (1! 、 T COmpt  が比較的良いこと
から光磁気記録媒体として注目され、研究が進められて
いる。
Since T(1!, TCompt) is relatively good, it has attracted attention as a magneto-optical recording medium, and research is progressing.

しかし、より優れた記録媒体とするには、θkを太きぐ
する必要がある。θkを太きくすることにより、読出し
性能(s / N比)が良くなるからである。つまりθ
kが大きく、しがもT c 、 T compt。
However, in order to obtain a more excellent recording medium, it is necessary to increase θk. This is because reading performance (s/N ratio) improves by increasing θk. In other words, θ
If k is large, T c and T compt.

磁気特性は従来の媒体と変らないか、又は、より優れた
媒体が必要である。今までにもθに金大きくするために
、Or、Ni、Bi、Ou、Ag、Au。
A medium whose magnetic properties are the same or better than conventional media is needed. In order to increase gold in θ, we have used Or, Ni, Bi, Ou, Ag, and Au.

Sn、co −4の添加による改良が試みられている。Improvements have been attempted by adding Sn and co-4.

本発明では、θkが太きくなり、しかもその他の特性で
あるT c 、 T commpt 、磁気特性等はほ
とんど悪くならない添加元素として、Li 、 Na 
In the present invention, Li and Na are added as additive elements that increase θk and do not substantially deteriorate other properties such as T c , T compt and magnetic properties.
.

K、Rb、Os、FrのIA族、Be、Mg、Oa。K, Rb, Os, Fr IA group, Be, Mg, Oa.

Sr、Ba、RaのIIA族を発明したことにある。The reason is that he invented the IIA group of Sr, Ba, and Ra.

しかもこれら4−t、RとしてG6−、Tb、Dy以外
のBe、Y、La、Oe、Pr、Nrl、Pm、Sm、
Fiu。
Moreover, as these 4-t, R, Be, Y, La, Oe, Pr, Nrl, Pm, Sm, other than G6-, Tb, Dy,
Fiu.

Ho、Br、Tm、Yb、Lu  でも同様に効果があ
ることを確認できた。
It was confirmed that Ho, Br, Tm, Yb, and Lu were similarly effective.

以下、本発明の詳細な説明する。The present invention will be explained in detail below.

R(=Gd、Tb、Dy)  とT (=Oo 、 F
e )の非晶質合金膜Rx T1−x は、従来から0
1≦X≦0.4と広く知られている通りである。(例え
ば特願昭55−30251.55−170259.55
−57547  50−107107  51−255
3451−25534等)  そしてこれらはT O、
’rcomptが50℃〜200℃であり、適当な磁気
特性(Me。
R (=Gd, Tb, Dy) and T (=Oo, F
e) amorphous alloy film Rx T1-x has traditionally been 0
It is widely known that 1≦X≦0.4. (For example, patent application No. 55-30251.55-170259.55
-57547 50-107107 51-255
3451-25534 etc.) and these are T O,
'rcompt is 50°C to 200°C, and suitable magnetic properties (Me.

nc、Ku)  を有し、垂直な磁化容易軸を持つ媒体
である。そしてこれらはスパッター装置、真空蒸*V、
首、イオンブレーティング装置、その他の 5 − 多くの無電解メッキ法によって作製さね、る。一般にタ
ーゲットは溶解法、粉末凝固法、あるいはRとTの面積
比による法等で作製さrLる。そして基板に7リコンウ
エハー、ガラス、puMh材等上に50に〜数μ程1牝
の膜が形成される。我々も同様にしてIJ i作製した
。そしてθkをカー回転角測定器によって測定した結果
を、第1図、第2図に示したものでちる。第1図におい
ては、R=Gd、Tb、T=Oo、Feの場合で、Xは
0.1≦X≦04の範囲ではいずれもほぼ左点のy=o
でのθにの値である。そしてM=:Be、Oa、Ba。
nc, Ku), and is a medium with a perpendicular easy axis of magnetization. These are sputtering equipment, vacuum evaporation*V,
Neck, ion blating equipment, etc. 5 - Manufactured by many electroless plating methods. Generally, the target is manufactured by a melting method, a powder solidification method, or a method based on the area ratio of R and T. Then, a film of about 50 μm to several μm is formed on a silicon wafer, glass, puMh material, etc. as a substrate. We also produced IJi in the same manner. The results of measuring θk using a Kerr rotation angle measuring device are shown in FIGS. 1 and 2. In Figure 1, in the case of R=Gd, Tb, T=Oo, Fe, X is almost at the left point y=o in the range of 0.1≦X≦04.
is the value of θ at . and M=: Be, Oa, Ba.

Na、Li、にで、Yが0,01≦Y≦0.40間で増
加している。それ以上ではあまり効果が良くないようで
ある。
For Na, Li, and Ni, Y increases between 0.01≦Y≦0.40. It seems that the effect is not very good beyond that.

この結果は、本発明の他のR,T、Mの元素についても
いずれも同様である。しかも従来の媒体に比べ他の特性
はほとんど変化が無いが、むしろ磁気特性のHc等は良
くなっていた。
This result is also the same for the other elements R, T, and M of the present invention. Moreover, compared to conventional media, there was almost no change in other properties, but the magnetic properties such as Hc were actually improved.

@2図においても、M=Mg、Sr 、Ra 、Rb。Also in Figure @2, M=Mg, Sr, Ra, Rb.

Os + F r  の例全示したが、第1図の場合と
同様 6− であった。そして特にBe、Ca、Mg、Sr等の効果
は大きいようである。これらの図はいずれも代表的な結
果であるが、本発明のR,T、Mの多くの組合−14−
においても、同様の結果が得られている。更に、本発明
のMは多結晶膜9竿結晶膜にも有効である。
All examples of Os + F r were shown, and the result was 6- as in the case of FIG. In particular, Be, Ca, Mg, Sr, etc. seem to have a great effect. Although these figures are representative results, many combinations of R, T, and M of the present invention-14-
Similar results were obtained in . Furthermore, M of the present invention is also effective for polycrystalline films and crystalline films.

以上、説明した本発明の光磁気記録媒体は、カー効果又
tまファラデー効果を利用して読出しを行なう。ただし
、書込みはレザー光等の光ビームを用いてその光熱磁気
効果を利用するものである。
The magneto-optical recording medium of the present invention described above performs reading using the Kerr effect or the Faraday effect. However, writing uses a light beam such as a laser beam and utilizes its photothermal magnetic effect.

このように、ビーム・アドレッサブルメモリとして利用
できる書き換え可能なメモリーとなる。そしてθに大の
ためEE / Nがμ5it5 ファイル、コンピュー
タ、オーディオ、ビデオ用の書き換え可能型メモリーと
して広く応用することが可能である。
In this way, it becomes a rewritable memory that can be used as a beam addressable memory. Since θ is large, the EE/N can be widely applied as a rewritable memory for μ5it5 files, computers, audio, and video.

そして、書き込み、読出し、消去等が、Ar。Writing, reading, erasing, etc. are performed using Ar.

Hθ−Neそして半導体レーザー(例えばGa5A2・
AG等)によって可能とすることが出来る。
Hθ-Ne and semiconductor lasers (e.g. Ga5A2.
AG, etc.).

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は(Rx T1−x )I−Y MYにおいて、
R= () d 、 T b 、 T = Oo 、 
F e 、 0.15 X≦0.4の組成にM=Be、
C!a、Ba、Na、Li、Kffi加えに時のカー回
転角θにと原子比Yの関係を示す。 第2図U (Rx T 1−x ) 1−Y MY  
において、R=Ga、Dy、Tb 、T=OO,Fe 
、  α1≦X≦0.4の組成にM=Mg、Sr、Ra
、Rb、Os。 Fr’t=加えた時のカー回転角θにと凰子比Yの関係
を示す。 以   −E (、)’/θ (。) 河θ
Figure 1 shows (Rx T1-x) I-Y MY,
R=()d, Tb, T=Oo,
Fe, 0.15 M=Be for the composition of X≦0.4,
C! In addition to a, Ba, Na, Li, and Kffi, the relationship between the Kerr rotation angle θ and the atomic ratio Y is shown. Fig. 2 U (Rx T 1-x) 1-Y MY
In, R=Ga, Dy, Tb, T=OO, Fe
, M=Mg, Sr, Ra for the composition α1≦X≦0.4
, Rb, Os. The relationship between the Kerr rotation angle θ and the reduction ratio Y when Fr't=is applied is shown. Therefore −E (,)'/θ (.) River θ

Claims (3)

【特許請求の範囲】[Claims] (1)膜面に垂直な方向に磁化容易軸を有−する非晶質
合金において、Li、Na、に、Rb、Os、Fr。 Be、Mg、Oa、Sr、Ba、Raの1種以上を含有
することを特徴とした薄膜″It、磁気紀録媒体。
(1) In an amorphous alloy having an axis of easy magnetization in a direction perpendicular to the film surface, Li, Na, Rb, Os, and Fr. A magnetic recording medium characterized by containing one or more of Be, Mg, Oa, Sr, Ba, and Ra.
(2)合金の一般式(RX T1−1)1−Y M Y
(R7はGd、Tb、Dyが1種以上である。また、T
はCo、Fe、 N i が1種以上である。M(ま特
許請求の範囲第1項記載の1種以上の元素である。 ぞしてX (rio、 1≦X≦0.4.Yldo、0
1≦Y≦04である。)で示される組成を有する特許請
求の範囲第1項記載の薄膜光磁気記録媒体。
(2) General formula of alloy (RX T1-1) 1-Y MY
(R7 is one or more of Gd, Tb, and Dy. Also, T
is one or more of Co, Fe, and Ni. M (or one or more elements as described in claim 1. Therefore, X (rio, 1≦X≦0.4.Yldo, 0
1≦Y≦04. ) The thin-film magneto-optical recording medium according to claim 1, having a composition represented by:
(3)  Ri(1:Gd、Tb、Dy、sc、、Y、
La、Oe。 Pr、、Nd、Pm、Sm、Eu、Ha、Er、Tm、
Yb。 Luが1種以上である特許請求の範囲第2項記載の薄膜
光磁気記録媒体。
(3) Ri(1: Gd, Tb, Dy, sc, Y,
La, Oe. Pr, , Nd, Pm, Sm, Eu, Ha, Er, Tm,
Yb. 3. The thin film magneto-optical recording medium according to claim 2, wherein Lu is one or more types.
JP21865282A 1982-12-14 1982-12-14 Optical magnetic recording medium Granted JPS59108304A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21865282A JPS59108304A (en) 1982-12-14 1982-12-14 Optical magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21865282A JPS59108304A (en) 1982-12-14 1982-12-14 Optical magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS59108304A true JPS59108304A (en) 1984-06-22
JPH0351082B2 JPH0351082B2 (en) 1991-08-05

Family

ID=16723300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21865282A Granted JPS59108304A (en) 1982-12-14 1982-12-14 Optical magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS59108304A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61222104A (en) * 1984-11-12 1986-10-02 Sumitomo Special Metals Co Ltd Vertical magnetic recording medium and manufacture thereof
JPS62112251A (en) * 1985-11-09 1987-05-23 Nippon Gakki Seizo Kk Photomagnetic recording material
JPS62214537A (en) * 1986-03-14 1987-09-21 Seiko Epson Corp Photomagnetic recording medium
US4695514A (en) * 1983-11-29 1987-09-22 Sharp Kabushiki Kaisha Magneto-optical memory element
JPS62226450A (en) * 1986-03-27 1987-10-05 Seiko Epson Corp Photomagnetic recording medium
US5060478A (en) * 1984-07-27 1991-10-29 Research Development Corporation Of Japan Magnetical working amorphous substance
US5273836A (en) * 1987-04-14 1993-12-28 Yamaha Corporation Magnetooptic recording material
US5660929A (en) * 1984-11-12 1997-08-26 Sumitomo Special Metals Co., Ltd. Perpendicular magnetic recording medium and method of producing same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695514A (en) * 1983-11-29 1987-09-22 Sharp Kabushiki Kaisha Magneto-optical memory element
US5060478A (en) * 1984-07-27 1991-10-29 Research Development Corporation Of Japan Magnetical working amorphous substance
JPS61222104A (en) * 1984-11-12 1986-10-02 Sumitomo Special Metals Co Ltd Vertical magnetic recording medium and manufacture thereof
US5660929A (en) * 1984-11-12 1997-08-26 Sumitomo Special Metals Co., Ltd. Perpendicular magnetic recording medium and method of producing same
JPS62112251A (en) * 1985-11-09 1987-05-23 Nippon Gakki Seizo Kk Photomagnetic recording material
US4803129A (en) * 1985-11-09 1989-02-07 Yamaha Corporation Magnetic recording material
JPS62214537A (en) * 1986-03-14 1987-09-21 Seiko Epson Corp Photomagnetic recording medium
JPS62226450A (en) * 1986-03-27 1987-10-05 Seiko Epson Corp Photomagnetic recording medium
US5273836A (en) * 1987-04-14 1993-12-28 Yamaha Corporation Magnetooptic recording material

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Publication number Publication date
JPH0351082B2 (en) 1991-08-05

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