JPS59107619A - Tantalic acid lithium oscillator - Google Patents

Tantalic acid lithium oscillator

Info

Publication number
JPS59107619A
JPS59107619A JP21739782A JP21739782A JPS59107619A JP S59107619 A JPS59107619 A JP S59107619A JP 21739782 A JP21739782 A JP 21739782A JP 21739782 A JP21739782 A JP 21739782A JP S59107619 A JPS59107619 A JP S59107619A
Authority
JP
Japan
Prior art keywords
oscillator
long side
axis
value
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21739782A
Other languages
Japanese (ja)
Inventor
Masaki Okazaki
正喜 岡崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP21739782A priority Critical patent/JPS59107619A/en
Publication of JPS59107619A publication Critical patent/JPS59107619A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02007Details of bulk acoustic wave devices
    • H03H9/02015Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To form a tantalic acid lithium oscillator with high accuracy by turning clockwise the long side for a prescribed angle from the Y axis within the Y-Z plane, and bringing the ratio of the long side to the short side of the major plane to a prescribed value or over. CONSTITUTION:The secondary oscillation is suppressed sufficiently, furthermore the oscillator with small size and a low CI value is obtained by bringing the ratio of the long side to the short side to >=2, in a rectangular oscillator where the long side of the major plane of an X-cut plate of the oscillator 1 is turned clockwise by 43 deg. or 63 deg. from the Y axis. Thus, the oscillator is miniaturized, the CI value is decreased and the spurious component due to the secondary oscillation is suppressed remarkably.

Description

【発明の詳細な説明】 本発明は圧電体のタンタル酸リチウムを用いたタンタル
酸リチウム振動子に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lithium tantalate vibrator using piezoelectric lithium tantalate.

一般にタンタル酸リチウム(LiTaO2) 、ニオブ
酸リチウム(LINb03)等の圧電素子は電気機械結
合係数が大きいため、広帯域フィルター、広い可変幅の
電圧制御発振器用の圧電材料として有用である。特にタ
ンタル酸リチウムを用いた厚みすべり振動子は加工が容
易で温度特性も比較的良好なために実用化の試みがなさ
れている。しかしながらこのようなタンタル酸リチウム
を用いだ振動子は、変位方向が互いに直交し、電気機械
結合係数の異なる2つの厚みすべり振動が同時に励振さ
れる。このため、一方の振動を主振動とすると他方の振
動は副振動となって存在するので種々の不都合がある。
In general, piezoelectric elements such as lithium tantalate (LiTaO2) and lithium niobate (LINb03) have a large electromechanical coupling coefficient, so they are useful as piezoelectric materials for broadband filters and wide variable width voltage-controlled oscillators. In particular, attempts are being made to put thickness-shear resonators using lithium tantalate into practical use because they are easy to process and have relatively good temperature characteristics. However, in such a vibrator using lithium tantalate, the displacement directions are perpendicular to each other, and two thickness shear vibrations having different electromechanical coupling coefficients are simultaneously excited. For this reason, if one vibration is the main vibration, the other vibration exists as a sub-vibration, which causes various problems.

本発明は上記の事情に鑑みてなされたもので簡単な構成
で副振動によるスノリアス成分を大幅に抑圧することが
でき、しかも形状が小型で高性能のタンタル酸リチウム
振動子を提供することを目的とするものである。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a high-performance lithium tantalate oscillator that can significantly suppress the snorious component due to secondary vibrations with a simple configuration, is small in size, and has high performance. That is.

以下本発明の一実施例を図面を参照して詳細に説明する
。第1図は平面図で1はタンタル酸リチウムからなる振
動子である。この振動子はタンタル酸リチウムの互いに
直交する結晶軸、x、y、zOX軸に直角なy、z平面
に沿って切シ出した主面を有する板体を矩形に成形し板
面に図示しない電極を形成してここに高周波信号を印加
して厚みすべり振動を励振するようにしている。そして
このようなタンタル酸リチウムのX板における木耳方程
式は次のように与えられる。
An embodiment of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a plan view, and numeral 1 indicates a vibrator made of lithium tantalate. This resonator is made by molding a plate into a rectangular shape having a main surface cut out along the y and z planes perpendicular to the mutually orthogonal crystal axes of lithium tantalate, and the x, y, and zOX axes, and is not shown on the plate surface. Electrodes are formed and a high frequency signal is applied thereto to excite thickness shear vibration. The wood loop equation for the X-plate of lithium tantalate is given as follows.

化されたスチフネスであり、この解としてCは3個求め
ることカニできる。しかしそのうちの1個の解は圧電的
に励振されず、残る2個の解が圧電的に励振可能な解と
して求められる。またこの2個の解は、音速の速い横波
の振動vlと。
It is the stiffness that is expressed as a stiffness, and it is possible to find three C as solutions. However, one of the solutions is not piezoelectrically excited, and the remaining two solutions are found to be piezoelectrically excitationable. Also, these two solutions are the vibration vl of a transverse wave with a high speed of sound.

遅い横波の振動V!である。また一般にタンタル酸リチ
ウムのX極では速い横波の振動vlを主振動として利用
するが同時に遅い横波の振動V!による副振動によシス
プリアスを生じる。
Slow transverse wave vibration V! It is. Generally, the X-electrode of lithium tantalate uses the fast transverse wave vibration vl as the main vibration, but at the same time the slow transverse wave vibration V! The secondary vibration caused by this causes syspulus.

したがって、円板状、正方形状等の振動子では主振動v
1に対して副振動V!も略等しいレベルまで励振されて
しまう。そこで第1図に示すように主面を主振動v1の
方向に細長い矩形状に成形することにより副振動V、の
レベルを、たとえば第2図に示す周波数応答特性図のよ
うに抑圧することができる。ここで主振動V、と副振動
v2とのレベル差りは、振動子の主面の長辺をY軸から
時計方向に回転した回転角θに対して第3図に示すよう
に変化した。
Therefore, in a disc-shaped, square-shaped oscillator, etc., the main vibration v
Sub-vibration V for 1! are excited to approximately the same level. Therefore, by forming the main surface into a rectangular shape elongated in the direction of the main vibration v1 as shown in Fig. 1, it is possible to suppress the level of the sub-vibration V, as shown in the frequency response characteristic diagram shown in Fig. 2, for example. can. Here, the level difference between the main vibration V and the sub-vibration v2 changed as shown in FIG. 3 with respect to the rotation angle θ when the long side of the main surface of the vibrator was rotated clockwise from the Y axis.

この結果から明らかなように、最大のレベル差りは20
 dBで回転角θ=53°で得られた。また上記レベル
差りを19 dBで許容するならば回転角θ=53°±
4°、すなわち49°乃至57°とすればよい。さらに
レベル差りを17 dBでよければ回転角θ=53°±
10°、すなわち43°乃至63°とすればよい。さら
に長辺をY軸から時計方向へ50°回転した幅1.5簡
厚みが略0.7■のX板において長辺の長さtとcr値
との関係は第4図に示すようになった。なお上記振動子
の共振周波数は3.5 MHzのものである。この結果
から明らかなように長辺tの長さを幅の2倍よシも長く
することによficI値は低い一定の値になる。
As is clear from this result, the maximum level difference is 20
dB and a rotation angle θ=53°. Also, if the above level difference is allowed at 19 dB, the rotation angle θ = 53° ±
The angle may be 4°, that is, 49° to 57°. Furthermore, if the level difference is 17 dB, the rotation angle θ = 53°±
The angle may be 10°, that is, 43° to 63°. Further, for an X plate whose long side is rotated 50° clockwise from the Y axis and whose width is 1.5 cm and thickness is approximately 0.7 cm, the relationship between the length t of the long side and the cr value is as shown in Figure 4. became. Note that the resonant frequency of the above vibrator is 3.5 MHz. As is clear from this result, by making the length of the long side t twice as long as the width, the ficI value becomes a constant low value.

したがって、クンタル酸リチウムのX板の主面の長辺を
Y軸から時計方向に43°乃至63°回転した矩形の振
動子において、短辺に対する長辺の比を2倍以上とする
ことによシ副振動を充分に抑圧できしかも寸法が小さく
CI値の低い振動子を得ることができる。
Therefore, in a rectangular vibrator in which the long side of the main surface of the X plate of lithium quantalate is rotated 43° to 63° clockwise from the Y axis, the ratio of the long side to the short side is made to be at least twice as large. It is possible to obtain a vibrator which can sufficiently suppress secondary vibrations, is small in size, and has a low CI value.

以上詳述したように本発明は、タンタル酸リチウムのX
板を矩形に成形し、かつ長辺をY。
As detailed above, the present invention provides lithium tantalate with
Form the board into a rectangle, and the long side is Y.

2千面内でY軸から時計方向に43°乃至63°回転し
、かつ主面の短辺に対する長辺の比を2倍以上にしたの
で副振動によるスノリアス成分を大幅に抑圧し、しかも
形状が小型でCI値の低いタンタル酸リチウム振動子を
提供することができる。
It is rotated 43° to 63° clockwise from the Y-axis within 2,000 planes, and the ratio of the long side to the short side of the main surface is more than double, which greatly suppresses the snorious component due to secondary vibration. However, it is possible to provide a lithium tantalate oscillator that is small in size and has a low CI value.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す平面図、第2図はタン
タル酸リチウム振動子の周波数応答特性を示す図、第3
図は長辺のY軸からの回転角とスゲリアスの減衰量との
関係を示す図、第5− 4図は長辺と短辺の比に対するCI値の関係を示す図で
ある。 出願人代理人  弁理士 鈴 江 武 彦6−
FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a diagram showing frequency response characteristics of a lithium tantalate oscillator, and FIG.
The figure shows the relationship between the rotation angle of the long side from the Y axis and the attenuation amount of Sgelius, and Figure 5-4 shows the relationship between the CI value and the ratio of the long side to the short side. Applicant's agent Patent attorney Takehiko Suzue 6-

Claims (1)

【特許請求の範囲】[Claims] タンタル酸リチウムの結晶軸のX軸に直交するY、z平
面に沿う主面を有1−かつ矩形に成形するとともに、長
辺を上記Y、z平面内でY軸から時計方向に43°乃至
63°回転し、かつ主面の短辺に対する長辺の比を2倍
以上にしたことを特徴とするタンタル酸リチウム振動子
It is formed into a rectangular shape with the main surface along the Y, z plane perpendicular to the X axis of the crystal axis of lithium tantalate, and the long side is 43° clockwise from the Y axis in the Y, z plane. A lithium tantalate oscillator characterized by being rotated by 63 degrees and having a ratio of the long side to the short side of the main surface which is more than double.
JP21739782A 1982-12-11 1982-12-11 Tantalic acid lithium oscillator Pending JPS59107619A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21739782A JPS59107619A (en) 1982-12-11 1982-12-11 Tantalic acid lithium oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21739782A JPS59107619A (en) 1982-12-11 1982-12-11 Tantalic acid lithium oscillator

Publications (1)

Publication Number Publication Date
JPS59107619A true JPS59107619A (en) 1984-06-21

Family

ID=16703545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21739782A Pending JPS59107619A (en) 1982-12-11 1982-12-11 Tantalic acid lithium oscillator

Country Status (1)

Country Link
JP (1) JPS59107619A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185688A (en) * 1975-01-27 1976-07-27 Kinsekisha Lab Ltd KOKETSUGOATSUDENSHINDOSHI
JPS5683110A (en) * 1979-12-10 1981-07-07 Toshiba Corp Thickness slip oscillator of litium tantalate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185688A (en) * 1975-01-27 1976-07-27 Kinsekisha Lab Ltd KOKETSUGOATSUDENSHINDOSHI
JPS5683110A (en) * 1979-12-10 1981-07-07 Toshiba Corp Thickness slip oscillator of litium tantalate

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