JPH0344451B2 - - Google Patents
Info
- Publication number
- JPH0344451B2 JPH0344451B2 JP58133748A JP13374883A JPH0344451B2 JP H0344451 B2 JPH0344451 B2 JP H0344451B2 JP 58133748 A JP58133748 A JP 58133748A JP 13374883 A JP13374883 A JP 13374883A JP H0344451 B2 JPH0344451 B2 JP H0344451B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- plate
- thickness
- vibrator
- piezoelectric plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 6
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 4
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 6
- 229910012463 LiTaO3 Inorganic materials 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
(a) 発明の技術分野
本発明は圧電振動子に係り、特にニオブ酸リチ
ユーム（LiNbO3）165±５度回転Ｙ板を用いた
圧電振動子に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a piezoelectric vibrator, and more particularly to a piezoelectric vibrator using a Y plate of lithium niobate (LiNbO3) rotated by 165±5 degrees.
(b) 技術の背景
水晶振動子に代表される機械的共振子は電子回
路部品としての高Ｑ、高安定のために共振子、発
振子およびフイルタ等に広く利用されている。近
年電子機器の小形化、薄形化および軽量化が進む
中で、チツプ化の要求が強まつている部品の一つ
に数ＭHz〜数十ＭHzの振動子がある。タンタル酸
リチユーム（LiTaO3）、ニオブ酸リチユーム
（LiNbO3）の圧電単結晶はその大きな電気−機
械結合係数により、水晶では不可能とされていた
分野の振動子を実現することが可能になり、実用
化を目指して多くの研究がなされている。(b) Background of the Technology Mechanical resonators, such as crystal oscillators, are widely used in resonators, oscillators, filters, etc. due to their high Q and high stability as electronic circuit components. As electronic devices have become smaller, thinner, and lighter in recent years, one component for which there is an increasing demand for chipping is a vibrator with a frequency of several MHz to several tens of MHz. Piezoelectric single crystals of lithium tantalate (LiTaO3) and lithium niobate (LiNbO3) have large electro-mechanical coupling coefficients, making it possible to create resonators in fields that were previously considered impossible with quartz, and have been put into practical use. Many studies have been conducted toward this goal.
また振動子を小形化し、スプリアス特性を改善
するには圧電素板をストリツプ化することが有効
であることは既に良く知られており、LiTaO3を
用いたストリツプ形の圧電振動子も発表されてい
る。 Furthermore, it is already well known that forming a piezoelectric plate into a strip is effective in reducing the size of the resonator and improving spurious characteristics, and a strip-shaped piezoelectric resonator using LiTaO3 has also been announced. .
ストリツプ形圧電振動子は圧電素板と圧電素板
の表裏面に被着形成された電極、および該電極に
外部から交流電界を印加するために圧電素板の長
手方向の両端に設けられた端子電極によつて構成
される。そして該端子電極に交流電界を印加する
と、圧電素板は印加電界と等しい周波数の応力を
生じ、且つ印加電界の周波数が圧電素板の固有振
動数に合致すると共振し強勢な振動が得られる。
しかし圧電素板の特性は結晶からそれを切り出す
ときの切出方位や形状によつて異なり、高品質、
高精度の圧電振動子を得るためには、例えば厚み
すべり振動子においては厚みすべりモードの振動
が強く厚み縦モードの振動が弱い圧電素板の切出
方位を選定し、更にスプリアスの発生を抑制し、
且つ等価直列抵抗を小さくする圧電素板の形状を
設定する必要がある。 A strip type piezoelectric vibrator includes a piezoelectric plate, electrodes formed on the front and back surfaces of the piezoelectric plate, and terminals provided at both ends of the piezoelectric plate in the longitudinal direction to apply an alternating current electric field to the electrodes from the outside. Consists of electrodes. When an alternating current electric field is applied to the terminal electrode, the piezoelectric plate generates stress with a frequency equal to the applied electric field, and when the frequency of the applied electric field matches the natural frequency of the piezoelectric plate, it resonates and strong vibrations are obtained.
However, the characteristics of a piezoelectric plate vary depending on the cutting direction and shape when cutting it from the crystal, resulting in high quality and
In order to obtain a high-precision piezoelectric vibrator, for example, in a thickness-shear vibrator, the cutting direction of the piezoelectric plate is selected so that the vibration in the thickness-shear mode is strong and the vibration in the thickness-longitudinal mode is weak, and the generation of spurious waves is further suppressed. death,
Moreover, it is necessary to set the shape of the piezoelectric element plate to reduce the equivalent series resistance.
(c) 従来技術と問題点
LiTaO3を用いた圧電振動子については既に実
用化が試みられ、最適の切出方位や圧電素板の形
状等が明確化され公表されている。一方LiNbO3
についても、LiTaO3に比べて結合係数が高く圧
電振動子の小型化が可能になり、製造コストの面
でも有利になるという点に着眼して実用化が試み
られている。そして厚みすべりモードの振動が強
く、且つ厚み縦モードの振動が最も弱い圧電素板
として、対向主面が165±５度の範囲の角度をも
つ回転Ｙ板の切出し面である圧電素板（以下165
±５度回転Ｙ板と略称する）が選定され、実用化
のための研究が進められているが、スプリアスの
発生を抑制し、且つ等価直列抵抗を小さくする圧
電素板の形状については末だ解明されていなかつ
た。(c) Prior art and problems Attempts have already been made to put piezoelectric vibrators using LiTaO3 into practical use, and the optimum cutting orientation, shape of the piezoelectric plate, etc. have been clarified and made public. On the other hand, LiNbO3
Attempts are also being made to put it into practical use, as it has a higher coupling coefficient than LiTaO3, making it possible to miniaturize piezoelectric vibrators, and also being advantageous in terms of manufacturing costs. As a piezoelectric element whose vibration in the thickness-shear mode is strong and vibration in the thickness-longitudinal mode is the weakest, a piezoelectric element (hereinafter referred to as 165
A piezoelectric plate (abbreviated as a ±5 degree rotated Y plate) has been selected, and research is underway to put it into practical use, but the shape of the piezoelectric plate that suppresses the generation of spurious waves and reduces the equivalent series resistance has yet to be determined. It had not been explained.
(d) 発生の目的
本発明の目的はLiNbO3 165±５度回転Ｙ板を
用いた圧電振動子において、スプリアスの発生を
抑制し、且つ等価直列抵抗が小さくなる圧電素板
の形状を提供することにある。(d) Purpose of generation The purpose of the present invention is to provide a shape of the piezoelectric element plate that suppresses the generation of spurious and reduces the equivalent series resistance in a piezoelectric vibrator using a LiNbO3 165±5 degree rotated Y plate. It is in.
(e) 発明の構成
この目的はニオブ酸リチユーム（LiNbO3）単
結晶からなる直方体状の圧電素板を有し、該圧電
素板の対向主面が、Ｙ軸に垂直な面をＸ軸のまわ
りにＹ軸からＺ軸方向へ165±５度の範囲内で回
転させた回転Ｙ板の切出し面で形成され、且つ該
対向主面の長手方向が前記回転Ｙ板のＸ軸に対し
90±５度の範囲にある厚みすべり振動子におい
て、圧電素板の板厚をＨとし長さをＬ、幅をＷと
したとき、Ｌ／Ｈ＞８、Ｗ／Ｈ＜1.3、または2.5
＜Ｗ／Ｈ＜4.3であることを特徴とする圧電振動
子の提供によつて達成される。(e) Structure of the Invention This object has a rectangular parallelepiped piezoelectric plate made of lithium niobate (LiNbO 3 ) single crystal, and the opposing main surfaces of the piezoelectric plate are arranged so that the plane perpendicular to the Y-axis is aligned with the X-axis. It is formed by a cut-out surface of a rotating Y-plate rotated within a range of 165±5 degrees from the Y-axis to the Z-axis direction, and the longitudinal direction of the opposing main surface is relative to the X-axis of the rotating Y-plate.
In a shear vibrator with a thickness in the range of 90±5 degrees, when the thickness of the piezoelectric plate is H, the length is L, and the width is W, L/H>8, W/H<1.3, or 2.5
This is achieved by providing a piezoelectric vibrator characterized by <W/H<4.3.
(f) 発明の実施例
以下添付図により本発明の実施例を説明する。
第１図は本発明になるストリツプ形圧電振動子の
構造である。(f) Embodiments of the invention Examples of the invention will be described below with reference to the accompanying drawings.
FIG. 1 shows the structure of a strip type piezoelectric vibrator according to the present invention.
ストリツプ形圧電振動子はLiNbO3 165±５度
回転Ｙ板を用いた圧電素板１、圧電素板１の表裏
面に被着形成されたAu等の金属よりなる電極２
および３、ならびに圧電素板１の長手方向両端に
設けられた端子電極４および５によつて構成され
ており、電極２と端子電極４、電極３と端子電極
５がそれぞれ電気的に接続されている。そしてス
プリアスの改善と振動子の小形化を可能にするた
め、電極２および３は振動変位の方向と平行な面
に被着形成されており、圧電素板１の長手方向は
結晶のＸ軸にたいし90±５度の方位に設定されて
いる。 The strip type piezoelectric vibrator includes a piezoelectric element plate 1 using a LiNbO3 Y plate rotated by 165±5 degrees, and electrodes 2 made of metal such as Au deposited on the front and back surfaces of the piezoelectric element plate 1.
and 3, and terminal electrodes 4 and 5 provided at both longitudinal ends of the piezoelectric plate 1, and the electrode 2 and the terminal electrode 4, and the electrode 3 and the terminal electrode 5 are electrically connected, respectively. There is. In order to improve spurious response and make the vibrator smaller, electrodes 2 and 3 are formed on a plane parallel to the direction of vibration displacement, and the longitudinal direction of piezoelectric plate 1 is aligned with the X axis of the crystal. The direction is set at 90±5 degrees.
第２図は圧電素板の板厚Ｈ、長さＬの比率と等
価直列抵抗Rsの関係を表した図である。 FIG. 2 is a diagram showing the relationship between the ratio of the thickness H and length L of the piezoelectric plate and the equivalent series resistance Rs.
図において圧電素板の板厚Ｈと長さＬの比率、
即ちＬ／Ｈが８より小さくなると等価直列抵抗
Rsが急速に増加し、スプリアスもその範囲にお
いて発生することが明らかである。したがつてス
プリアスの発生を抑制し、且つ等価直列抵抗を小
さくするには圧電素板の板厚Ｈと長さＬの比率は
８よりも大きくなければならない。 In the figure, the ratio of the thickness H and length L of the piezoelectric plate,
In other words, when L/H becomes less than 8, the equivalent series resistance
It is clear that Rs increases rapidly and spurious also occurs in that range. Therefore, in order to suppress the generation of spurious waves and to reduce the equivalent series resistance, the ratio of the thickness H to the length L of the piezoelectric plate must be greater than 8.
第３図は圧電素板の板厚Ｈ、幅Ｗの比率と等価
直列抵抗Rsの関係を表した図である。 FIG. 3 is a diagram showing the relationship between the ratio of the thickness H and width W of the piezoelectric plate and the equivalent series resistance Rs.
図において圧電素板の板厚Ｈと幅Ｗの比率、即
ちＷ／Ｈが1.3より小さいか、または2.5より大き
く4.3よりも小さい範囲において等価直列抵抗Rs
が小さくなることが明らかである。したがつて等
価直列抵抗を小さくするには圧電素板の板厚Ｈと
幅Ｗの比率は1.3より小さいか、または2.5より大
きく4.3よりも小さい範囲でなければならない。 In the figure, the equivalent series resistance Rs is in the range where the ratio of the thickness H to the width W of the piezoelectric plate, that is, W/H, is smaller than 1.3, or larger than 2.5 and smaller than 4.3.
It is clear that the value becomes smaller. Therefore, in order to reduce the equivalent series resistance, the ratio of the thickness H to the width W of the piezoelectric plate must be smaller than 1.3, or larger than 2.5 and smaller than 4.3.
(g) 発明の効果
以上述べたように本発明によればLiNbO3 165
±５度回転Ｙ板を用いた圧電振動子において、ス
プリアスの発生を抑制し、且つ等価直列抵抗が小
さくなる圧電素板の形状を提供することができ
る。(g) Effect of the invention As described above, according to the present invention, LiNbO3 165
In a piezoelectric vibrator using a Y plate rotated by ±5 degrees, it is possible to provide a shape of the piezoelectric element plate that suppresses the generation of spurious waves and reduces the equivalent series resistance.
第１図は本発明になるストリツプ形圧電振動子
の構造、第２図は圧電素板の板厚Ｈ、長さＬの比
率と等価直列抵抗Rsの関係を表した図、第３図
は圧電素板の板厚Ｈ、幅Ｗの比率と等価直列抵抗
Rsの関係を表した図である。
図において１は圧電素板、２および３は電極、
４および５は端子電極、Ｈは板厚、Ｌは長さ、Ｗ
は幅を示す。
Fig. 1 shows the structure of the strip-type piezoelectric vibrator according to the present invention, Fig. 2 shows the relationship between the ratio of the thickness H and length L of the piezoelectric plate and the equivalent series resistance Rs, and Fig. 3 shows the relationship between the piezoelectric Ratio of thickness H and width W of the raw plate and equivalent series resistance
It is a diagram showing the relationship between Rs. In the figure, 1 is a piezoelectric plate, 2 and 3 are electrodes,
4 and 5 are terminal electrodes, H is plate thickness, L is length, W
indicates width.
Claims (1)
なる直方体状の圧電素板を有し、該圧電素板の対
向主面が、Ｙ軸に垂直な面をＸ軸のまわりにＹ軸
からＺ軸方向へ165±５度の範囲内で回転させた
回転Ｙ板の切出し面で形成され、且つ該対向主面
の長手方向が前記回転Ｙ板のＸ軸に対し90±５度
の範囲にある厚みすべり振動子において、圧電素
板の板厚をＨとし長さをＬとしたときにＬ／Ｈ＞
８であることを特徴とする圧電振動子。 ２ 特許請求の範囲第１項記載の圧電振動子にお
いて、圧電素板の板厚をＨとし幅をＷとしたとき
にＷ／Ｈ＜1.3、または2.5＜Ｗ／Ｈ＜4.3であるこ
とを特徴とする圧電振動子。[Claims] 1. A rectangular parallelepiped piezoelectric plate made of lithium niobate (LiNbO 3 ) single crystal; It is formed by a cut-out surface of a rotating Y plate rotated within a range of 165±5 degrees from the Y axis to the Z axis direction, and the longitudinal direction of the opposing main surface is 90±5 degrees with respect to the X axis of the rotating Y plate. In a shear vibrator with a thickness in the range of , when the thickness of the piezoelectric plate is H and the length is L, L/H>
8. A piezoelectric vibrator characterized in that: 2. The piezoelectric vibrator according to claim 1, characterized in that when the thickness of the piezoelectric plate is H and the width is W, W/H<1.3, or 2.5<W/H<4.3. Piezoelectric vibrator.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13374883A JPS6025312A (en) | 1983-07-22 | 1983-07-22 | Piezoelectric vibrator |
| US06/613,187 US4583019A (en) | 1983-05-30 | 1984-05-23 | Piezoelectric resonator using 165° Y-cut LiNbO3 |
| DE8484303505T DE3484450D1 (en) | 1983-05-30 | 1984-05-23 | PIEZOELECTRIC RESONATOR. |
| EP84303505A EP0127442B1 (en) | 1983-05-30 | 1984-05-23 | Piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13374883A JPS6025312A (en) | 1983-07-22 | 1983-07-22 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6025312A JPS6025312A (en) | 1985-02-08 |
| JPH0344451B2 true JPH0344451B2 (en) | 1991-07-08 |
Family
ID=15112005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13374883A Granted JPS6025312A (en) | 1983-05-30 | 1983-07-22 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6025312A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60113511A (en) * | 1983-11-24 | 1985-06-20 | Fujitsu Ltd | Piezoelectric vibrating element |
| JPS62220012A (en) * | 1986-03-20 | 1987-09-28 | Fujitsu Ltd | Piezoelectric vibration element |
| JPH0260222A (en) * | 1988-08-25 | 1990-02-28 | Fujitsu Ltd | Piezoelectric vibrator |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59221023A (en) * | 1983-05-30 | 1984-12-12 | Fujitsu Ltd | Piezoelectric oscillation element |
-
1983
- 1983-07-22 JP JP13374883A patent/JPS6025312A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59221023A (en) * | 1983-05-30 | 1984-12-12 | Fujitsu Ltd | Piezoelectric oscillation element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6025312A (en) | 1985-02-08 |
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