JPH0260222A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPH0260222A JPH0260222A JP21110188A JP21110188A JPH0260222A JP H0260222 A JPH0260222 A JP H0260222A JP 21110188 A JP21110188 A JP 21110188A JP 21110188 A JP21110188 A JP 21110188A JP H0260222 A JPH0260222 A JP H0260222A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- piezoelectric body
- piezoelectric
- piezoelectric vibrator
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 claims abstract description 20
- 239000013078 crystal Substances 0.000 claims abstract description 15
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 abstract description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- 229910052744 lithium Inorganic materials 0.000 abstract 1
- 239000000463 material Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000010936 titanium Substances 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910003327 LiNbO3 Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
ニオブ酸リチウム単結晶の１６３度±１５度回転Ｙ板か
ら圧電体を採取した圧電振動子、特に圧電体には分極反
転層を形成した圧電振動子に関し、高性能化を目的とし
、
ニオブ酸リチウム単結晶の１６３度±１５度回転Ｙ板の
切り出し面を対向主面とし、電極の形成された該対向主
面に対し垂直な厚さ方向に分極反転層の形成された断面
角形の棒状圧電体が、厚さをＨ１幅をＷとしたとき、
Ｗ／Ｈ＝１．０〜１．７または２．０〜２．７であるこ
とを特徴とする、
ならびに、前記圧電体が厚さをＨ２長さをＬとしたとき
、
Ｌ／Ｈ＝１０〜２５
であることを特徴とし構成する。[Detailed Description of the Invention] [Summary] Regarding a piezoelectric vibrator in which a piezoelectric material is obtained from a 163° ± 15° rotated Y plate of lithium niobate single crystal, particularly a piezoelectric vibrator in which a polarization inversion layer is formed on the piezoelectric material, For the purpose of high performance, the cut surfaces of a 163° ± 15° rotated Y plate of lithium niobate single crystal are used as the opposing main surfaces, and a polarization inversion layer is formed in the thickness direction perpendicular to the opposing main surfaces on which the electrodes are formed. The rod-shaped piezoelectric body with a square cross section is formed with a thickness of H1 and a width of W, where W/H is 1.0 to 1.7 or 2.0 to 2.7. Further, when the thickness of the piezoelectric body is H2 and the length is L, the piezoelectric body is characterized in that L/H=10 to 25.
本発明は、ニオブ酸リチウム（ＬｉＮｂＯａ）単結晶の
１６３度±１５度回転Ｙ板から圧電体を採取した圧電振
動子、特に圧電体には分極反転層を形成した圧電振動子
の高性能化構成に関する。The present invention provides a piezoelectric vibrator in which a piezoelectric material is obtained from a Y plate rotated by 163 degrees ± 15 degrees of lithium niobate (LiNbOa) single crystal, and in particular, a high-performance configuration of a piezoelectric vibrator in which a polarization inversion layer is formed on the piezoelectric material. Regarding.
圧電体の対向主面Ｇご、適当な交流電界を印加する対向
電極を形成した圧電振動子において、電気−機械結合係
数の大きいＬｉＮｂＯ３単結晶の１６３度士１ｓ度回転
Ｙ板より採取した圧電体を使用し、その対向主面の一方
（該単結晶の＋Ｃ軸側の面）より分極反転層を形成させ
たストリップ型圧電振動子、例えばチタンの熱拡散によ
って分極反転層を形成させた圧電振動子は、該分極反転
層によって厚みすべり振動が１波長変位となり、高周波
帯域の用途に対し有用である。In a piezoelectric vibrator formed with opposing electrodes that apply an appropriate alternating current electric field to the opposing main surface G of the piezoelectric material, the piezoelectric material was collected from a Y plate rotated by 163 degrees and 1 seconds of LiNbO3 single crystal with a large electro-mechanical coupling coefficient. A strip-type piezoelectric vibrator in which a polarization inversion layer is formed from one of its opposing principal surfaces (the surface on the +C axis side of the single crystal), such as a piezoelectric vibrator in which a polarization inversion layer is formed by thermal diffusion of titanium. The polarization inversion layer causes the thickness shear vibration to be shifted by one wavelength, making it useful for applications in high frequency bands.
前記圧電振動子の振動特性は断面角型の棒状圧電体の寸
法、特に圧電体の厚さをＨ９幅をＷ、長さをＬとしたと
き、Ｗ／Ｈ，Ｌ／、Ｈによる影響が大きい。しかしなが
ら、従来はその最適条件が明らかでないという問題点が
あった。The vibration characteristics of the piezoelectric vibrator are largely influenced by the dimensions of the rod-shaped piezoelectric body with a square cross section, especially W/H, L/, and H, where the thickness of the piezoelectric body is H9, the width is W, and the length is L. . However, in the past, there was a problem that the optimal conditions were not clear.
〔課題を解決するための手段〕
上記問題点の除去を目的とした本発明の圧電振動子は、
第１図の実施例によれば、
ニオブ酸リチウム単結晶の１６３度±１５度回転Ｙ板の
切り出し面を対向主面とし、電極３，４の形成された該
対向主面に対し垂直な厚さ方向に分極反転層の形成され
た断面角形の棒状圧電体２が、厚さをＨ２幅をＷとした
とき、
Ｗ／Ｈ＝１．０〜１．７または２．０〜２．７であるこ
とを特徴とする、
ならびに、圧電体２が厚さをＨ１長さをＬとしたとき、
Ｌ／Ｈ＝１０〜２５
であることを特徴とする。[Means for Solving the Problems] The piezoelectric vibrator of the present invention, which aims to eliminate the above problems, has the following features:
According to the embodiment shown in FIG. 1, the cut plane of the 163°±15° rotated Y plate of lithium niobate single crystal is the opposing main surface, and the thickness perpendicular to the opposing main surface on which the electrodes 3 and 4 are formed is A rod-shaped piezoelectric body 2 with a rectangular cross section on which a polarization inversion layer is formed in the horizontal direction has a thickness of H2 and a width of W/H of 1.0 to 1.7 or 2.0 to 2.7. It is also characterized in that when the thickness of the piezoelectric body 2 is H1 and the length is L, L/H=10 to 25.
上記手段によれば、圧電体の幅Ｗと圧電体の厚さＨとの
比Ｗ／Ｈを、１．０〜１．７または２．０〜２．７とす
ることによって、該圧電体の形状に係わるスプリアスは
、他の条件のものより共振周波数から離れ、圧電体の長
さしと圧電体の幅Ｈとの比Ｌ／Ｈを１０〜２５とするこ
とによって、長さ方向のダンピング影響を受けないよう
になる。According to the above means, by setting the ratio W/H of the width W of the piezoelectric body and the thickness H of the piezoelectric body to 1.0 to 1.7 or 2.0 to 2.7, the piezoelectric body The shape-related spurious is further away from the resonance frequency than under other conditions, and by setting the ratio L/H of the length of the piezoelectric body to the width H of the piezoelectric body to be 10 to 25, the damping effect in the length direction can be reduced. You will no longer receive
以下に、図面を用いて本発明方法の実施例を説明する。 Examples of the method of the present invention will be described below with reference to the drawings.
第１図は本発明の一実施例による圧電振動子の平面図（
イ）とその正面図（Ｕ）、第２図は第１図に示す圧電振
動子の主要製造工程を説明するための図である。ただし
、第２図において分極反転層は、チタンの熱拡散により
形成させる。FIG. 1 is a plan view of a piezoelectric vibrator according to an embodiment of the present invention (
A), its front view (U), and FIG. 2 are diagrams for explaining the main manufacturing process of the piezoelectric vibrator shown in FIG. 1. However, in FIG. 2, the polarization inversion layer is formed by thermal diffusion of titanium.
第１図において、所謂ストリップ型の圧電振動子１は、
ニオブ酸リチウム単結晶の１６３度±１５度回転Ｙ板の
切り出し面を対向主面（上面と下面）とした圧電体２に
、対向電極３と４を形成してなる。In FIG. 1, a so-called strip type piezoelectric vibrator 1 is
Opposing electrodes 3 and 4 are formed on a piezoelectric body 2 whose main surfaces (upper and lower surfaces) are cut out from a 163°±15° rotated Y plate made of lithium niobate single crystal.
断面角型の棒形状である圧電体２は、対向□主面の＋Ｃ
軸側の面（上面）の中央部にその全幅に渡る電極３を形
成し、対向主面の−Ｃ軸側の面【下面）の中央部にその
全幅に渡る電極４を形成し、電極３および４から外部接
続用のリード３ａまたは４ａが延在する。The piezoelectric body 2, which is rod-shaped with a square cross section, has +C on the opposing main surface.
An electrode 3 spanning the entire width is formed at the center of the surface on the axis side (top surface), and an electrode 4 spanning the entire width is formed at the center of the -C axis side surface (bottom surface) of the opposing main surface. A lead 3a or 4a for external connection extends from and 4.
そして、対向主面に垂直方向の厚さをＨ２長さをり９幅
をＷとしたとき、圧電体２はＷ／Ｈが１．０〜１．７ま
たは２．０〜２．７である、あるいはＬ／Ｈが１０〜２
５である、さらにはＷ／Ｈが１．０〜１．７または２．
０〜２．７でありＬ／Ｈが１０〜２５となるように形成
してなる。When the thickness in the direction perpendicular to the opposing main surface is H2 length x 9 width W, the piezoelectric body 2 has a W/H of 1.0 to 1.7 or 2.0 to 2.7, or L/H is 10-2
5, and further W/H is 1.0 to 1.7 or 2.
0 to 2.7 and L/H is 10 to 25.
さらに、圧電体２は回転Ｙ板を単結晶から切り出す前の
ポーリング処理による分極Ｐｓと、分極反転層５を形成
させたことによる反転分極Ｐｇとが形成されており、電
極３と４に適当な高周波電界を印加して発生する厚みす
べり振動は、１波長変位となる。Furthermore, the piezoelectric body 2 has a polarization Ps due to the poling process before cutting out the rotating Y plate from the single crystal, and an inverted polarization Pg due to the formation of the polarization inversion layer 5. Thickness shear vibration generated by applying a high-frequency electric field results in a one-wavelength displacement.
第２図（イ）において、ポーリング処理したＬｉＮｂ０
１の単結晶をスライスした１６３度±１５度回転Ｙ板（
ウェーハ）１）は、分極Ｐｓの方位が添書きした矢印で
示すように上向き方向であるとき、上面（＋Ｃ軸側の面
）にチタン（Ｔｉ）の薄膜１２を被着させる。In Figure 2 (a), LiNb0 subjected to polling
163° ± 15° rotated Y plate sliced from single crystal No. 1 (
A thin film 12 of titanium (Ti) is deposited on the upper surface (surface on the +C axis side) of the wafer 1) when the direction of polarization Ps is upward as shown by the appended arrow.
次いで、ウェーハ１）をＬｉＮｂＯ３のキューり点付近
、例えば１）３０℃で約７０時間加熱し、Ｔｉ薄膜１２
をウェーハ１）に拡散させると第２図（ロ）に示すよう
に、分極Ｐｓに対向する反転分極Ｐｓ “の分極反転
層５が上面より形成される。Next, the wafer 1) is heated near the cue point of LiNbO3, for example 1) at 30°C for about 70 hours to form a Ti thin film 12.
When this is diffused into the wafer 1), a polarization inversion layer 5 having an inverted polarization Ps'' opposite to the polarization Ps is formed from the upper surface, as shown in FIG. 2(b).
次いで、第２図（ハ）に示すように、ウェーハ１）の上
面に複数個の電極３を形成し、下面には各電極３と対向
する複数個の電極４を形成し、それぞれが電極３と４を
含むように図中の一点鎖線１４に沿ってウェーハ１）を
割断すると、第１図に示すような圧電振動子１が完成す
る。Next, as shown in FIG. 2(c), a plurality of electrodes 3 are formed on the upper surface of the wafer 1), and a plurality of electrodes 4 facing each electrode 3 are formed on the lower surface, each of which is connected to the electrode 3. By cutting the wafer 1) along the dashed line 14 in the figure so as to include the wafer 4 and 4, the piezoelectric vibrator 1 as shown in FIG. 1 is completed.
第３図は圧電振動子の周波数定数にとＷ／Ｈとの関係を
示す図、第４図は圧電振動子の直列共振抵抗ＲｓとＬ／
Ｈとの関係を示す図、第５図は本発明の一実施例による
圧電振動子の周波数特性を示す図である。Figure 3 shows the relationship between the frequency constant of the piezoelectric vibrator and W/H, and Figure 4 shows the relationship between the piezoelectric vibrator's series resonance resistance Rs and L/H.
FIG. 5 is a diagram showing the frequency characteristics of a piezoelectric vibrator according to an embodiment of the present invention.
第３図において、横軸は圧電体のＷ／Ｈ，′＃１軸は周
波数定数ｋ （Ｈｚ−ｍ）＋図中のｆｒは共振レベル。In Fig. 3, the horizontal axis is the W/H of the piezoelectric material, and the '#1 axis is the frequency constant k (Hz-m) + fr in the figure is the resonance level.
「ａは反共振レベルであり、圧電体の形状効果による厚
みすべり振動の複数のスプリアスは、図中の曲線に沿っ
て移動、例えばＷ／Ｈ＝４の圧電体を使用した圧電振動
子は１５０Ｈｚ−ｍにスプリアスが発生し、Ｗ／Ｈが小
さくなるに従って該スプリアスは周波数定数ｋが高くな
る方向に移動するようになる。"a is the anti-resonance level, and multiple spurious waves of thickness shear vibration due to the shape effect of the piezoelectric material move along the curve in the figure. For example, a piezoelectric vibrator using a piezoelectric material with W/H = 4 has a frequency of 150 Hz. A spurious is generated at -m, and as W/H becomes smaller, the spurious moves in a direction where the frequency constant k becomes higher.
第３図より、スプリアスに影響されない圧電振動子は、
共振レベルｆｒと各スプリアスの移動曲線とが交差しな
い領域にＷ／Ｈを選定し、かつ、その選定領域で共振レ
ベルｆｒを基準とし該移動曲線と交差しない周波数定数
幅の大きいことが望ましいことから、本発明ではＷ／Ｈ
＝１．０〜１．７または２．０〜２．７ とする。From Figure 3, a piezoelectric vibrator that is not affected by spurious components is
Because it is desirable to select W/H in a region where the resonance level fr and the movement curve of each spurious do not intersect, and to have a large frequency constant width that does not intersect with the movement curve based on the resonance level fr in the selected region. , in the present invention, W/H
=1.0-1.7 or 2.0-2.7.
第４図において、横軸は圧電体のＬ／Ｈ，ｌ軸は直列共
振抵抗Ｒｓであり、図中の曲線は実測値のプロットを結
んだものである。図よりＬ／Ｈ＝５．２〜２５の領域で
直列共振抵抗Ｒｓは９０Ω以下となるが、Ｌ／Ｈの小さ
いことは圧電体が大形化することになるため、本発明で
はＬ／Ｈ＝１０〜２５とする。In FIG. 4, the horizontal axis is the L/H of the piezoelectric body, the l axis is the series resonance resistance Rs, and the curve in the figure is a connection of plots of actually measured values. From the figure, the series resonant resistance Rs is 90Ω or less in the region of L/H = 5.2 to 25. However, since a small L/H means that the piezoelectric body becomes large, in the present invention, the L/H =10 to 25.
第５図において、横軸は周波数（ＭＨｚ） 、縦軸は振
幅レベルであり、ＬｉＮｂ０．単結晶の１６３度回転Ｙ
板から採取した圧電体は、本発明によりＷ／Ｈ＝１．４
６． Ｌ／Ｈ＝２．１であり、共振周波数が１６ＭＨ
ｚである測定圧電振動子の振動特性は、図示するように
１８．５Ｍｔｌｚの近傍に電極交差幅によるスプリアス
が生じるが、１６Ｍ１ｌｚ±２ＭＨｚの範囲に圧電体の
形状効果によるスプリアスが観察されない。In FIG. 5, the horizontal axis is frequency (MHz), the vertical axis is amplitude level, and LiNb0. Single crystal 163 degree rotation Y
According to the present invention, the piezoelectric material collected from the plate has a W/H=1.4
6. L/H=2.1 and resonance frequency is 16MH
Regarding the vibration characteristics of the measured piezoelectric vibrator, which is z, as shown in the figure, spurious noise occurs near 18.5 Mtlz due to the electrode crossing width, but no spurious noise due to the shape effect of the piezoelectric material is observed in the range of 16 Mlz±2 MHz.
以上説明したように本発明方法によれば、ＬｉＮｂ０１
単結晶の１６３度回転Ｙ板から採取した圧電体には分極
反転層の形成された圧電振動子において、圧電体のＷ／
ＨおよびＬ／Ｈを規定し、振動特性が優れ、かつ、安定
な素子を提供できるようにした効果を有する。As explained above, according to the method of the present invention, LiNb01
In a piezoelectric vibrator in which a polarization inversion layer is formed on a piezoelectric material collected from a single-crystal 163 degree rotated Y plate, W/ of the piezoelectric material is
This has the effect of providing a stable element with excellent vibration characteristics by specifying H and L/H.
程の説明図、
第３図は圧電振動子の周波数定数とＷ／）（との関係を
示す図、
第４図は圧電振動子の直列共振抵抗とＬ／Ｈとの関係を
示す図、
第５図は本発明の一実施例による圧電振動子の周波数特
性図、
である。Figure 3 is a diagram showing the relationship between the frequency constant of the piezoelectric vibrator and W/), Figure 4 is a diagram showing the relationship between the series resonance resistance of the piezoelectric vibrator and L/H, FIG. 5 is a frequency characteristic diagram of a piezoelectric vibrator according to an embodiment of the present invention.
図中において、
１は圧電振動子、 ２は圧電体、
３．４は電極、 ５は分極反転層、１）はＬｉＮｂ
０．単結晶の回転Ｙ板（ウェーハ）、Ｈは圧電体の厚さ
、
Ｌは圧電体の長さ、
Ｗは圧電体の幅、
である。In the figure, 1 is a piezoelectric vibrator, 2 is a piezoelectric body, 3.4 is an electrode, 5 is a polarization inversion layer, 1) is LiNb
0. A rotating single crystal Y plate (wafer), H is the thickness of the piezoelectric body, L is the length of the piezoelectric body, and W is the width of the piezoelectric body.
第１図は本発明の一実施例による圧電振動子、第２図は
第１図に示す圧電振動子の主要製造工（イ）
（ロン木衾ｅｆ４ｑ−
少柩例１二よう圧電坂動手第’＋１２１
（ハラ
！７凹に示すＬｔｉ勤子ｙｒＬ学１）遺工報の説明図Ｌ
／Ｈ
Ｌｔｓ勧＋ａ＞直列反語東口たとム／Ｈとθ関係と示す
図第 ４ 図
１、Ｏ
２，０３，Ｄ
ＩＡ／／Ｈ
４，０
５、Ｏ
圧を詔Ｉ初子力周波収定叡とＷ／Ｈとめ関係８ｊＪｎ図
第
凹
−ゴ撃−Ｙ粂Figure 1 shows a piezoelectric vibrator according to an embodiment of the present invention, and Figure 2 shows the main manufacturing process (a) of the piezoelectric vibrator shown in Figure 1.
(Ron Mokuen ef4q-
Small coffin example 1 2-yo piezoelectric slope mover No. 121 (Hara! 7 concave Lti Kinshi yr L science 1) Explanatory diagram L of the remains
/H Lts recommendation + a > Serial antonym East exit and diagram showing the relationship between /H and θ Figure 4 Figure 1, O 2,03,D IA//H 4,0 5,O Pressure edict I first force frequency determination and W/H stop relationship 8jJn figure concave - Gogeki - Ykume
Claims (2)
Ｙ板の切り出し面を対向主面とし、電極（３，４）の形
成された該対向主面に対し垂直な厚さ方向に分極反転層
の形成された断面角形の棒状圧電体（２）が、厚さをＨ
，幅をＷとしたとき、 Ｗ／Ｈ＝１．０〜１．７または２．０〜２．７であるこ
とを特徴とする圧電振動子。(1) The cut plane of a Y plate rotated by 163 degrees ± 15 degrees of lithium niobate single crystal is used as the opposing main surface, and the polarization is inverted in the thickness direction perpendicular to the opposing main surface on which the electrodes (3, 4) are formed. A rod-shaped piezoelectric body (2) with a square cross section on which layers are formed has a thickness of H
, where W is the width, W/H is 1.0 to 1.7 or 2.0 to 2.7.
とき、 Ｌ／Ｈ＝１０〜２５ であることを特徴とした圧電振動子。(2) A piezoelectric vibrator characterized in that the piezoelectric body (2) has a thickness of H and a length of L/H=10 to 25.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21110188A JPH0260222A (en) | 1988-08-25 | 1988-08-25 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21110188A JPH0260222A (en) | 1988-08-25 | 1988-08-25 | Piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0260222A true JPH0260222A (en) | 1990-02-28 |
Family
ID=16600425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21110188A Pending JPH0260222A (en) | 1988-08-25 | 1988-08-25 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0260222A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6025312A (en) * | 1983-07-22 | 1985-02-08 | Fujitsu Ltd | Piezoelectric vibrator |
| JPS60113511A (en) * | 1983-11-24 | 1985-06-20 | Fujitsu Ltd | Piezoelectric vibrating element |
| JPS63117507A (en) * | 1986-11-05 | 1988-05-21 | Fujitsu Ltd | Piezoelectric vibrating element |
-
1988
- 1988-08-25 JP JP21110188A patent/JPH0260222A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6025312A (en) * | 1983-07-22 | 1985-02-08 | Fujitsu Ltd | Piezoelectric vibrator |
| JPS60113511A (en) * | 1983-11-24 | 1985-06-20 | Fujitsu Ltd | Piezoelectric vibrating element |
| JPS63117507A (en) * | 1986-11-05 | 1988-05-21 | Fujitsu Ltd | Piezoelectric vibrating element |
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