JPS59103996A - 流体制御装置 - Google Patents
流体制御装置Info
- Publication number
- JPS59103996A JPS59103996A JP21271382A JP21271382A JPS59103996A JP S59103996 A JPS59103996 A JP S59103996A JP 21271382 A JP21271382 A JP 21271382A JP 21271382 A JP21271382 A JP 21271382A JP S59103996 A JPS59103996 A JP S59103996A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- valve
- pump
- switch
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Non-Positive-Displacement Pumps (AREA)
- Details Of Reciprocating Pumps (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21271382A JPS59103996A (ja) | 1982-12-06 | 1982-12-06 | 流体制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21271382A JPS59103996A (ja) | 1982-12-06 | 1982-12-06 | 流体制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59103996A true JPS59103996A (ja) | 1984-06-15 |
| JPS6234955B2 JPS6234955B2 (OSRAM) | 1987-07-29 |
Family
ID=16627193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21271382A Granted JPS59103996A (ja) | 1982-12-06 | 1982-12-06 | 流体制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59103996A (OSRAM) |
-
1982
- 1982-12-06 JP JP21271382A patent/JPS59103996A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6234955B2 (OSRAM) | 1987-07-29 |
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