JPS589974A - イオン表面処理法 - Google Patents

イオン表面処理法

Info

Publication number
JPS589974A
JPS589974A JP10709281A JP10709281A JPS589974A JP S589974 A JPS589974 A JP S589974A JP 10709281 A JP10709281 A JP 10709281A JP 10709281 A JP10709281 A JP 10709281A JP S589974 A JPS589974 A JP S589974A
Authority
JP
Japan
Prior art keywords
gas
surface treatment
ion
treated
treatment method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10709281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6121308B2 (enrdf_load_stackoverflow
Inventor
Shizuka Yamaguchi
静 山口
Naotatsu Asahi
朝日　直達
Kazuyoshi Terakado
一佳 寺門
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10709281A priority Critical patent/JPS589974A/ja
Publication of JPS589974A publication Critical patent/JPS589974A/ja
Publication of JPS6121308B2 publication Critical patent/JPS6121308B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
JP10709281A 1981-07-10 1981-07-10 イオン表面処理法 Granted JPS589974A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10709281A JPS589974A (ja) 1981-07-10 1981-07-10 イオン表面処理法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10709281A JPS589974A (ja) 1981-07-10 1981-07-10 イオン表面処理法

Publications (2)

Publication Number Publication Date
JPS589974A true JPS589974A (ja) 1983-01-20
JPS6121308B2 JPS6121308B2 (enrdf_load_stackoverflow) 1986-05-26

Family

ID=14450252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10709281A Granted JPS589974A (ja) 1981-07-10 1981-07-10 イオン表面処理法

Country Status (1)

Country Link
JP (1) JPS589974A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222066A (ja) * 1986-03-20 1987-09-30 Toshiba Corp 高速摺動部材の製造方法
US5514229A (en) * 1993-11-24 1996-05-07 Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University Method of producing transparent and other electrically conductive materials

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222066A (ja) * 1986-03-20 1987-09-30 Toshiba Corp 高速摺動部材の製造方法
US5514229A (en) * 1993-11-24 1996-05-07 Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University Method of producing transparent and other electrically conductive materials

Also Published As

Publication number Publication date
JPS6121308B2 (enrdf_load_stackoverflow) 1986-05-26

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